公开(公告)号：US10003018B1

公开(公告)日：2018-06-19

申请号：US15589613

申请日：2017-05-08

申请人： Tokyo Electron Limited

发明人： Ian Colgan ,  Ioan Domsa ,  George Eyres ,  Saito Makoto ,  Noel O'Shaughnessy ,  Toru Ishii ,  David Hurley

IPC分类号： H01L21/00 ,  H01L43/12 ,  H01L27/22 ,  C21D9/00 ,  H01L21/477 ,  C21D1/42 ,  C21D1/54 ,  G11C11/16

CPC分类号： H01L43/12 ,  C21D1/42 ,  C21D1/54 ,  C21D9/0018 ,  H01L27/222 ,  Y02P10/253

摘要： Embodiments are described for annealing systems and related methods to process microelectronic workpieces using vertical multi-batch perpendicular magnetic annealing systems that allow for a side-by-side configuration of multiple annealing systems to satisfy reduced footprint requirements.

公开(公告)号：US11527345B2

公开(公告)日：2022-12-13

申请号：US16466824

申请日：2018-01-03

申请人： TOKYO ELECTRON LIMITED

发明人： Ian Colgan ,  Ioan Domsa ,  George Eyres ,  Toru Ishii ,  Makoto Saito ,  David Hurley ,  Noel O'Shaughnessy ,  Barry Clarke ,  Gerhardus Van Der Linde ,  Pat Hughes

IPC分类号： H01F13/00 ,  C21D1/26 ,  G01R33/02 ,  G01R33/12

摘要： An apparatus for magnetic annealing one or more workpieces, and a method of operating the apparatus, are described. The apparatus includes: a workpiece holder configured to support one or more workpieces, wherein the one or more workpieces having at least one substantially planar surface; an optional workpiece heating system configured to elevate the one or more workpieces to an anneal temperature; and a magnet assembly having a first magnet and a second magnet, the first and second magnets defining a gap between opposing poles of each magnet, wherein the magnet assembly is arranged to generate a magnetic field substantially perpendicular to the planar surface of the one or more workpieces.