公开(公告)号：US20190067311A1

公开(公告)日：2019-02-28

申请号：US16057648

申请日：2018-08-07

Applicant: Toshiba Memory Corporation

Inventor： Yasuhito YOSHIMIZU ,  Takaumi MORITA

IPC: H01L27/11556 ,  H01L27/11521 ,  G11C16/04 ,  H01L29/66

CPC classification number: H01L27/11556 ,  G11C16/0441 ,  H01L27/11519 ,  H01L27/11521 ,  H01L27/11565 ,  H01L27/11582 ,  H01L29/66825 ,  H01L29/66833

Abstract: A memory device includes first and second conductive layers, first and second semiconductor members, first and second charge storage members, first and second insulating members, and first and second insulating layers. The second conductive layer is distant from the first conductive layer. The first semiconductor member is positioned between the first and second conductive layers. The second semiconductor member is positioned between the first semiconductor member and the second conductive layer. The first insulating layer includes a first region positioned between the first semiconductor member and the first charge storage member and a second region positioned between the first semiconductor member and the second semiconductor member. The second insulating layer includes a third region positioned between the second semiconductor member and the second charge storage member and a fourth region positioned between the second region and the second semiconductor member.

公开(公告)号：US20200211864A1

公开(公告)日：2020-07-02

申请号：US16556014

申请日：2019-08-29

Applicant: TOSHIBA MEMORY CORPORATION

Inventor： Yasuhito YOSHIMIZU ,  Hakuba KITAGAWA ,  Takaumi MORITA

IPC: H01L21/67 ,  H01L21/445 ,  H01L21/673

Abstract: According to one embodiment, a substrate processing apparatus includes a table configured to place a substrate thereon and to connect the substrate to a positive electrode, an counter electrode located opposite to the table, having a plurality of holes, and connected to a negative electrode, and a holding unit located opposite to the table across the counter electrode and configured to supply a chemical liquid to the counter electrode while holding the counter electrode.