Surface metrological apparatus
    1.
    发明授权
    Surface metrological apparatus 失效
    表面计量仪器

    公开(公告)号:US5001409A

    公开(公告)日:1991-03-19

    申请号:US368304

    申请日:1989-06-07

    摘要: In an apparatus for measuring texture and characterization of the surface of a sample on the basis of the drive signal of a servo control circuit by allowing a probe-tip (1) to approach the sample (2) and subjecting the probe-tip (1) to servo control so that a current, which is generated by moving the probe-tip (1) on the sample surface and which flows between the probe-tip (1) and the sample (2), becomes constant, the present invention discloses a surface metrological apparatus comprising a circuit (11, 12) for correcting the texture and characterization of the sample by use of a current error of the measured value of the current described above from the set current value.

    摘要翻译: PCT No.PCT / JP88 / 00967 Sec。 371日期1989年6月7日第 102(e)日期1989年6月7日PCT提交1988年9月22日PCT公布。 第WO89 / 03510号公报 日期:1989年4月20日。在根据伺服控制电路的驱动信号通过使探针尖端(1)接近样品(2)和/或 使探针尖端(1)进行伺服控制,使得通过在探针尖端(1)和样品(2)之间流动的样品表面上移动探针尖端(1)而产生的电流, 本发明公开了一种表面计量装置,其包括用于通过使用上述电流的测量值从设定电流值的电流误差来校正样品的纹理和表征的电路(11,12)。

    Method and apparatus for composite wobbled and push-pull tracking servo
system
    7.
    发明授权
    Method and apparatus for composite wobbled and push-pull tracking servo system 失效
    复合摆动和推挽跟踪伺服系统的方法和装置

    公开(公告)号:US4707816A

    公开(公告)日:1987-11-17

    申请号:US938961

    申请日:1986-12-08

    IPC分类号: G11B7/013 G11B7/09 G11B7/095

    摘要: A composite wobbled tracking servo system uses a rotary optical disc which has a header field and a data field alternately arranged along the direction of rotation, and which includes pregrooves formed in at least the data field and at least one pair of wobbled track marks disposed in each of the header fields in a relation wobbled relative to the center of a track. A light spot is directed toward and onto the optical disc to detect a push-pull tracking error signal from the reflection of the light spot diffracted from the pregroove, and a wobbled tracking error signal is detected from the reflection of the light spot passing the wobbled track marks. After attenuating the gain of the wobbled tracking error signal by a low-pass filter so that the gain of the wobbled tracking error signal becomes equal to that of the push-pull tracking error signal at a frequency fe satisfying the relation1/50.multidot.N.multidot.fd

    摘要翻译: 复合摆动跟踪伺服系统使用旋转光盘,该旋转光盘具有沿着旋转方向交替布置的头部场和数据场,并且包括形成在至少数据场中的预槽和至少一对摆动轨迹 一个关系中的每个头字段相对于轨道的中心摆动。 光点被指向光盘上并且到达光盘上以从从预制槽衍射的光点的反射中检测推挽跟踪误差信号,并且从通过摆动的光斑的光点的反射检测摆动的跟踪误差信号 轨迹 在通过低通滤波器对摆动跟踪误差信号的增益进行衰减之后,使摆动跟踪误差信号的增益等于推挽跟踪误差信号的频率fe满足关系1 / 50xNxfd