公开(公告)号：US20060115746A1

公开(公告)日：2006-06-01

申请号：US11280606

申请日：2005-11-16

申请人： Sung-Won Choi ,  Suk-joo Lee ,  Ho-chul Kim ,  Han-ku Cho ,  Sang-gyun Woo

发明人： Sung-Won Choi ,  Suk-joo Lee ,  Ho-chul Kim ,  Han-ku Cho ,  Sang-gyun Woo

IPC分类号： G03C5/00 ,  G03F1/00

CPC分类号： G03F1/28 ,  G03F1/44 ,  G03F7/70641

摘要： A focus monitoring mask includes a transparent substrate, e.g., a quartz layer. A light blocking film, e.g., a chromium-containing film, is disposed on the transparent substrate and has an opening therein. A transparent unit is disposed in a portion of the substrate exposed by the opening. The transparent unit includes a first phase shifter, a second phase shifter and a third phase shifter arranged adjacently in order of amount of phase shift. The second phase shifter is configured to provide an about 180° phase difference with respect to the first phase shifter. The third phase shifter is configured to provide a phase difference other than about 0° and about 180° with respect to the first phase shifter. The transparent unit may further include a fourth phase shifter having a fourth phase difference with respect to the first phase shifter that differs from about 0°, about 180° and the phase difference provided by the third phase shifter.

摘要翻译： 焦点监视掩模包括透明衬底，例如石英层。 遮光膜例如含铬膜设置在透明基板上并具有开口。 透明单元设置在由开口暴露的基板的一部分中。 透明单元包括第一移相器，第二移相器和第三移相器，其以相移量的顺序相邻布置。 第二移相器被配置为相对于第一移相器提供约180°的相位差。 第三移相器被配置为相对于第一移相器提供除了约0°和约180°之外的相位差。 透明单元还可以包括相对于第一移相器具有第四相位差的第四移相器，其不同于约0°，约180°以及由第三移相器提供的相位差。

公开(公告)号：US06900887B2

公开(公告)日：2005-05-31

申请号：US10921164

申请日：2004-08-19

申请人： Ho-chul Kim

发明人： Ho-chul Kim

IPC分类号： H01L21/027 ,  G03F7/20 ,  G03F9/00 ,  G01J1/42

CPC分类号： G03F9/7088 ,  G03F7/7085 ,  G03F7/70941

摘要： A method and system for measuring stray light for use in an exposure apparatus uses an image sensor to be disposed at a wafer level in the exposure apparatus. The stray light is measured by preparing a reference pattern and a measuring pattern on a reticle. The reference pattern includes a light shielding region having first open regions for transmitting light to a center of an active region of the image sensor. The measuring pattern includes a light shielding region having second open regions for transmitting light to a periphery of the active region. A first intensity of light reaching the active region after being filtered by the reference pattern and a second intensity of light reaching the image sensor after being filtered by the measuring pattern are measured. The intensity of the stray light is evaluated by a difference between the first and second light intensities.

摘要翻译： 用于测量用于曝光设备的杂散光的方法和系统使用在曝光设备中设置在晶片级的图像传感器。 通过在掩模版上准备参考图案和测量图案来测量杂散光。 参考图案包括具有用于将光透射到图像传感器的有源区域的中心的第一开口区域的遮光区域。 测量图案包括具有第二开放区域的遮光区域，用于将光透射到有源区域的周围。 测量在被基准图案滤波后到达有源区域的第一光强度，以及在通过测量图案滤波后到达图像传感器的第二光强度。 通过第一和第二光强度之间的差来评估杂散光的强度。

公开(公告)号：US20050052651A1

公开(公告)日：2005-03-10

申请号：US10921164

申请日：2004-08-19

申请人： Ho-chul Kim

发明人： Ho-chul Kim

IPC分类号： H01L21/027 ,  G03F7/20 ,  G03F9/00 ,  G02B6/04

CPC分类号： G03F9/7088 ,  G03F7/7085 ,  G03F7/70941

摘要： A method and system for measuring stray light for use in an exposure apparatus uses an image sensor to be disposed at a wafer level in the exposure apparatus. The stray light is measured by preparing a reference pattern and a measuring pattern on a reticle. The reference pattern includes a light shielding region having first open regions for transmitting light to a center of an active region of the image sensor. The measuring pattern includes a light shielding region having second open regions for transmitting light to a periphery of the active region. A first intensity of light reaching the active region after being filtered by the reference pattern and a second intensity of light reaching the image sensor after being filtered by the measuring pattern are measured. The intensity of the stray light is evaluated by a difference between the first and second light intensities.

