Piezoelectric inkjet head and method of manufacturing the same
    1.
    发明授权
    Piezoelectric inkjet head and method of manufacturing the same 有权
    压电喷墨头及其制造方法

    公开(公告)号:US07891064B2

    公开(公告)日:2011-02-22

    申请号:US11768293

    申请日:2007-06-26

    IPC分类号: H01L41/22 B41J2/045

    摘要: A piezoelectric inkjet head and a method of manufacturing the piezoelectric inkjet head. The piezoelectric inkjet head includes three single crystal silicon substrates bonded to each other. An upper substrate includes an ink inlet, a plurality of pressure chambers, and a plurality of piezoelectric actuators, a middle substrate includes a manifold, a plurality of restrictors, and a plurality of first dampers, and a lower substrate includes a plurality of nozzles. The middle substrate also includes a membrane that is formed under the manifold to mitigate a rapid pressure change in the manifold and if formed of a material different from the material used for forming the middle substrate. A cavity located under the membrane and at least one venting channel that connects the cavity to the outside are formed in the middle substrate or the lower substrate. Due to the above configuration, the membrane having flexibility mitigates a rapid pressure change in the manifold caused by backflow of ink, and thus, cross-talk between adjacent pressure chambers during ink ejection can be effectively prevented.

    摘要翻译: 压电喷墨头和压电喷墨头的制造方法。 压电喷墨头包括彼此结合的三个单晶硅衬底。 上基板包括墨入口,多个压力室和多个压电致动器,中间基板包括歧管,多个限流器和多个第一阻尼器,下基板包括多个喷嘴。 中间基板还包括形成在歧管下方的膜,以减轻歧管中的快速压力变化,并且如果由不同于用于形成中间基板的材料形成的材料形成。 在中间基板或下基板中形成位于膜下方的空腔和将空腔连接到外部的至少一个通气通道。 由于上述结构,具有柔性的膜减轻了由于油墨的回流引起的歧管中的快速压力变化,因此可以有效地防止在喷墨期间相邻压力室之间的串扰。

    Nozzle plate and method of manufacturing the same
    2.
    发明授权
    Nozzle plate and method of manufacturing the same 有权
    喷嘴板及其制造方法

    公开(公告)号:US08485641B2

    公开(公告)日:2013-07-16

    申请号:US12801616

    申请日:2010-06-17

    IPC分类号: B41J2/14 C23F1/00

    摘要: Provided is a nozzle plate and methods of manufacturing the nozzle plate. The nozzle plate may include a substrate having a nozzle. The nozzle plate may also include a permittivity reducing area in an upper portion of the substrate around the nozzle, wherein the permittivity reducing area includes a plurality of porosities and a plurality of walls between the plurality of porosities. Additionally, the nozzle plate may include a protection layer on the substrate, wherein the protection layer covers the plurality of porosities and the plurality of walls.

    摘要翻译: 提供一种喷嘴板和制造喷嘴板的方法。 喷嘴板可以包括具有喷嘴的基板。 喷嘴板还可以包括在喷嘴周围的基板的上部中的介电常数降低区域,其中介电常数降低区域包括多个孔隙率和多个孔隙之间的多个壁。 此外,喷嘴板可以在基板上包括保护层,其中保护层覆盖多个孔隙和多个壁。

    INKJET PRINTING DEVICE AND METHOD OF DRIVING THE SAME
    3.
    发明申请
    INKJET PRINTING DEVICE AND METHOD OF DRIVING THE SAME 有权
    喷墨打印装置及其驱动方法

    公开(公告)号:US20090096843A1

    公开(公告)日:2009-04-16

    申请号:US12107133

    申请日:2008-04-22

    IPC分类号: B41J2/045

    摘要: An inkjet printing device includes a flow path plate comprising a manifold to supply ink, a pressure chamber filled with the ink supplied from the manifold, and a nozzle via which the ink is ejected, a piezoelectric actuator which is disposed on a top surface of the flow path plate and includes a lower electrode, a piezoelectric layer, and an upper electrode that are stacked sequentially, a first electrostatic electrode to generate an electrostatic field, and a second electrostatic electrode which is disposed a predetermined distance apart from a bottom surface of the flow path plate to generate the electrostatic field between the first electrostatic electrode and the second electrostatic electrode.

