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    Appearance inspection device and defect inspection method
    1.
    发明授权
    Appearance inspection device and defect inspection method 有权

    公开(公告)号：US11936985B2

    公开(公告)日：2024-03-19

    申请号：US17765396

    申请日：2020-03-10

    Applicant: OMRON Corporation

    Inventor： Shingo Hayashi ,  Daisuke Konishi

    IPC: H04N23/695 ,  G01B11/06 ,  G01N21/88 ,  G01N21/956

    CPC classification number: H04N23/695 ,  G01B11/0608 ,  G01N21/956 ,  G01N2021/95646 ,  G01N2201/1042

    Abstract: Provided is a technique capable of more accurately determining a solder protruding defect in an appearance inspection device that acquires an image of an inspection region of an inspection target and measures a height of a predetermined place in the inspection region with a height measurement device. The appearance inspection device includes: an imaging unit (3); a height measurement unit (20); a moving mechanism (5) that moves the imaging unit (3) and the height measurement unit (20). When a restricted region (M) in the inspection target is irradiated with the measurement light emitted from the height measurement unit (20), the determination unit restricts defect determination based on the information on the height of the predetermined place measured by the height measurement unit (20).

    OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE
    2.
    发明申请
    OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE 有权
    用于光谱成像的光学计量系统

    公开(公告)号：US20150146193A1

    公开(公告)日：2015-05-28

    申请号：US14091199

    申请日：2013-11-26

    Applicant: Nanometrics Incorporated

    Inventor： Andrzej Buczkowski

    IPC: G01N21/64 ,  G01N21/55 ,  G01N21/47

    CPC classification number: G01N21/6489 ,  G01B11/0625 ,  G01N21/47 ,  G01N21/55 ,  G01N21/6456 ,  G01N21/88 ,  G01N21/9501 ,  G01N2021/4735 ,  G01N2021/646 ,  G01N2021/8822 ,  G01N2201/06113 ,  G01N2201/1042 ,  G01N2201/1053 ,  H04N3/155

    Abstract: An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector spectrally images the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector spectrally images specular reflection of the broadband illumination along the second illumination line. The detector may also image scattered light from the first illumination line. The illumination lines may be scanned across the sample so that all positions on the sample may be measured.

    Abstract translation: 光学测量装置能够检测光致发光的任何组合，宽带光的镜面反射以及穿过样品宽度的线的散射光。 测量装置包括在样品上产生第一照明线的第一光源。 可以使用扫描系统扫描样品上的照明点以形成照明线。 检测器对沿着照明线发射的光致发光进行光谱成像。 另外，宽带照明源可以用于在样本上产生第二照明线，其中检测器对第二照明线的宽带照明进行光谱反射。 检测器还可以对来自第一照明线的散射光进行成像。 可以在样品上扫描照明线，使得可以测量样品上的所有位置。

    Device and method for analyzing samples
    3.
    发明申请
    Device and method for analyzing samples 有权
    用于分析样品的装置和方法

    公开(公告)号：US20050030541A1

    公开(公告)日：2005-02-10

    申请号：US10878895

    申请日：2004-06-28

    Applicant: Andreas Erlbacher ,  Lutz Niggl ,  Alois Krutzenbichler

    Inventor： Andreas Erlbacher ,  Lutz Niggl ,  Alois Krutzenbichler

    IPC: B01L3/00 ,  G01N21/03 ,  G01N21/25 ,  G01N21/53 ,  G01N21/59 ,  G01N21/64 ,  G01N21/65 ,  G02F1/03 ,  G01N21/00 ,  G02F1/07

    CPC classification number: G01N21/6452 ,  B01L3/5085 ,  B01L2300/0654 ,  B01L2300/0829 ,  B01L2300/168 ,  G01N21/0303 ,  G01N21/253 ,  G01N21/59 ,  G01N2021/6463 ,  G01N2021/6491 ,  G01N2021/651 ,  G01N2201/0446 ,  G01N2201/1042 ,  Y10S436/809

