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30 条记录 (耗时 0.025 秒)

    Pod and method of cleaning it
    1.
    发明授权
    Pod and method of cleaning it 有权

    公开(公告)号：US06422247B1

    公开(公告)日：2002-07-23

    申请号：US09860470

    申请日：2001-05-21

    申请人： Noriaki Yoshikawa ,  Tadashi Yotsumoto ,  Terumi Muguruma ,  Yoshitaka Hasegawa ,  Yuichi Kuroda

    发明人： Noriaki Yoshikawa ,  Tadashi Yotsumoto ,  Terumi Muguruma ,  Yoshitaka Hasegawa ,  Yuichi Kuroda

    IPC分类号： B08B908

    摘要： A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.

    Clean storage equipment for substrates and method of storing substrates
    3.
    发明授权
    Clean storage equipment for substrates and method of storing substrates 失效
    基材清洁储存设备和储存基材的方法

    公开(公告)号：US6123120A

    公开(公告)日：2000-09-26

    申请号：US203491

    申请日：1998-12-02

    申请人： Tadashi Yotsumoto ,  Terumi Muguruma ,  Noriaki Yoshikawa ,  Yuichi Kuroda

    发明人： Tadashi Yotsumoto ,  Terumi Muguruma ,  Noriaki Yoshikawa ,  Yuichi Kuroda

    IPC分类号： B65B31/04 ,  H01L21/02 ,  H01L21/673 ,  B65B1/04

    CPC分类号： H01L21/67769 ,  H01L21/67389

    摘要： Storage equipment simply and effectively maintains the cleanness of substrates stored therein. The substrates in the storage equipment are set in a pod. The storage equipment has removable covers, a unit for fitting the covers to pods, respectively, a unit for holding the pods with the covers, a gas supply unit for individually supplying gas into the pods through the covers, and an exhaust unit for individually discharging an atmosphere from the pods through the covers. Each pod is closed with the cover in the storage equipment, and the gas supply unit and exhaust unit periodically replace an atmosphere in each pod with inert gas or evacuate each pod, to control the storage conditions of each pod in the storage equipment.

    摘要翻译： 存储设备简单有效地保持其中存储的基板的清洁度。 存储设备中的基板被设置在容器中。 存储设备具有可移除的盖，用于将盖安装到舱的单元，用于将盖保持在盖上的单元，用于通过盖单独地将气体供应到舱中的气体供应单元，以及用于单独排出的排气单元 从荚果通过盖子的气氛。 每个荚用存储设备中的盖子封闭，气体供应单元和排气单元周期性地用惰性气体代替每个舱中的气氛或排空每个舱，以控制存储设备中每个舱的储存条件。

    Wafer container
    4.
    发明授权
    Wafer container 失效
    晶圆容器

    公开(公告)号：US06883539B2

    公开(公告)日：2005-04-26

    申请号：US10669003

    申请日：2003-09-24

    申请人： Kiyotaka Inoue ,  Terumi Muguruma ,  Yuichi Kuroda ,  Noriaki Yoshikawa

    发明人： Kiyotaka Inoue ,  Terumi Muguruma ,  Yuichi Kuroda ,  Noriaki Yoshikawa

    IPC分类号： H01L21/673 ,  H01L21/677 ,  H01L21/68 ,  B65G1/133

    CPC分类号： H01L21/67772 ,  H01L21/67376 ,  Y10T137/86083

    摘要： A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.

    摘要翻译： 提供一种用于存储能够缩短生产周期时间的基板的容器，提高生产效率和降低生产成本。 用于存储基板的容器由用于容纳基板的箱体和用于通过将封闭构件紧密地固定到箱体的开口而密封地封闭箱体的封闭构件组成。 用于存储基板的容器设置有临时存储密封气体并将密封气体引入箱中的装置。 此外，用于存储基板的容器设置有用于临时形成低压空间的装置，用于通过将气体转移到低压空间来抽空箱内的气体。

    Wafer container
    5.
    发明授权
    Wafer container 失效

    公开(公告)号：US06926029B2

    公开(公告)日：2005-08-09

    申请号：US11006595

    申请日：2004-12-08

    申请人： Kiyotaka Inoue ,  Terumi Muguruma ,  Yuichi Kuroda ,  Noriaki Yoshikawa

    发明人： Kiyotaka Inoue ,  Terumi Muguruma ,  Yuichi Kuroda ,  Noriaki Yoshikawa

    IPC分类号： H01L21/673 ,  H01L21/677 ,  H01L21/68 ,  B65G1/133

    CPC分类号： H01L21/67772 ,  H01L21/67376 ,  Y10T137/86083

    摘要： A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.

