-
公开(公告)号：US20210296102A1
公开(公告)日：2021-09-23
申请号：US17342668
申请日：2021-06-09
IPC分类号： H01J37/32 , H01L21/673 , C23C16/44 , C23C16/52 , C23C16/455 , H01L21/67
摘要： An exhaust device including an exhaust mechanism and an exhaust unit is provided. The exhaust mechanism includes a first blade unit and a second blade unit provided in an exhaust space of a processing vessel including a processing space of a vacuum atmosphere for applying a process to a workpiece. The first blade unit and the second blade unit are arranged coaxially with a periphery of the workpiece, and at least one of the first blade unit and the second blade unit is rotatable. The exhaust unit is provided at a downstream side of the exhaust mechanism and communicates with the exhaust space. The exhaust unit is configured to exhaust gas in the processing vessel.
-
公开(公告)号：US20190120703A1
公开(公告)日：2019-04-25
申请号：US16095114
申请日：2017-04-06
发明人： Tadashi MITSUNARI , Satoshi TANAKA , Tsuyoshi MORIYA , Toshiya MATSUDA , Masaaki MIYAGAWA , Kenya IWASAKI
IPC分类号： G01K11/32
摘要： A temperature measurement substrate according to an embodiment of the present disclosure includes: a substrate which is any one of a semiconductor wafer and a substrate for a flat panel display; and at least one optical fiber laid on a surface of the substrate and having a first pattern portion and a second pattern portion formed more densely than the first pattern portion.
-
公开(公告)号：US20210268670A1
公开(公告)日：2021-09-02
申请号：US17186857
申请日：2021-02-26
发明人： Kazuki MOYAMA , Kazuya NAGASEKI , Toshiya MATSUDA
摘要： A part transporting device for transporting a consumable part includes a part housing, a container, a robot arm, and a moving mechanism. The part housing accommodates an unused consumable part and a used consumable part. The container has an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing. The robot arm is provided in the container and has at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part into the processing device through the opening. The moving mechanism has a power source and is configured to move the part transporting device.
-
公开(公告)号：US20190172689A1
公开(公告)日：2019-06-06
申请号：US16205558
申请日：2018-11-30
IPC分类号： H01J37/32 , H01L21/673 , C23C16/44 , C23C16/455 , C23C16/52
摘要： An exhaust device including an exhaust mechanism and an exhaust unit is provided. The exhaust mechanism includes a first blade unit and a second blade unit provided in an exhaust space of a processing vessel including a processing space of a vacuum atmosphere for applying a process to a workpiece. The first blade unit and the second blade unit are arranged coaxially with a periphery of the workpiece, and at least one of the first blade unit and the second blade unit is rotatable. The exhaust unit is provided at a downstream side of the exhaust mechanism and communicates with the exhaust space. The exhaust unit is configured to exhaust gas in the processing vessel.
-
公开(公告)号：US20210269258A1
公开(公告)日：2021-09-02
申请号：US17186932
申请日：2021-02-26
发明人： Kazuki MOYAMA , Kazuya NAGASEKI , Toshiya MATSUDA
摘要： A method includes estimating a replacement time of a consumable part of a processing device, specifying a timing after substrate processing of the processing device is completed in a period before the replacement time as a replaceable timing of the consumable part, estimating a movement time period required for the part transporting device to move to a position of the processing device requiring the replacement, and estimating a preparation time period required for preparation until the part transporting device moved to the position of the processing device requiring the replacement becomes a state in which the consumable part is replaceable. The method further includes transmitting a replacement instruction to the part transporting device at a timing before a timing that is earlier than the replaceable timing by a total time of the movement time period and the preparation time period, and instructing the replacement of the consumable part.
-
-
-
-
搜索结果
5 条记录 (耗时 0.013 秒)
