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1.发明申请公开(公告)号：US20190234911A1
公开(公告)日：2019-08-01
申请号：US16337339
申请日：2017-09-28
Inventor： Todd W. Murray , Peter Burgholzer , Markus Haltmeier
CPC classification number: G01N29/4472 , G01N21/1702 , G01N21/4795 , G01N29/00 , G01N29/0672 , G01N29/2418 , G01N2021/1706 , G01N2021/479 , G01N2021/8444 , G01N2201/106
Abstract: A method for high resolution photoacoustic imaging in scattering media using structured illumination may include illuminating a sample of an absorption object with structured illumination, including illuminating the sample with multiple different speckle patterns at different times. The method may also include detecting multiple photoacoustic signals generated by the absorption object in response to illumination with the different speckle patterns to generate multiple photoacoustic responses. The method may also include reconstructing an absorber distribution of the absorption object by exploiting joint sparsity of sound sources in the plurality of photoacoustic responses.
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2.发明申请Systems and Methods for Run-Time Alignment of a Spot Scanning Wafer Inspection System 有权点扫描晶片检测系统的运行时间对准的系统和方法公开(公告)号：US20160313256A1
公开(公告)日：2016-10-27
申请号：US15004331
申请日：2016-01-22
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Wenjian Cai , Kai Cao
CPC classification number: G02B13/0095 , G01N21/93 , G01N21/9501 , G01N21/95607 , G01N2201/106 , G01N2201/12
Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.
Abstract translation: 具有运行时间对准的点扫描成像系统包括：束扫描装置，其被配置为线性扫描横跨样本的聚焦光束，一个或多个检测器，定位成接收来自样品的光;以及控制器，其通信地耦合到光束扫描装置 ，样品台和一个或多个检测器。 所述控制器被配置为存储第一图像，将一组驱动信号发送到所述波束扫描设备，所述采样台或所述一个或多个检测器中的至少一个，将所述第二采样网格的至少一部分至少比较 第一采样网格的一部分以确定一个或多个偏移误差，并且基于所述一个或多个偏移误差来调整所述驱动信号集合中的至少一个驱动信号，使得所述第二采样网格与所述第一采样网格重叠。
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3.发明申请LASER SCATTERING DEFECT INSPECTION SYSTEM AND LASER SCATTERING DEFECT INSPECTION METHOD 有权激光散射缺陷检测系统和激光散射缺陷检测方法公开(公告)号：US20100085561A1
公开(公告)日：2010-04-08
申请号：US12571791
申请日：2009-10-01
Applicant: Eiji KAMIYAMA , Takehiro TSUNEMORI , Kazuhiro YAMAMOTO , Kenji AOKI
Inventor： Eiji KAMIYAMA , Takehiro TSUNEMORI , Kazuhiro YAMAMOTO , Kenji AOKI
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N2201/1045 , G01N2201/106
Abstract: A laser scattering defect inspection system includes: a stage unit that rotates a workpiece W and transports the workpiece W in one direction; a laser light source that emits a laser beam LB toward the workpiece W mounted on the stage unit; an optical deflector that scans the laser beam LB emitted from the laser light source on the workpiece W; an optical detector that detects the laser beam LB scattered from the surface of the workpiece W; a storage unit that stores defect inspection conditions for each inspection step of a manufacturing process of the workpiece W, where the conditions include the rotation speed and the moving speed of the workpiece W by the stage unit, the scan width on the workpiece W and the scan frequency by the optical deflector; and a control unit that reads the defect inspection conditions stored for each inspection step in the storage unit and controls the driving of the stage unit and the optical deflector under the conditions.
