公开(公告)号：US20180323401A1

公开(公告)日：2018-11-08

申请号：US16019903

申请日：2018-06-27

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Jin SATO ,  Mitsuru KANO ,  Hiroshi KOYAMA ,  Kyoko KUROKI

IPC: H01L51/52 ,  C23C16/02 ,  C23C16/40 ,  C23C16/455 ,  C23C16/56 ,  H01L51/56

CPC classification number: H01L51/5253 ,  B32B9/00 ,  C23C14/08 ,  C23C16/0272 ,  C23C16/30 ,  C23C16/403 ,  C23C16/455 ,  C23C16/45525 ,  C23C16/56 ,  H01L51/50 ,  H01L51/56 ,  H01L2251/301 ,  H01L2251/558 ,  H05B33/02 ,  H05B33/04

Abstract: A laminate includes: a substrate having a first surface and made of a high-molecular-weight material; an undercoat layer located on at least part of the first surface of the substrate and containing a first inorganic substance that has adsorption sites to be coupled to precursors serving as film-forming materials of an atomic layer deposition film; a functional layer located covering an outer surface of the undercoat layer and containing a second inorganic substance to be coupled to the adsorption sites of the undercoat layer, the functional layer being the atomic layer deposition film formed of the precursors; and an overcoat layer located covering an outer surface of the functional layer and containing a third inorganic substance.