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    Pressure-type flow rate control apparatus
    1.
    发明授权
    Pressure-type flow rate control apparatus 有权
    压力式流量控制装置

    公开(公告)号：US06964279B2

    公开(公告)日：2005-11-15

    申请号：US10469151

    申请日：2002-11-22

    申请人： Tadahiro Ohmi ,  Tomio Uno ,  Osamu Nakamura ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino ,  Atsushi Matsumoto ,  Kazuhiko Sugiyama ,  Shujiro Inui ,  Taiji Sakai ,  Masanori Ueyama

    发明人： Tadahiro Ohmi ,  Tomio Uno ,  Osamu Nakamura ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino ,  Atsushi Matsumoto ,  Kazuhiko Sugiyama ,  Shujiro Inui ,  Taiji Sakai ,  Masanori Ueyama

    IPC分类号： G01F1/00 ,  G01F1/36 ,  G01F1/42 ,  G05D7/06

    CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

    摘要： A pressure-type flow rate control apparatus controls the flow rate of fluid passing through an orifice to a target flow rate. The flow rate of a compressible fluid under non-critical conditions (sub-sonic) passing through the orifice is calculated by: Qc=KP2m(P1−P2)n so that the flow rate can be controlled to the target flow rate with high precision and speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1=r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value r, and under critical conditions (r≦rc), the flow rate is calculated by: Qc=KP1. Under non-critical conditions (r>rc), the flow rate is calculated by Qc=KP2m(P1−P2)n.

    摘要翻译： 压力式流量控制装置将通过孔口的流体的流量控制为目标流量。 通过孔口的非临界条件（亚音）的可压缩流体的流量通过以下公式计算：<？in-line-formula description =“In-line Formulas”end =“lead”？> Qc = KP （P 1→P 2） -formulae description =“在线公式”end =“tail”？>，可以以高精度和高速度将流量控制在目标流量上。 还提供了一种改进的压力型流量控制装置，其中从上游压力P 1获得的压力比P 2 / P 1 / / SUB>和下游压力P 2 2不断与临界值r进行比较，在临界条件（r≤Rc c）下，流量由下式计算： ：<？in-line-formula description =“In-line Formulas”end =“lead”？> Qc = KP <1> <？in-line-formula description =“In-line Formulas” end =“tail”？>在非关键条件下（r> r> c ），流量通过Qc = KP 2 / （P 1→P 2）。

    Differential pressure type flowmeter and differential pressure type flow controller
    2.
    发明授权
    Differential pressure type flowmeter and differential pressure type flow controller 有权
    差压式流量计和差压式流量控制器

    公开(公告)号：US07367241B2

    公开(公告)日：2008-05-06

    申请号：US10563226

    申请日：2004-06-18

    申请人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Tomio Uno ,  Nobukazu Ikeda ,  Kouji Nishino ,  Osamu Nakamura ,  Ryousuke Dohi ,  Atsushi Matsumoto

    发明人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Tomio Uno ,  Nobukazu Ikeda ,  Kouji Nishino ,  Osamu Nakamura ,  Ryousuke Dohi ,  Atsushi Matsumoto

    IPC分类号： G01F1/37

    CPC分类号： G01F1/50 ,  G01F1/42 ,  G05D7/0635

    摘要： A differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P1 on the upstream side of an orifice, a detector to detect a fluid pressure P2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream side of an orifice, and a control computation circuit to compute a fluid's flow rate Q passing through an orifice by using the pressure P1, where P2 and temperature T detected with the aforementioned detectors, and the aforementioned fluid's flow rate Q is computed with the equation Q=C1•P1/√T•((P2/P1)m−(P2/P1)m)1/2 (where C1 is a proportional constant, and m and n are constants).

    摘要翻译： 差压式流量计包括孔口，用于检测孔口上游侧的流体压力P 1> 1的检测器，用于检测流体压力P 2> 2的检测器 孔的下游侧，用于检测孔口上游侧的流体温度T的检测器，以及控制计算电路，用于通过使用压力P 1计算通过孔口的流体的流量Q， SUB>，其中P＆lt; 2＆gt;和用上述检测器检测的温度T，并且上述流体的流量Q用公式<？in-line-formula description =“In-line Formulas”end =“铅”→Q = C 1 P 1 <？in-line-formula description =“In-line Formulas”end =“tail”？>（其中C <1> 是比例常数，m和n是常数）。

    Differential pressure type flowmeter and differential pressure type flowmeter controller
    4.
    发明申请
    Differential pressure type flowmeter and differential pressure type flowmeter controller 有权
    差压式流量计和差压式流量计控制器

    公开(公告)号：US20060236781A1

    公开(公告)日：2006-10-26

    申请号：US10563226

    申请日：2004-06-18

    申请人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Tomio Uno ,  Nobukazu Ikeda ,  Kouji Nishino ,  Osamu Nakamura ,  Ryousuke Dohi ,  Atsushi Matsumoto

    发明人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Tomio Uno ,  Nobukazu Ikeda ,  Kouji Nishino ,  Osamu Nakamura ,  Ryousuke Dohi ,  Atsushi Matsumoto

    IPC分类号： G01F1/37

    CPC分类号： G01F1/50 ,  G01F1/42 ,  G05D7/0635

    摘要： A cost reduction can be achieved by making a differential pressure type flowmeter simple in structure, and highly accurate flow rate measurements can be attained over the wide flow rate range of 100% to 1% with errors E of less than 1 (% SP) both in real time and in a state of inline. To achieve the ends, a differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P1 on the upstream side of an orifice, a detector to detect a fluid pressure P2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream side of an orifice, and a control computation circuit to compute a fluid's flow rate Q passing through an orifice by using the pressure P1, pressure P2 and temperature T detected with the aforementioned detectors, and the aforementioned fluid's flow rate Q is computed with the equation Q=C1·P1/√{square root over ( )}T·((P2/P1)m−(P2/P1)n)1/2 (where C1 is a proportional constant, and m and n are constants).