Abstract translation: 激光散射缺陷检查系统包括：台架单元，其使工件W旋转并沿一个方向输送工件W; 激光光源，其向安装在平台单元上的工件W发射激光束LB; 光学偏转器，其对从工件W上的激光光源发射的激光束LB进行扫描; 检测从工件W的表面散射的激光束LB的光检测器; 存储单元，其存储工件W的制造过程的每个检查步骤的缺陷检查条件，其中条件包括工件W的工件W的转速和移动速度，工件W上的扫描宽度和 扫描频率由光学偏转器; 以及控制单元，其读取存储单元中的每个检查步骤存储的缺陷检查条件，并且在条件下控制台单元和光偏转器的驱动。
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公开(公告)号：US09939368B2
公开(公告)日：2018-04-10
申请号：US14490558
申请日：2014-09-18
Applicant: SAMSUNG MEDISON CO., LTD. , SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jong-kyu Jung , Dal-kwon Koh , Jung-ho Kim , Jung-taek Oh , Jae-kwang Lee
CPC classification number: G01N21/1702 , A61B5/0062 , A61B5/0095 , A61B8/44 , A61B8/4427 , G01N2201/06113 , G01N2201/106
Abstract: Provided are a photoacoustic apparatus and method of operating the same. The photoacoustic apparatus includes: a laser module that generates laser light and transmits a laser state signal indicating a state of a laser module; a probe including an optical output unit for irradiating laser light generated by the laser module onto an object and a scanner for detecting a photoacoustic signal that is generated from the object; a scanner controller for controlling a position of the scanner; a sequence controller for controlling acquisition of the photoacoustic signal based on the laser state signal; a signal receiver that is controlled by the sequence controller to acquire the photoacoustic signal; and a photoacoustic image generator for generating a photoacoustic image based on the photoacoustic signal. The laser state signal includes a lasing ready state signal and a laser exposure state signal.
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公开(公告)号：US07468507B2
公开(公告)日：2008-12-23
申请号：US11339044
申请日：2006-01-25
Applicant: Steven R. Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali , Doron Meshulach
Inventor： Steven R. Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali , Doron Meshulach
CPC classification number: G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2201/10 , G01N2201/1042 , G01N2201/106
Abstract: A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
Abstract translation: 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。
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Patent Agency Ranking
公开(公告)号：US20070133077A1
公开(公告)日：2007-06-14
申请号：US11339044
申请日：2006-01-25
Applicant: Steven Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali , Doron Meshulach
Inventor： Steven Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali , Doron Meshulach
IPC: G02B26/08
CPC classification number: G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2201/10 , G01N2201/1042 , G01N2201/106
Abstract: A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
Abstract translation: 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。
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7.发明申请公开(公告)号：US20160327493A1
公开(公告)日：2016-11-10
申请号：US14982747
申请日：2015-12-29
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Yevgeniy Churin
CPC classification number: G01N21/8806 , G01N21/9501 , G01N2201/0635 , G01N2201/104 , G01N2201/105 , G01N2201/106 , G02B26/101 , G02B27/1086 , G02B27/123 , G02F1/33
Abstract: A system to generate multiple beam lines in an oblique angle multi-beam spot scanning wafer inspection system includes a beam scanning device configured to scan a beam of illumination, an objective lens oriented at an oblique angle relative to the surface of a sample and with an optical axis perpendicular to a first scanning direction on the sample, and one or more optical elements positioned between the objective lens and the beam scanning device. The one or more optical elements split the beam into two or more offset beams such that the two or more offset beams are separated in a least a second direction perpendicular to the first direction. The one or more optical elements further modify the phase characteristics of the two or more offset beams such that the two or more offset beams are simultaneously in focus on the sample during a scan.
