公开(公告)号：US09022532B1

公开(公告)日：2015-05-05

申请号：US14058912

申请日：2013-10-21

Applicant: TDK Corporation

Inventor： Yasuhiro Aida ,  Ryu Ohta ,  Yoshitomo Tanaka ,  Hiroshi Chihara ,  Hitoshi Sakuma ,  Kazuhiko Maejima

IPC: B41J2/045 ,  H01L41/08 ,  H01L41/187 ,  G01L1/16

CPC classification number: H01L41/0805 ,  B41J2/045 ,  B41J2/14233 ,  B41J2202/03 ,  G01L1/16 ,  G01L9/008 ,  H01L41/0973 ,  H01L41/1873 ,  H01L41/316

Abstract: The displacement as an actuator or the sensitivity as a sensor of a piezoelectric element can be increased and, in addition, the electric power consumption can be reduced by providing a thin film of potassium-sodium niobate, which is a perovskite type compound represented by a general formula ABO3, as a piezoelectric layer, wherein a crystal orientation of a crystal structure of potassium-sodium niobate has in-plane fourfold symmetry as a whole piezoelectric layer, where a first axis of rotational symmetry is a thickness direction of the piezoelectric layer.

Abstract translation: 可以增加作为致动器的位移或作为压电元件的传感器的灵敏度，并且另外可以通过提供作为钙钛矿型化合物的铌酸钾钠的薄膜来降低电力消耗， 通式ABO3作为压电层，其中铌酸钾钠的晶体结构的晶体取向作为整体压电层的面内四重对称，其中旋转对称的第一轴是压电层的厚度方向。

公开(公告)号：US10707018B2

公开(公告)日：2020-07-07

申请号：US16069095

申请日：2017-02-01

Applicant: TDK CORPORATION

Inventor： Kumiko Yamazaki ,  Hiroshi Chihara ,  Yuki Nagamine ,  Junichi Yamazaki ,  Yuji Umeda

IPC: H01G4/08 ,  H01G4/33 ,  C23C14/00 ,  C23C14/06 ,  H01B3/00 ,  C01B21/082 ,  C30B29/10 ,  C23C16/30

Abstract: A polycrystalline dielectric thin film and a capacitor element have a large relative dielectric constant. The polycrystalline dielectric thin film has a perovskite oxynitride as a principal component. The perovskite oxynitride is represented by compositional formula Aa1Bb1OoNn (a1+b1+o+n=5), and the a-axis length of the crystal lattice of the perovskite oxynitride is larger than a theoretical value.