摘要:
A sputtering apparatus for depositing a target material on a substrate includes a chamber, a target in the chamber to provide the target material, a carrier to carry the substrate in the chamber to face the target, and a plurality of masks arranged along sides of the carrier and being movable back and forth with respect to the carrier.
摘要:
An inclined carrier transferring apparatus for use inline sputtering equipment. The inclined carrier transferring apparatus includes rollers and a guiding portion. The rollers transfer and support the bottom of a carrier. The guiding portion is installed diagonally with respect to the rollers, to support the top of the carrier in a non-contact manner.
摘要:
There is provided a support platform of a non-contact transfer apparatus. The support platform includes a plurality of first holes for introducing air on a surface of the support platform, and a plurality of second holes for removing the air introduced through the first holes. At least one of a size and a number of the first holes varies in a direction from a central portion of the support platform to peripheral portions of the support platform, and the second holes are identically formed to one another.
摘要:
A method for generating acoustic waves, the method having the steps of: extending a tine from a support structure so that a proximal end of the tine is attached to the support structure and a distal end of the tine is uninhibited; positioning an oscillator so as to be supported by the support structure and to mechanically communicate with the tine; and oscillating the tine with the oscillator.
摘要:
An apparatus for generating acoustic waves, the apparatus having: a support structure; two tines extending from the support structure so that proximal ends of the two tines are attached to the support structure so that distal ends of the two tines are positioned with standoffs relative to a dimension of the support structure and the distal ends of the two tines are uninhibited, wherein the two tines each comprise a moment arm; and an oscillator in mechanical communication with the two tines.
摘要:
An example method for generating acoustic waves is disclosed. The example method includes activating at least one driver, transmitting force from the at least one driver to at least one moment arm, and transferring force from the at least one moment arm to at least one plate, thereby causing the at least one plate to vibrate and generate acoustic waves.
摘要:
An example apparatus for generating acoustic waves is disclosed. The example apparatus includes a housing, and at least one plate having a moment arm, wherein each plate couples to the housing. The example apparatus for generating acoustic also includes at least one axial driver coupled to each moment arm, wherein each axial driver aligns with a longitudinal axis of the housing.
摘要:
This invention relates to a scribing apparatus of a substrate that is adaptive for improving productivity as well as preventing the occurrence of substrate badness. A scribing apparatus according to an embodiment of the present invention includes a wheel to scribe a substrate; a refrigerant supplier installed near one side of the wheel to spray a refrigerant to the substrate; and a hot steam supplier installed near the other side of the wheel to spray a hot steam to the substrate.
摘要:
A system is disclosed for transmitting and receiving acoustic data signals in a well containing a drill string. The system includes devices for transmitting acoustic signals through the drill string, drilling mud, and formation, and further includes methods for transmitting and interpreting the acoustic signal so as to maximize accuracy of the transmission. The methods of the present invention include correlating signals transmitted along different paths or paths of different lengths, using frequency shift keying transmission, using shear waves to transmit signals through downhole equipment and using compression waves to transmit signals through the mud. The signals further give information about the frequency dependence of formation speed of sound and formation acoustic attenuation. The method also give information for imaging the locations of reflective boundaries in the material surrounding the borehole. The system offers the advantage to the driller of receiving essentially real time information about properties of the formation surrounding the bit.
摘要:
An example apparatus for generating acoustic waves is disclosed. The example apparatus includes a housing, and at least one plate having a moment arm, wherein each plate couples to the housing. The example apparatus for generating acoustic also includes at least one axial driver coupled to each moment arm, wherein each axial driver aligns with a longitudinal axis of the housing.