Thin film transistor array and image display device

    公开(公告)号:US10243157B2

    公开(公告)日:2019-03-26

    申请号:US15080924

    申请日:2016-03-25

    Abstract: A thin film transistor array includes a substrate, a gate electrode formed on the substrate, a gate insulation film covering the gate electrode, a source electrode formed on the gate insulation film, a drain electrode formed on the gate insulation film, a semiconductor layer connected to the source electrode and the drain electrode, an interlayer insulation film formed on the drain electrode and the semiconductor layer, and a pixel electrode formed on the interlayer insulation film. The interlayer insulation film has a via hole that reaches a portion of the drain electrode, and the drain electrode has a liquid repellent coating on the portion positioned in the via hole.

    Method for Manufacturing Thin Film Transistor, Thin Film Transistor and Image Display Apparatus
    4.
    发明申请
    Method for Manufacturing Thin Film Transistor, Thin Film Transistor and Image Display Apparatus 审中-公开
    制造薄膜晶体管,薄膜晶体管和图像显示装置的方法

    公开(公告)号:US20130056738A1

    公开(公告)日:2013-03-07

    申请号:US13629075

    申请日:2012-09-27

    Abstract: A method for manufacturing a thin film transistor includes a first process of forming a gate electrode on a substrate; a second process of forming a gate insulation film so as to cover the gate electrode; a third process of forming a source electrode and a drain electrode on the gate insulation film; a fourth process of forming a semiconductor layer connected to the source electrode and the drain electrode; a fifth process of forming a protection film so as to overlap a portion of the source electrode and the drain electrode immediately above the semiconductor layer; and a sixth process of patterning the semiconductor layer using the protection film as a mask.

    Abstract translation: 制造薄膜晶体管的方法包括:在基板上形成栅电极的第一工序; 形成栅极绝缘膜以覆盖栅电极的第二工序; 在栅极绝缘膜上形成源电极和漏电极的第三工序; 形成连接到源电极和漏电极的半导体层的第四工序; 形成保护膜以使与半导体层正上方的源电极和漏电极的一部分重叠的第五工序; 以及使用保护膜作为掩模来图案化半导体层的第六工艺。

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