公开(公告)号：US20240331985A1

公开(公告)日：2024-10-03

申请号：US18610491

申请日：2024-03-20

Applicant: TOTO LTD.

Inventor： Ryosuke SAKURAI ,  Keisuke SANO ,  Masafumi IKEGUCHI ,  Jun SHIRAISHI ,  Ikuo ITAKURA ,  Yutaka MOMIYAMA

IPC: H01J37/32 ,  C23C16/458 ,  H01L21/683

CPC classification number: H01J37/32715 ,  C23C16/4583 ,  H01J2237/2007 ,  H01J2237/3321 ,  H01L21/6833

Abstract: An electrostatic chuck includes: a dielectric substrate in which a through hole is formed; an RF electrode which is embedded inside the dielectric substrate; and an attracting electrode which is embedded inside the dielectric substrate at a position that is closer to a placement surface than the RF electrode. When viewed from a direction perpendicular to the placement surface, a circular first opening which is concentric with the through hole and which includes the through hole is formed in the attracting electrode and a circular second opening which is concentric with the through hole and which includes the through hole is formed in the RF electrode. A radius of the second opening is larger than a radius of the first opening.