    WAFER CONTAINER
    6.
    发明申请
    WAFER CONTAINER 失效

    公开(公告)号：US20050098218A1

    公开(公告)日：2005-05-12

    申请号：US11006595

    申请日：2004-12-08

    申请人： Kiyotaka Inoue ,  Terumi Muguruma ,  Yuichi Kuroda ,  Noriaki Yoshikawa

    发明人： Kiyotaka Inoue ,  Terumi Muguruma ,  Yuichi Kuroda ,  Noriaki Yoshikawa

    IPC分类号： H01L21/673 ,  H01L21/677 ,  H01L21/68 ,  F04F3/00

    CPC分类号： H01L21/67772 ,  H01L21/67376 ,  Y10T137/86083

    摘要： A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.

    摘要翻译： 提供一种用于存储能够缩短生产周期时间的基板的容器，提高生产效率和降低生产成本。 用于存储基板的容器由用于容纳基板的箱体和用于通过将封闭构件紧密地固定到箱体的开口而密封地封闭箱体的封闭构件组成。 用于存储基板的容器设置有临时存储密封气体并将密封气体引入箱中的装置。 此外，用于存储基板的容器设置有用于临时形成低压空间的装置，用于通过将气体转移到低压空间来抽空箱内的气体。

    Ultrasonic imaging method and system capable of displaying B-mode image and color flow mapping image over wide field
    10.
    发明授权
    Ultrasonic imaging method and system capable of displaying B-mode image and color flow mapping image over wide field 失效
    超声波成像方法和系统能够在宽视场中显示B模式图像和色彩流映射图像

    公开(公告)号：US5447158A

    公开(公告)日：1995-09-05

    申请号：US77356

    申请日：1993-06-16

    申请人： Hirotaka Nakajima ,  Noriaki Yoshikawa ,  Masahiko Yano

    发明人： Hirotaka Nakajima ,  Noriaki Yoshikawa ,  Masahiko Yano

    IPC分类号： A61B8/06 ,  G01S7/52 ,  G01S15/89

    CPC分类号： G01S15/8979 ,  A61B8/06 ,  A61B8/13 ,  G01S7/52071 ,  G01S7/52085 ,  G01S15/8918 ,  G01S15/892 ,  G01S7/52063 ,  G01S7/52074

    摘要： In ultrasonic imaging method/system, a deep interior portion of a biological body under medical examination can be scanned by blood-flow image scanning beams with a wide view field. The ultrasonic imaging system is arranged by a probe device having a probe plane for transmitting ultrasonic pulses to an interior portion of a biological body under medical examination, and for receiving ultrasonic echoes reflected from the interior portion of the biological body; a B-mode image scanning unit coupled to the probe means, for scanning the interior portion of the biological body by the ultrasonic pulses in a fan-shaped form as fan-shaped B-mode image scanning beams; a B-mode image producing unit for producing B-mode image data of the scanned interior portion from B-mode imaging echoes derived from the probe device, while scanning the interior portion by the fan-shaped B-mode image scanning beams; a blood-flow image scanning unit for scanning the interior portion by transmitting thereto the ultrasonic pulses as blood-flow image scanning beams from the probe plane at a predetermined inclined angle with respect to a normal line direction of the probe plane; a blood-flow image producing unit for producing blood-flow image data of the scanned interior portion from blood-flow imaging echoes derived from the probe means, while scanning the interior portion by the inclined blood-flow image scanning beams; and a dual-mode displaying unit for displaying both of a B-mode image of the scanned interior portion the a blood-flow image thereof in a dual mode by superimposing the blood-flow image data on the B-mode image data.

    摘要翻译： 在超声成像方法/系统中，可以通过具有宽视野的血流图像扫描光束来扫描体检下的生物体的深部内部。 超声波成像系统由具有探针平面的探针装置配置，用于在医学检查下将超声脉冲发送到生物体的内部，并且用于接收从生物体内部反射的超声回波; 耦合到探针装置的B模式图像扫描单元，用于通过扇形形式的超声波脉冲扫描生物体的内部作为扇形B模式图像扫描光束; B模式图像产生单元，用于通过扇形B模式图像扫描光束扫描内部部分，从由探测装置得到的B模式成像回波产生扫描内部部分的B模式图像数据; 血流图像扫描单元，用于以相对于探针平面的法线方向以规定的倾斜角度从所述探针平面传送超声波脉冲作为血流图像扫描光束来扫描所述内部; 血流图像产生单元，用于通过倾斜的血流图像扫描光束扫描内部部分，从由探测装置得到的血流成像回波产生扫描的内部部分的血流图像数据; 以及双模式显示单元，用于通过将血流图像数据叠加在B模式图像数据上，以双模式显示扫描的内部部分的B模式图像的血流图像。