公开(公告)号：US08296082B2

公开(公告)日：2012-10-23

申请号：US12525899

申请日：2007-03-09

申请人： Yong-tae Kim ,  Moon-jae Jho ,  Sung-soo Jung ,  Ho-chul Kim ,  Yong-hyeon Yun

发明人： Yong-tae Kim ,  Moon-jae Jho ,  Sung-soo Jung ,  Ho-chul Kim ,  Yong-hyeon Yun

IPC分类号： G01B7/287 ,  G01B17/04 ,  G01F3/24 ,  G01F3/30

CPC分类号： G01S7/5205

摘要： A performance inspection system for an array ultrasound transducer includes: a driver for selectively applying an electric signal to all or some parts of constituent channels of the array ultrasound transducer; an acoustic power measurement unit for measuring an ultrasound acoustic power emitted from individual channels receiving the same voltage from the driver; a radiation conductance conversion unit for measuring a voltage signal applied to each channel although the driver applies different voltages to the individual channels, and converting the measured voltage into an ultrasound acoustic power acquired when the same voltage is applied to the channels; and a channel uniformity estimation unit for estimating uniformity of the acoustic power value acquired by the radiation conductance conversion unit or uniformity of acoustic power values of the individual channels measured under the same voltage.

摘要翻译： 阵列超声波换能器的性能检查系统包括：用于选择性地将电信号施加到阵列超声换能器的构成通道的全部或部分的驱动器; 声功率测量单元，用于测量从驾驶员接收相同电压的各个通道发出的超声波声功率; 辐射电导转换单元，用于测量施加到每个通道的电压信号，尽管驱动器对各个通道施加不同的电压，并且将测量的电压转换成当将相同的电压施加到通道时获取的超声波功率; 以及信道均匀性估计单元，用于估计由辐射电导转换单元获取的声功率值的均匀性或在相同电压下测量的各个通道的声功率值的均匀性。

公开(公告)号：US20100313628A1

公开(公告)日：2010-12-16

申请号：US12525899

申请日：2007-03-09

申请人： Yong-tae Kim ,  Moon-jae Jho ,  Sung-soo Jung ,  Ho-chul Kim ,  Yong-hyeon Yun

发明人： Yong-tae Kim ,  Moon-jae Jho ,  Sung-soo Jung ,  Ho-chul Kim ,  Yong-hyeon Yun

IPC分类号： G01N29/30

CPC分类号： G01S7/5205

摘要： A performance inspection system for an array ultrasound transducer includes: a driver for selectively applying an electric signal to all or some parts of constituent channels of the array ultrasound transducer; an acoustic power measurement unit for measuring an ultrasound acoustic power emitted from individual channels receiving the same voltage from the driver; a radiation conductance conversion unit for measuring a voltage signal applied to each channel although the driver applies different voltages to the individual channels, and converting the measured voltage into an ultrasound acoustic power acquired when the same voltage is applied to the channels; and a channel uniformity estimation unit for estimating uniformity of the acoustic power value acquired by the radiation conductance conversion unit or uniformity of acoustic power values of the individual channels measured under the same voltage.

摘要翻译： 阵列超声波换能器的性能检查系统包括：用于选择性地将电信号施加到阵列超声换能器的构成通道的全部或部分的驱动器; 声功率测量单元，用于测量从驾驶员接收相同电压的各个通道发出的超声波声功率; 辐射电导转换单元，用于测量施加到每个通道的电压信号，尽管驱动器对各个通道施加不同的电压，并且将测量的电压转换成当将相同的电压施加到通道时获取的超声波功率; 以及信道均匀性估计单元，用于估计由辐射电导转换单元获取的声功率值的均匀性或在相同电压下测量的各个通道的声功率值的均匀性。