公开(公告)号：US20080116918A1

公开(公告)日：2008-05-22

申请号：US11940355

申请日：2007-11-15

申请人： Stojan Kanev ,  Hans-Juergen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

发明人： Stojan Kanev ,  Hans-Juergen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

IPC分类号： G01R31/26

CPC分类号： G01R31/2886 ,  G01R1/18

摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.

摘要翻译： 适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是 最小化，并且还包括用于准备测试信号的装置。 此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

公开(公告)号：US07652491B2

公开(公告)日：2010-01-26

申请号：US11940354

申请日：2007-11-15

申请人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

发明人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

IPC分类号： G10R31/28

CPC分类号： G01R31/2889 ,  G01R1/07342

摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.

摘要翻译： 用于保持探头的探针支架用于探测器中的测试基板的电接触以用于测试目的包括探针卡夹，探针卡和探针卡适配器。探针卡和探针卡适配器彼此电连接为 以及导电材料的屏蔽件，并且被布置成使得探针卡位于屏蔽件的通道中。 屏蔽件设置在测试基板和探针卡座之间并且与保持器电绝缘。 为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的， 由x分量和y分量组成直到第一个和每个附加的接触位置。

公开(公告)号：US08278951B2

公开(公告)日：2012-10-02

申请号：US11940355

申请日：2007-11-15

申请人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

发明人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

IPC分类号： G01R31/00

CPC分类号： G01R31/2886 ,  G01R1/18

摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.

摘要翻译： 适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是 最小化，并且还包括用于准备测试信号的装置。 此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

公开(公告)号：US20080116917A1

公开(公告)日：2008-05-22

申请号：US11940354

申请日：2007-11-15

申请人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

发明人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

IPC分类号： G01R31/02

CPC分类号： G01R31/2889 ,  G01R1/07342

摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes is specified. A process for testing test substrates in such a prober is also specified. The probe support comprises a probe card holder, a probe card, and a probe card adapter, where the probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed in such a manner that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from it. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component (FIG. 2).

摘要翻译： 规定了用于保持探头的探针支架，用于检测探针中的测试基板的电接触用于测试目的。 还规定了用于在这种探测器中测试测试底物的方法。 探针支架包括探针卡夹，探针卡和探针卡适配器，其中探针卡和探针卡适配器彼此电连接以及导电材料的屏蔽，并以这种方式设置 探针卡位于屏蔽的通道中。 屏蔽件设置在测试基板和探针卡保持器之间并且与其电绝缘。 为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的， 由x分量和y分量（图2）组成直到第一个和每个附加的接触位置。