公开(公告)号：US09029808B2

公开(公告)日：2015-05-12

申请号：US14444791

申请日：2014-07-28

Applicant: TEL Epion Inc.

Inventor： Matthew C. Gwinn ,  Avrum Freytsis ,  Jerry Negrotti ,  Robert K. Becker

IPC: H01J37/20 ,  G21K5/08 ,  H01J37/317

CPC classification number: H01J37/20 ,  G21K5/08 ,  H01J37/317 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20278

Abstract: Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus. The apparatus further includes shields and other features for reducing process contamination resulting from scattering of the GCIB from the scanning apparatus.

Abstract translation: 公开了一种用于通过气体簇离子束（GCIB）或任何其它类型的离子束扫描衬底或其它工件的装置，系统和方法。 工件扫描装置被配置为接收和保持用于GCIB照射的基板，并且通过两次运动通过GCIB在两个方向上进行扫描：往复式快速扫描运动和慢扫描运动。 使用伺服电动机和皮带驱动系统来驱动缓慢扫描运动，所述皮带驱动系统被配置为降低工件扫描装置的故障率。 该装置还包括屏蔽件和其它特征，用于减少GCIB从扫描装置散射而产生的工艺污染。