    摘要翻译: 喷墨打印装置包括流路板,该流路板包括用于供应墨水的歧管,填充有从歧管供应的墨的压力室和喷射墨水的喷嘴,压电致动器,设置在喷嘴的顶表面上 流路板,并且包括顺序堆叠的下电极,压电层和上电极,产生静电场的第一静电电极和与所述第一静电电极的底表面隔开设置的第二静电电极 流路板以产生第一静电电极和第二静电电极之间的静电场。

    Method of manufacturing TFT and array TFT
    5.
    发明授权
    Method of manufacturing TFT and array TFT 有权
    制造TFT和阵列TFT的方法

    公开(公告)号:US08372702B2

    公开(公告)日:2013-02-12

    申请号:US12923051

    申请日:2010-08-31

    IPC分类号: H01L21/84 H01L51/40

    摘要: A method of manufacturing a thin film transistor includes sequentially forming a gate and at least one insulation layer on a substrate, forming a source electrode and a drain electrode on the at least one insulation layer, and forming a channel layer formed of a semiconductor on a part of the source electrode and the drain electrode, wherein the gate, the source electrode, and the drain electrode are formed by using a hybrid inkjet printing apparatus.

    摘要翻译: 制造薄膜晶体管的方法包括在基板上依次形成栅极和至少一个绝缘层,在至少一个绝缘层上形成源电极和漏电极,以及在半导体层上形成沟道层 源电极和漏电极的一部分,其中栅极,源电极和漏电极通过使用混合喷墨打印装置形成。

    PIEZOELECTRIC INKJET HEAD AND METHOD OF MANUFACTURING THE SAME
    6.
    发明申请
    PIEZOELECTRIC INKJET HEAD AND METHOD OF MANUFACTURING THE SAME 有权
    压电喷嘴头及其制造方法

    公开(公告)号:US20080165228A1

    公开(公告)日:2008-07-10

    申请号:US11768293

    申请日:2007-06-26

    IPC分类号: B41J2/045 H01L41/22

    摘要: A piezoelectric inkjet head and a method of manufacturing the piezoelectric inkjet head. The piezoelectric inkjet head includes three single crystal silicon substrates bonded to each other. An upper substrate includes an ink inlet, a plurality of pressure chambers, and a plurality of piezoelectric actuators, a middle substrate includes a manifold, a plurality of restrictors, and a plurality of first dampers, and a lower substrate includes a plurality of nozzles. The middle substrate also includes a membrane that is formed under the manifold to mitigate a rapid pressure change in the manifold and if formed of a material different from the material used for forming the middle substrate. A cavity located under the membrane and at least one venting channel that connects the cavity to the outside are formed in the middle substrate or the lower substrate. Due to the above configuration, the membrane having flexibility mitigates a rapid pressure change in the manifold caused by backflow of ink, and thus, cross-talk between adjacent pressure chambers during ink ejection can be effectively prevented.

    摘要翻译: 压电喷墨头和压电喷墨头的制造方法。 压电喷墨头包括彼此结合的三个单晶硅衬底。 上基板包括墨入口,多个压力室和多个压电致动器,中间基板包括歧管,多个限流器和多个第一阻尼器,下基板包括多个喷嘴。 中间基板还包括形成在歧管下方的膜,以减轻歧管中的快速压力变化,并且如果由不同于用于形成中间基板的材料形成的材料形成。 在中间基板或下基板中形成位于膜下方的空腔和将空腔连接到外部的至少一个通气通道。 由于上述结构,具有柔性的膜减轻了由于油墨的回流引起的歧管中的快速压力变化,因此可以有效地防止在喷墨期间相邻压力室之间的串扰。

    Methods of forming wirings in electronic devices
    7.
    发明授权
    Methods of forming wirings in electronic devices 有权
    在电子设备中形成布线的方法