    摘要翻译： 通过使差压式流量计结构简单，可以实现成本降低，并且在100％至1％的宽流量范围内可以获得高精度的流量测量，误差E小于1（％SP），均为 在实时和处于内联状态。 为了实现这一目的，差压式流量计包括孔口，用于检测孔口上游侧的流体压力P 1> 1的检测器，检测流体压力P 2 在孔的下游侧具有用于检测孔口上游侧的流体温度T的检测器，以及控制计算电路，其通过使用压力P <0而计算通过孔口的流体流量Q， 使用上述检测器检测到的SUB> 1 <！ - SIPO - >压力P <2>和温度T，并且上述流体的流量Q用等式Q = （P（（P 2/2 / P 1）） （P 2 / P 1/2）其中C 1 ）其中C 1 是比例常数，m和n是常数）。

    Internal pressure controller of chamber and internal pressure subject-to-control type chamber
    8.
    发明授权
    Internal pressure controller of chamber and internal pressure subject-to-control type chamber 有权
    内部压力控制器和内部压力控制型室

    公开(公告)号：US07798167B2

    公开(公告)日：2010-09-21

    申请号：US11278909

    申请日：2006-04-06

    申请人： Tadahiro Ohmi ,  Akniobu Teramoto ,  Tomio Uno ,  Ryousuke Dohi ,  Kouji Nishino ,  Osamu Nakamura ,  Atsushi Matsumoto ,  Masaaki Nagase ,  Nobukazu Ikeda

    发明人： Tadahiro Ohmi ,  Akniobu Teramoto ,  Tomio Uno ,  Ryousuke Dohi ,  Kouji Nishino ,  Osamu Nakamura ,  Atsushi Matsumoto ,  Masaaki Nagase ,  Nobukazu Ikeda

    IPC分类号： G05D7/06

    CPC分类号： G05D16/208 ,  Y10T137/7761 ,  Y10T137/8741 ,  Y10T137/87507

    摘要： A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.

    摘要翻译： 气体供给设备包括并联连接的多个压力式流量控制器和控制多个压力式流量控制器的操作的第一控制器，以便在控制其流动的同时将由真空泵排出的期望气体供应到腔室 压力型流量控制器中的一个作为第二控制器操作，以将气体流量范围控制在高达供应给腔室的最大流速的10％，而剩余的压力式流量控制器被制成控制 剩余的气体流量范围。 此外，通过在室内安装压力检测器，将检测器检测到的值输入到控制器，并通过调节压力型流量控制器的控制信号来控制室内的压力。

    Pressure-type flow rate control apparatus
    10.
    发明授权
    Pressure-type flow rate control apparatus 有权
    压力式流量控制装置

    公开(公告)号：US06152168A

    公开(公告)日：2000-11-28

    申请号：US284352

    申请日：1999-05-24

    申请人： Tadahiro Ohmi ,  Tetu Kagazume ,  Kazuhiko Sugiyama ,  Ryousuke Dohi ,  Tomio Uno ,  Kouji Nishino ,  Hiroyuki Fukuda ,  Nobukazu Ikeda ,  Michio Yamaji

    发明人： Tadahiro Ohmi ,  Tetu Kagazume ,  Kazuhiko Sugiyama ,  Ryousuke Dohi ,  Tomio Uno ,  Kouji Nishino ,  Hiroyuki Fukuda ,  Nobukazu Ikeda ,  Michio Yamaji

    IPC分类号： F16K17/22 ,  G05D7/06

    CPC分类号： G05D7/0647 ,  Y10T137/7759 ,  Y10T137/7761

    摘要： A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the pressure-type flow control apparatus, and offers other advantages including improved gas replaceability, prevention of dust formation, and reduced manufacturing costs of the flow control system. The apparatus comprises an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit to calculate a fluid flow rate Q on the basis of a pressure P1 detected by the pressure detector with the equation Q=KP1 (K=constant) and to output in a drive for the control valve the difference between the set flow rate signal Qs and the calculated flow rate signal Q as control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate of the fluid downstream of the orifice with the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 maintained at not higher than the ratio of the critical pressure of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that the ring-shaped gap between the valve seat and the diaphragm serves a variable orifice wherein the gap is adjusted by the orifice drive.

    摘要翻译： PCT No.PCT / JP98 / 03620 Sec。 371日期1999年5月24日 102（e）日期1999年5月24日PCT提交1998年8月13日PCT公布。 公开号WO99 /​​ 09463 日期1999年2月25日一种特别用于半导体制造设备中的气体供给系统的压力式流量控制装置。 流量控制装置设置有可变孔口，其允许容易地切换流体流量控制范围以及压力型流量控制装置的尺寸减小，并且提供其它优点，包括改进的气体替换性，防止灰尘 形成和降低流量控制系统的制造成本。 该装置包括孔口，设置在孔口的上游侧的控制阀，设置在控制阀和孔口之间的压力检测器，以及控制单元，用于根据检测到的压力P1计算流体流量Q 压力检测器具有等式Q = KP1（K =常数），并且在控制阀的驱动器中输出设定流量信号Qs和计算流量信号Q之间的差作为控制信号Qy，其中压力P1 on 孔口的上游侧通过致动用于控制孔口下游流体的流速的控制阀来调节，孔口上游侧的压力P1与保持在不同的孔口的下游压力P2之间的比率P2 / P1 高于受控流体的临界压力的比例，其特征在于，直接触摸式金属隔膜阀单元用作孔口，并且阀海之间的环形间隙 并且隔膜用于可变孔口，其中间隙由孔口驱动器调节。