Abstract translation: 在斜角多光束点扫描晶片检查系统中产生多个光束线的系统包括：束扫描装置，被配置为扫描照射束;物镜相对于样品的表面以倾斜角度定向;以及 垂直于样品上的第一扫描方向的光轴和位于物镜和束扫描装置之间的一个或多个光学元件。 一个或多个光学元件将光束分成两个或更多个偏移光束，使得两个或更多个偏移光束在垂直于第一方向的至少第二方向上分离。 一个或多个光学元件进一步修改两个或多个偏移光束的相位特性，使得两个或更多个偏移光束在扫描期间同时聚焦在样本上。
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公开(公告)号：US08339593B2
公开(公告)日：2012-12-25
申请号：US12571791
申请日：2009-10-01
Applicant: Eiji Kamiyama , Takehiro Tsunemori , Kazuhiro Yamamoto , Kenji Aoki
Inventor： Eiji Kamiyama , Takehiro Tsunemori , Kazuhiro Yamamoto , Kenji Aoki
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N2201/1045 , G01N2201/106
Abstract: A laser scattering defect inspection system includes: a stage unit that rotates a workpiece W and transports the workpiece W in one direction; a laser light source that emits a laser beam LB toward the workpiece W mounted on the stage unit; an optical deflector that scans the laser beam LB emitted from the laser light source on the workpiece W; an optical detector that detects the laser beam LB scattered from the surface of the workpiece W; a storage unit that stores defect inspection conditions for each inspection step of a manufacturing process of the workpiece W, where the conditions include the rotation speed and the moving speed of the workpiece W by the stage unit, the scan width on the workpiece W and the scan frequency by the optical deflector; and a control unit that reads the defect inspection conditions stored for each inspection step in the storage unit and controls the driving of the stage unit and the optical deflector under the conditions.
Abstract translation: 激光散射缺陷检查系统包括：台架单元，其使工件W旋转并沿一个方向输送工件W; 激光光源，其向安装在平台单元上的工件W发射激光束LB; 光学偏转器，其对从工件W上的激光源发射的激光束LB进行扫描; 检测从工件W的表面散射的激光束LB的光检测器; 存储单元，其存储工件W的制造过程的每个检查步骤的缺陷检查条件，其中条件包括工件W的工件W的转速和移动速度，工件W上的扫描宽度和 扫描频率由光学偏转器; 以及控制单元，其读取存储单元中的每个检查步骤存储的缺陷检查条件，并且在条件下控制台单元和光偏转器的驱动。
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9.发明申请SYSTEM AND METHOD FOR INSPECTING AN OBJECT USING AN ACOUSTO-OPTIC DEVICE 有权使用ACOUSTO-OPTIC DEVICE检测对象的系统和方法公开(公告)号：US20080100830A1
公开(公告)日：2008-05-01
申请号：US11554513
申请日：2006-10-30
Applicant: Alexander Veis , Yoram Saban
Inventor： Alexander Veis , Yoram Saban
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N21/8851 , G01N2201/106
Abstract: A system and method for inspecting an object. The system includes: a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the traveling lens acousto-optic device; a first scanner, adapted to direct a beam of light towards the traveling lens while the traveling lens propagates; a first beam splitter, adapted to receive a beam formed by the traveling lens; and to split the scanned beam to multiple illuminating light beams; multiple detectors; and an objective lens; adapted to receive the multiple illuminating light beams, direct the multiple illuminating light beams towards multiple areas of the object, receive multiple collected light beams from the multiple areas of the object, and direct the multiple collected light beams towards the multiple detectors; wherein each detector is associated with an area of the multiple areas.
Abstract translation: 用于检查物体的系统和方法。 该系统包括：行进透镜声光装置，其适于产生传播通过移动透镜声光装置的有源区域的行进透镜; 第一扫描器，适于在行进透镜传播时将光束引向行进透镜; 第一分束器，适于接收由所述行进透镜形成的光束; 并将扫描光束分割成多个照明光束; 多个探测器; 和物镜; 适于接收多个照明光束，将多个照明光束引导到物体的多个区域，从物体的多个区域接收多个收集的光束，并将多个收集的光束引导到多个检测器; 其中每个检测器与多个区域的区域相关联。
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公开(公告)号：US09864173B2
公开(公告)日：2018-01-09
申请号：US15004331
申请日：2016-01-22
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Wenjian Cai , Kai Cao
IPC: G01B11/00 , G02B13/00 , G01N21/95 , G01N21/956
CPC classification number: G02B13/0095 , G01N21/93 , G01N21/9501 , G01N21/95607 , G01N2201/106 , G01N2201/12
Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.
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