    公开(公告)号:US09153487B2

    公开(公告)日:2015-10-06

    申请号:US13601658

    申请日:2012-08-31

    摘要: A method of forming a wiring may include forming a first wire on a substrate; forming a material layer on the substrate, except on the first wire; forming a surface treatment film on the material layer; and forming a second wire on the first wire. The surface treatment film has physical properties opposite to the first wire. A method of forming a wiring may include forming a first wire on a substrate; forming a material layer on the substrate and the first wire; removing a portion of the material layer from the first wire; forming a surface treatment film on the material layer and the first wire; removing a portion of the surface treatment film from the first wire; and forming a second wire on the first wire. A thickness of the material layer on the substrate is greater than a thickness of the first wire on the substrate.

    摘要翻译: 形成布线的方法可以包括在基板上形成第一布线; 在所述基板上形成除了所述第一线之外的材料层; 在所述材料层上形成表面处理膜; 以及在所述第一线上形成第二线。 表面处理膜具有与第一丝相反的物理性质。 形成布线的方法可以包括在基板上形成第一布线; 在所述基板和所述第一线上形成材料层; 从所述第一丝线去除所述材料层的一部分; 在所述材料层和所述第一线上形成表面处理膜; 从所述第一丝线去除所述表面处理膜的一部分; 以及在所述第一线上形成第二线。 基板上的材料层的厚度大于基板上的第一布线的厚度。

    Inkjet printing device and method of driving the same
    8.
    发明授权
    Inkjet printing device and method of driving the same 有权
    喷墨打印装置及其驱动方法

    公开(公告)号:US09050793B2

    公开(公告)日:2015-06-09

    申请号:US12107133

    申请日:2008-04-22

    IPC分类号: B41J2/045 B41J2/06 B41J2/14

    摘要: An inkjet printing device includes a flow path plate comprising a manifold to supply ink, a pressure chamber filled with the ink supplied from the manifold, and a nozzle via which the ink is ejected, a piezoelectric actuator which is disposed on a top surface of the flow path plate and includes a lower electrode, a piezoelectric layer, and an upper electrode that are stacked sequentially, a first electrostatic electrode to generate an electrostatic field, and a second electrostatic electrode which is disposed a predetermined distance apart from a bottom surface of the flow path plate to generate the electrostatic field between the first electrostatic electrode and the second electrostatic electrode.

    摘要翻译: 喷墨打印装置包括流路板,该流路板包括用于供应墨水的歧管,填充有从歧管供应的墨的压力室和喷射墨水的喷嘴,压电致动器,设置在喷嘴的顶表面上 流路板,并且包括依次堆叠的下电极,压电层和上电极,产生静电场的第一静电电极和与所述第一静电电极的底表面隔开设置的第二静电电极 流路板以产生第一静电电极和第二静电电极之间的静电场。

    Methods of forming patterns on a substrate
    9.
    发明授权
    Methods of forming patterns on a substrate 有权
    在基材上形成图案的方法

    公开(公告)号:US09018036B2

    公开(公告)日:2015-04-28

    申请号:US13448438

    申请日:2012-04-17

    IPC分类号: H01L51/40 B41J2/16

    摘要: A method of forming patterns on a substrate, the method including: placing a mask having an opening defining a portion of one surface of a substrate on which patterns are to be formed on the substrate; forming a first modification layer in the opening by ejecting a surface modification ink onto a surface of the substrate through the opening; ejecting a target ink having droplets of sizes larger than those of a surface modification ink such that the target ink is distributed on the first modification layer in the opening; and removing the mask.

    摘要翻译: 一种在基板上形成图案的方法,所述方法包括:将具有限定要在其上形成有图案的基板的一个表面的一部分的一部分的开口的掩模放置在基板上; 通过所述开口将表面改性油墨喷射到所述基板的表面上,在所述开口中形成第一改质层; 喷射具有大于表面改性油墨的尺寸的液滴的目标油墨,使得目标油墨分布在开口中的第一改质层上; 并取下面罩。