    Abstract: The present invention relates to a device (1) and a method for determining parameters of fluid-containing samples (2) in a system (3) for individually irradiating the samples (2) with light (4) of a light source (5) in an essentially vertical irradiation direction (6). In this case, this system (3) includes a detector (7) for measuring the light (8) coming from a single sample, and this detector (7) has a detection direction (9′), which lies on an optical axis (9) that is essentially parallel to the optical axis (6) of the light source (5). This device (1) includes at least one reflective surface (10), using which the light (4) coming essentially vertically out of the light source (5) may be at least partially deflected in an essentially horizontal irradiation direction (11). The device according to the present invention and the method according to the present invention are distinguished in that the detection direction (9′) of the detector (7)—for measuring the individual light (8) coming from a single sample (2)—is positioned at an angle to the optical axis of the light (4) irradiating the sample (2) in such a way that only the light (8) coming from the individual sample (2), but not this light (4), reaches the detector (7).

    Abstract translation: 本发明涉及一种用于在系统（3）中确定用于用光源（5）的光（4）单独照射样品（2）的系统（3）中的含液样品（2）的参数的装置（1）和方法， 在基本垂直的照射方向（6）上。 在这种情况下，该系统（3）包括用于测量来自单个样品的光（8）的检测器（7），并且该检测器（7）具有位于光轴（9'）上的检测方向（9' 9），其基本上平行于光源（5）的光轴（6）。 该装置（1）包括至少一个反射表面（10），基本上垂直离开光源（5）的光线可以在基本上水平的照射方向（11）上至少部分地偏转。 根据本发明的装置和根据本发明的方法的特征在于，用于测量来自单个样品（2）的单个光（8）的检测器（7）的检测方向（9'） - 被定位成与照射样品（2）的光（4）的光轴成一定角度，使得仅来自各个样品（2）的光（8）而不是该光（4）到达 检测器（7）。

    System and method for multimode imaging
    6.
    发明授权
    System and method for multimode imaging 失效
    多模成像系统和方法

    公开(公告)号：US07567346B2

    公开(公告)日：2009-07-28

    申请号：US11363938

    申请日：2006-03-01

    Applicant: Pavel A. Fomitchov ,  Eugene Barash ,  Ahmad Yetka ,  Joseph Masino, III

    Inventor： Pavel A. Fomitchov ,  Eugene Barash ,  Ahmad Yetka ,  Joseph Masino, III

    IPC: G01N21/25

    CPC classification number: G01N21/6458 ,  G01N21/47 ,  G01N2201/0407 ,  G01N2201/1042 ,  G02B21/0048 ,  G02B21/0076 ,  G02B21/367

    Abstract: A system and method for multimode imaging of at least one sample is disclosed. The system includes at least one light source; an optical system selected responsive to a mode of operation of the imaging system; and a detector capable of selective reading of pixels. The at least one sample is moved elative to the optical system using a sample movement technique selected from the group consisting of step sample moving and continuous sample moving. The method includes the steps of (1) selecting a mode of operation for the imaging system; (2) transmitting light from at least one light source through an optical system selected in response to the mode of operation for the imaging system; (3) moving the at least one sample relative to the optical system using a sample movement technique selected from the group consisting of step sample moving and continuous sample moving; and (4) selectively reading pixels with a detector.

    Abstract translation: 公开了一种用于至少一个样品的多模成像的系统和方法。 该系统包括至少一个光源; 响应于成像系统的操作模式选择的光学系统; 以及能够选择性地读取像素的检测器。 使用选自步骤样品移动和连续样品移动的样品移动技术将至少一个样品移动到光学系统。 该方法包括以下步骤：（1）选择成像系统的操作模式; （2）从至少一个光源透射通过响应于成像系统的操作模式选择的光学系统的光; （3）使用选自步骤样品移动和连续样品移动的样本移动技术来移动所述至少一个样品相对于所述光学系统; 和（4）用检测器选择性地读取像素。

    Device and method for analyzing samples
    7.
    发明授权
    Device and method for analyzing samples 有权
    用于分析样品的装置和方法

