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公开(公告)号:US20170345609A1
公开(公告)日:2017-11-30
申请号:US15595290
申请日:2017-05-15
CPC分类号: H01J11/52 , H01J9/385 , H01J11/20 , H01J11/46 , H01J21/02 , H01J21/18 , H01J37/3178 , H01J37/32724 , H01J37/32816 , H01J37/32834 , H01J41/12 , H01J41/16
摘要: A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.
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公开(公告)号:US20170330787A1
公开(公告)日:2017-11-16
申请号:US15594699
申请日:2017-05-15
IPC分类号: H01L21/687 , H01L21/67 , C23C16/458
CPC分类号: H01L21/68714 , C23C14/35 , C23C14/505 , C23C14/541 , C23C16/4584 , H01L21/67103 , H01L21/67109 , H01L21/67248
摘要: There is provided a mounting table system which includes: a mounting table rotatably installed so as to mount a substrate thereon; a plurality of heating parts installed in the mounting table, and configured to heat the mounting table; a single power source configured to supply an electric power to the plurality of heating parts; and a power switching part configured to switch from a first heating part among the plurality of heating parts to which the electric power is supplied from the single power source, to a second heating part among the plurality of heating parts, depending on a rotational angle of the mounting table.
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