Abstract:
TRICHLOROSILANE IS PRODUCED IN A REACTOR PACKED WITH A POROUS MASS OF SINTERED SILICON PARTICLES. A FURNACE SURROUNDING THE UPPER END OF THE REACTION CHAMBER MELTS THE TOP PORTION OF THE POROUS MASS TO FORM A POOL OF MOLTEN SILICON. BY FLOWING SILICON TETRACHLORIDE THROUGH THE POROUS MASS, A REACTION TAKES PLACE WITHIN THE REACTOR WHEN THE SICL4 CONTACTS THE MOLTEN SILICON. THIS REACTION PRODUCES SILICON DICHLORIDE. TO PRODUCE TRICHLOROSILANE, THE SILICON DICHLORIDE IS REACTED WITH HCL DOWNSTREAM OF THE REACTOR OUTPUT.