    公开(公告)号：US07202945B2

    公开(公告)日：2007-04-10

    申请号：US10878895

    申请日：2004-06-28

    Applicant: Andreas Erlbacher ,  Lutz Niggl ,  Alois Krutzenbichler

    Inventor： Andreas Erlbacher ,  Lutz Niggl ,  Alois Krutzenbichler

    IPC: G01N21/03

    CPC classification number: G01N21/6452 ,  B01L3/5085 ,  B01L2300/0654 ,  B01L2300/0829 ,  B01L2300/168 ,  G01N21/0303 ,  G01N21/253 ,  G01N21/59 ,  G01N2021/6463 ,  G01N2021/6491 ,  G01N2021/651 ,  G01N2201/0446 ,  G01N2201/1042 ,  Y10S436/809

    Abstract: The present invention relates to a device (1) and a method for determining parameters of fluid-containing samples (2) in a system (3) for individually irradiating the samples (2) with light (4) of a light source (5) in an essentially vertical irradiation direction (6). In this case, this system (3) includes a detector (7) for measuring the light (8) coming from a single sample, and this detector (7) has a detection direction (9′), which lies on an optical axis (9) that is essentially parallel to the optical axis (6) of the light source (5). This device (1) includes at least one reflective surface (10), using which the light (4) coming essentially vertically out of the light source (5) may be at least partially deflected in an essentially horizontal irradiation direction (11). The device according to the present invention and the method according to the present invention are distinguished in that the detection direction (9′) of the detector (7)—for measuring the individual light (8) coming from a single sample (2)—is positioned at an angle to the optical axis of the light (4) irradiating the sample (2) in such a way that only the light (8) coming from the individual sample (2), but not this light (4), reaches the detector (7).

    Abstract translation: 本发明涉及一种用于在系统（3）中确定用于用光源（5）的光（4）单独照射样品（2）的系统（3）中的含液样品（2）的参数的装置（1）和方法， 在基本垂直的照射方向（6）上。 在这种情况下，该系统（3）包括用于测量来自单个样品的光（8）的检测器（7），并且该检测器（7）具有位于光轴（9'）上的检测方向（9' 9），其基本上平行于光源（5）的光轴（6）。 该装置（1）包括至少一个反射表面（10），基本上垂直离开光源（5）的光线可以在基本上水平的照射方向（11）上至少部分地偏转。 根据本发明的装置和根据本发明的方法的特征在于，用于测量来自单个样品（2）的单个光（8）的检测器（7）的检测方向（9'） - 被定位成与照射样品（2）的光（4）的光轴成一定角度，使得仅来自各个样品（2）的光（8）而不是该光（4）到达 检测器（7）。

    Optical metrology system for spectral imaging of a sample
    10.
    发明授权
    Optical metrology system for spectral imaging of a sample 有权
    用于样品光谱成像的光学计量系统

    公开(公告)号：US09182351B2

    公开(公告)日：2015-11-10

    申请号：US14091199

    申请日：2013-11-26

    Applicant: Nanometrics Incorporated

    Inventor： Andrzej Buczkowski

    IPC: G01N21/00 ,  G01N21/64 ,  G01N21/47 ,  G01N21/55 ,  G01N21/88 ,  H04N3/14 ,  G01B11/06 ,  G01N21/95

    CPC classification number: G01N21/6489 ,  G01B11/0625 ,  G01N21/47 ,  G01N21/55 ,  G01N21/6456 ,  G01N21/88 ,  G01N21/9501 ,  G01N2021/4735 ,  G01N2021/646 ,  G01N2021/8822 ,  G01N2201/06113 ,  G01N2201/1042 ,  G01N2201/1053 ,  H04N3/155

    Abstract: An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector spectrally images the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector spectrally images specular reflection of the broadband illumination along the second illumination line. The detector may also image scattered light from the first illumination line. The illumination lines may be scanned across the sample so that all positions on the sample may be measured.

    Abstract translation: 光学测量装置能够检测光致发光的任何组合，宽带光的镜面反射以及穿过样品宽度的线的散射光。 测量装置包括在样品上产生第一照明线的第一光源。 可以使用扫描系统扫描样品上的照明点以形成照明线。 检测器对沿着照明线发射的光致发光进行光谱成像。 另外，宽带照明源可以用于在样本上产生第二照明线，其中检测器对第二照明线的宽带照明进行光谱反射。 检测器还可以对来自第一照明线的散射光进行成像。 可以在样品上扫描照明线，使得可以测量样品上的所有位置。

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