摘要:
A gas supply system is provided. The system includes a plurality of component gas supply pipes, a plurality of flow rate control mechanisms for controlling flow rates of the component gases flowing in the component gas supply pipes, and a material gas supply pipe connected with downstream ends of the component gas supply pipes, and connected with one of the gas supply ports at a downstream. The flow rate control mechanism includes flow rate control valves, individual pressure sensors, and fluid resistance elements provided to the component gas supply pipes in this order from upstream, respectively, a common pressure sensor, and controllers for calculating the flow rates of the gases flowing in the component gas supply and controlling the flow rate control valves of the corresponding component gas supply pipes so that the calculated component gas flow rate approaches a predetermined gas flow rate, respectively.
摘要:
This invention is to improve procedures of maintenance of a fluid measurement system having a fluid measurement device and a control device. The fluid measurement system has a fluid measurement device and a control device to control the fluid measurement device, and the fluid measurement device comprises a fluid sensor and a related data store part configured to store fluid calculation related data for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor, and the control device obtains the fluid calculation related data from the related data store part and calculates the one or more fluid parameters with the measurement data of the fluid sensor and the fluid calculation related data.
摘要:
An object of this invention is to provide a flow rate ratio controlling apparatus that does not need devices of a plurality of types and that enables reduction of the number of types of components and the manufacturing cost. The flow rate ratio controlling apparatus comprises differential pressure flow rate controllers (MFC1, MFC2) of the same type and a control processing mechanism (C) for giving commands to the flow rate controllers (MFC1, MFC2) to control them. The flow rate controllers (MFC1, MFC2) are provided with respective branched flow channels (BL1, BL2) branched from a terminal of a main flow channel (ML) in opposite directions. The flow rate controller (MFC1) arranged in the branched flow channel (BL1) is operated so that a detected pressure achieves a predetermined target pressure; a target flow rate for the flow rate controller (MFC2) arranged in the branched flow channel (BL2) is determined from the total measured flow rate and the predetermined flow rate ratio, and the flow rate controller (MFC2) is operated so as to achieve the target flow rate.
摘要:
A transfer unit includes a pair of guide and field stabilizer members disposed adjacent to a transfer member and along a conveying path for a transfer sheet. A voltage is applied to the stabilizer members which is of the same polarity as a bias voltage applied to the transfer member. It is assured that transfer sheet reliably contacts the pair of field stabilizer members as it passes therebetween.
摘要:
A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together.A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
摘要:
This invention provides a diagnostic mechanism of a differential pressure type mass flow controller comprising a diagnostic parameter calculating section that obtains a mass flow rate integrated value by means of an integrating calculation from the lowering pressure value of an inlet side sensor among the inlet side sensor and an outlet side sensor arranged in communication respectively at the inlet side and the outlet side of a differential pressure generating resistive element that generates a differential pressure between the inlet and the outlet by changing a flow rate control valve arranged on the channel where a fluid flows from a flow rate control state to a closed state, and further obtains a diagnostic volume value from the obtained mass flow rate integrated value, and a comparing section that compares the diagnostic volume value obtained at the diagnostic parameter calculating section with a specified volume value.
摘要:
A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
摘要:
In a transfer roller for use in a retention type copying machine, a semiconductive transfer roller is connected through a current limiting resistor having a high resistance value of 100 M.OMEGA. to 1000 M.OMEGA. to a transferring bias voltage source. A pair of auxiliary transfer rollers made of conductive material are arranged on respective sides of the transfer roller. The auxiliary transfer rollers are connected to the transferring bias voltage source through a potentiometer. To the transfer roller is applied a first transferring bias voltage of 600 to 900 volts and to the auxiliary transfer rollers is applied a second transferring bias voltage of 400 to 650 volts. When a resistance of a record paper is decreased due to high humidity, the first transferring bias voltage is automatically decreased and the second transferring bias voltage becomes predominant.
摘要:
An electrophotographic sensitizing screen having a great number of apertures, wherein at least an insulating layer and a conductive layer are successively formed on a conductive mesh, is disclosed. These apertures are regularly arranged at such an angle as not to produce moire fringes with respect to a light image projected on the screen.
摘要:
A flow rate measuring device includes a fluid resistance member through which measurement target fluid flows; an upstream side pressure sensor configured to measure pressure on an upstream side of the fluid resistance member from a change of electrical resistance of a resistive element attached to a pressure sensitive surface onto which the target fluid is introduced, and also to measure a temperature of the pressure sensitive surface from a temperature-dependent change of the electrical resistance of the resistive element; a temperature sensor to measure a temperature of the target fluid flowing through the fluid resistance member; and a flow rate calculation part that calculates a flow rate of the target fluid based on the pressure measured by the upstream side pressure sensor, pressure-flow rate characteristics of the fluid resistance member, the upstream side pressure sensor temperature, and the target fluid temperature in the fluid resistance member.