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公开(公告)号：US20070133077A1
公开(公告)日：2007-06-14
申请号：US11339044
申请日：2006-01-25
申请人： Steven Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali , Doron Meshulach
发明人： Steven Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali , Doron Meshulach
IPC分类号： G02B26/08
CPC分类号： G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2201/10 , G01N2201/1042 , G01N2201/106
摘要： A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
摘要翻译： 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。
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公开(公告)号：US20060261261A1
公开(公告)日：2006-11-23
申请号：US11334963
申请日：2006-01-19
申请人： Steven Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali
发明人： Steven Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali
IPC分类号： H01J40/14
CPC分类号： G01N21/8851 , G01N21/9501 , G03F7/70275 , G03F7/70358
摘要： A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
摘要翻译： 一种用于扫描表面的方法，包括使用具有轴的光学器件聚焦光束阵列，以便照射由所述轴线截取的表面的区域，使得每个光束照射所述区域内的相应子区域的一部分 。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上扫描相应的子区域。
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公开(公告)号：US07468507B2
公开(公告)日：2008-12-23
申请号：US11339044
申请日：2006-01-25
申请人： Steven R. Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali , Doron Meshulach
发明人： Steven R. Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali , Doron Meshulach
CPC分类号： G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2201/10 , G01N2201/1042 , G01N2201/106
摘要： A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
摘要翻译： 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。
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公开(公告)号：US07468506B2
公开(公告)日：2008-12-23
申请号：US11334963
申请日：2006-01-19
CPC分类号： G01N21/8851 , G01N21/9501 , G03F7/70275 , G03F7/70358
摘要： A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
摘要翻译： 一种用于扫描表面的方法，包括使用具有轴的光学器件聚焦光束阵列，以便照射由所述轴线截取的表面的区域，使得每个光束照射所述区域内的相应子区域的一部分 。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上扫描相应的子区域。
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公开(公告)号：US08389962B2
公开(公告)日：2013-03-05
申请号：US13149318
申请日：2011-05-31
申请人： Konstantine Chirko , Alon Litman , Yoav Nachum
发明人： Konstantine Chirko , Alon Litman , Yoav Nachum
CPC分类号： G01R33/025 , H01J37/28 , H01J2237/0266 , H01J2237/2485
摘要： A system and method for noise compensation of a charged particle beam location includes one or more sensors that are spaced apart from each other for sensing magnetic noises within at least one predefined frequency band thereby to provide magnetic noise measurements with synchronous detection of the location of a charged particle beam. Based on the magnetic noise measurements and on relationships between values of the magnetic noises and particle beam location errors, magnetic noise compensations signals are generated. An object is then scanned by a particle beam in response to a desired particle beam scan pattern and the magnetic noise compensation signals.
摘要翻译： 用于带电粒子束位置的噪声补偿的系统和方法包括彼此间隔开的一个或多个传感器，用于感测至少一个预定频带内的磁噪声，由此提供磁噪声测量，同时检测位置的一个 带电粒子束。 基于磁噪声测量以及磁噪声和粒子束位置误差之间的关系，产生磁噪声补偿信号。 然后响应于期望的粒子束扫描图案和磁噪声补偿信号，通过粒子束扫描物体。
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公开(公告)号：US20060243922A1
公开(公告)日：2006-11-02
申请号：US11458052
申请日：2006-07-17
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
IPC分类号： G21K5/10
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
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公开(公告)号：US06914443B2
公开(公告)日：2005-07-05
申请号：US10426205
申请日：2003-04-29
申请人： Alon Litman , Chris Talbot
发明人： Alon Litman , Chris Talbot
IPC分类号： G01R31/311 , G01R31/305
CPC分类号： G01R31/307
摘要： A system and method is provided for testing the resistance of a test wafer having multiple conductors. Embodiments include a method having the steps of providing a signal that is substantially larger than a signal threshold to a test structure; and scanning at least two conductors of the test structure, that are electrically couplet to each other, by a limited voltage resolution SEM. Charged particles emitted from the at least two conductors as a result of the scanning are collected, thus providing an indication about a resistance of the at least two conductors.
摘要翻译： 提供了一种用于测试具有多个导体的测试晶片的电阻的系统和方法。 实施例包括具有以下步骤的方法：向测试结构提供基本上大于信号阈值的信号; 并且通过有限的电压分辨率SEM扫描测试结构的至少两个导体彼此电耦合。 收集由扫描结果从至少两个导体发射的带电粒子，从而提供关于至少两个导体的电阻的指示。
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公开(公告)号：US07842935B2
公开(公告)日：2010-11-30
申请号：US11458043
申请日：2006-07-17
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
IPC分类号： H01J37/00
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
摘要翻译： 用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。 当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束 同时将多个像素写入衬底。
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公开(公告)号：US20100072365A1
公开(公告)日：2010-03-25
申请号：US12237364
申请日：2008-09-24
申请人： Amir Shoham , Benzion Sender , Alon Litman
发明人： Amir Shoham , Benzion Sender , Alon Litman
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , G01N23/2208 , G01N23/2251 , H01J37/222 , H01J2237/221 , H01J2237/24495 , H01J2237/2809 , H01J2237/2823
摘要： A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam from the first region, and scanning a second region of the surface with the primary charged particle beam at a second scan rate faster than the first scan rate so as to generate a second secondary charged particle beam from the second region. The method also includes receiving the first secondary charged particle beam and the second secondary charged particle beam at a detector configured to generate a signal in response to the beams, and forming an image of the first and the second regions in response to the signal.
摘要翻译： 一种用于对表面进行成像的方法，包括以第一扫描速率用初级带电粒子束扫描表面的第一区域，以便产生来自第一区域的第一次级带电粒子束，以及扫描表面的第二区域， 所述初级带电粒子束以比所述第一扫描速率快的第二扫描速率，以便从所述第二区域产生第二次级带电粒子束。 该方法还包括在被配置为响应于光束产生信号的检测器处接收第一次级带电粒子束和第二次级带电粒子束，并且响应于该信号形成第一和第二区域的图像。
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公开(公告)号：US07430104B2
公开(公告)日：2008-09-30
申请号：US10449539
申请日：2003-05-29
申请人： Alon Litman , Igor Krivts
发明人： Alon Litman , Igor Krivts
IPC分类号： H01L21/683 , H05F3/00
CPC分类号： H01L21/6833 , H01L21/6831 , Y10T279/1208
摘要： An electrostatic chuck is configured for electrostatically securing a wafer while limiting charge on the wafer and physical contact between the electrostatic chuck and the wafer. The electrostatic chuck has a pair of electrodes and at least one support pin electrically isolated from the electrodes. The top portion of the support pin protrudes above the top surface of the electrodes. The support pin can be such that the top portion of the support pin is adjustable with respect to the top surfaces of the electrodes.
摘要翻译： 静电卡盘构造成静电固定晶片，同时限制晶片上的电荷和静电卡盘与晶片之间的物理接触。 静电卡盘具有一对电极和至少一个与电极电隔离的支撑销。 支撑销的顶部突出在电极的顶表面上方。 支撑销可以使得支撑销的顶部相对于电极的顶表面是可调节的。
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