公开(公告)号：US20180012729A1

公开(公告)日：2018-01-11

申请号：US15700086

申请日：2017-09-09

Applicant: TESCAN ORSAY HOLDING, A.S.

Inventor： Filip LOPOUR ,  Tomas HRNCIR

IPC: H01J37/30 ,  G01N1/32

CPC classification number: H01J37/3005 ,  G01N1/32 ,  H01J2237/20207 ,  H01J2237/304 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An apparatus for processing a specimen with two or more particle beams, wherein the specimen has a milled side that is processed by a first particle beam and observed by a second particle beam. The specimen is milled during a first milling operation by the first particle beam with the specimen in a first position. Thereafter, the specimen tilts in a second position around an axis of tilt of the specimen. Thereafter, the specimen is milled during a second milling operation. Milling can be performed during continuous tilting of the specimen around the axis of tilt. The axis of tilt of the specimen intersects the milled side. In all the aforementioned positions of the specimen, the second particle beam impinges on the milled side, which enables monitoring of the milling in real time.

公开(公告)号：US20160148783A1

公开(公告)日：2016-05-26

申请号：US14904409

申请日：2014-07-09

Applicant: TESCAN ORSAY HOLDING, A.S.

Inventor： Filip LOPOUR ,  Tomas HRNCIR

IPC: H01J37/30

CPC classification number: H01J37/3005 ,  G01N1/32 ,  H01J2237/20207 ,  H01J2237/304 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method and apparatus for processing a specimen with two or more particle beams, wherein the specimen has a milled side that is processed by a first particle beam and observed by a second particle beam. The specimen is milled during a first milling operation by the first particle beam with the specimen in a first position. Thereafter, the specimen tilts in a second position around an axis of tilt of the specimen. Thereafter, the specimen is milled during a second milling operation. Milling can be performed during continuous tilting of the specimen around the axis of tilt. The axis of tilt of the specimen intersects the milled side. In all the aforementioned positions of the specimen, the second particle beam impinges on the milled side, which enables monitoring of the milling in real time.

Abstract translation: 一种用于处理具有两个或更多个粒子束的样本的方法和装置，其中所述样本具有由第一粒子束处理并由第二粒子束观察的研磨侧。 样品在第一次研磨操作期间被第一粒子束研磨，样品处于第一位置。 此后，试样在试样的倾斜轴线的第二位置倾斜。 此后，在第二次研磨操作期间对样品进行研磨。 可以在试样围绕倾斜轴连续倾斜时进行铣削。 试样的倾斜轴与研磨侧相交。 在试样的所有前述位置上，第二粒子束照射在研磨侧上，这使得能够实时监测铣削。