公开(公告)号：US20100219415A1

公开(公告)日：2010-09-02

申请号：US12779377

申请日：2010-05-13

申请人： Byoungkeon Park ,  Taehoon Yang ,  Jinwook Seo ,  Seihwan Jung ,  Kiyong Lee ,  Maxim Lisachenko

发明人： Byoungkeon Park ,  Taehoon Yang ,  Jinwook Seo ,  Seihwan Jung ,  Kiyong Lee ,  Maxim Lisachenko

IPC分类号： H01L33/16 ,  H01L21/336

CPC分类号： H01L29/78696 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02672 ,  H01L27/1277 ,  H01L27/3244 ,  H01L29/04 ,  H01L29/66757 ,  H01L29/78675

摘要： A transistor includes a substrate, an active region including a source region, a channel region, and a drain region which are crystallized using an SGS crystallization method and are formed on the substrate so that a grain size of a first annealed portion and a second annealed portion are different from each other, a gate insulating layer formed on the active region, and a gate electrode formed on the gate insulating layer.

摘要翻译： 晶体管包括基板，包括源极区域，沟道区域和漏极区域的有源区域，其使用SGS结晶方法结晶并形成在基板上，使得第一退火部分和第二退火部分的晶粒尺寸 部分彼此不同，形成在有源区上的栅极绝缘层和形成在栅极绝缘层上的栅电极。

公开(公告)号：US08247316B2

公开(公告)日：2012-08-21

申请号：US12779377

申请日：2010-05-13

申请人： Byoungkeon Park ,  Taehoon Yang ,  Jinwook Seo ,  Seihwan Jung ,  Kiyong Lee ,  Maxim Lisachenko

发明人： Byoungkeon Park ,  Taehoon Yang ,  Jinwook Seo ,  Seihwan Jung ,  Kiyong Lee ,  Maxim Lisachenko

IPC分类号： H01L21/20 ,  H01L21/36

CPC分类号： H01L29/78696 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02672 ,  H01L27/1277 ,  H01L27/3244 ,  H01L29/04 ,  H01L29/66757 ,  H01L29/78675

摘要： A transistor includes a substrate, an active region including a source region, a channel region, and a drain region which are crystallized using an SGS crystallization method and are formed on the substrate so that a grain size of a first annealed portion and a second annealed portion are different from each other, a gate insulating layer formed on the active region, and a gate electrode formed on the gate insulating layer.

摘要翻译： 晶体管包括基板，包括源极区域，沟道区域和漏极区域的有源区域，其使用SGS结晶方法结晶并形成在基板上，使得第一退火部分和第二退火部分的晶粒尺寸 部分彼此不同，形成在有源区上的栅极绝缘层和形成在栅极绝缘层上的栅电极。

公开(公告)号：US09496321B2

公开(公告)日：2016-11-15

申请号：US11961187

申请日：2007-12-20

申请人： Taehoon Yang ,  Kiyong Lee ,  Jinwook Seo ,  Taewook Kang ,  Byoungkeon Park ,  Seihwan Jung

发明人： Taehoon Yang ,  Kiyong Lee ,  Jinwook Seo ,  Taewook Kang ,  Byoungkeon Park ,  Seihwan Jung

IPC分类号： H01L29/04 ,  H01L27/28 ,  H01L27/32 ,  H01L27/12

CPC分类号： H01L27/1288 ,  H01L27/1214 ,  H01L27/1277 ,  H01L27/3244

摘要： An organic light emitting display and a method of manufacturing the same that reduces the number of the masks needed and improves production yield by forming alignment marks during an SGS crystallization process for producing a thin film transistor. The organic light emitting display includes a substrate having a display region and a non-display region, at least one pixel region formed of a thin film transistor and an organic light emitting element electrically coupled to each other in the display region of the substrate, and at least one alignment mark formed in a non-display region of the substrate by the SGS crystallization process.

摘要翻译： 一种有机发光显示器及其制造方法，其通过在用于制造薄膜晶体管的SGS结晶工艺中形成对准标记而减少所需掩模的数量并提高生产率。 有机发光显示器包括具有显示区域和非显示区域的基板，由薄膜晶体管形成的至少一个像素区域和在基板的显示区域中彼此电耦合的有机发光元件，以及 通过SGS结晶工艺在衬底的非显示区域中形成的至少一个对准标记。

公开(公告)号：US07910919B2

公开(公告)日：2011-03-22

申请号：US11961213

申请日：2007-12-20

申请人： Taehoon Yang ,  Jinwook Seo ,  Byoungkeon Park ,  Kiyong Lee ,  Seihwan Jung

发明人： Taehoon Yang ,  Jinwook Seo ,  Byoungkeon Park ,  Kiyong Lee ,  Seihwan Jung

IPC分类号： H01L35/24 ,  H01L51/00

CPC分类号： H01L27/1285 ,  G09G3/3233 ,  G09G2300/0819 ,  G09G2300/0852 ,  G09G2300/0861 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02672 ,  H01L27/1296 ,  H01L2251/566

摘要： An organic light emitting display and a fabricating method thereof in which an alignment mark is formed in the non-display region. The organic light emitting display includes a substrate having a display region and a non-display region; a buffer layer formed the overall substrate; a gate insulating layer; a gate electrode formed on the gate insulating layer corresponding to the active layer; an interlayer dielectric layer formed on the gate insulating layer; a source/drain electrode formed on the interlayer dielectric layer and electrically coupled to the active layer; an insulating layer formed on the source/drain electrode; and an organic light emitting diode formed on the insulating layer and electrically coupled to the source/drain electrode. Further, the organic light emitting display includes an alignment mark formed on one of the substrate and the buffer layer.

摘要翻译： 一种有机发光显示器及其制造方法，其中在非显示区域中形成对准标记。 有机发光显示器包括具有显示区域和非显示区域的基板; 形成整个基板的缓冲层; 栅极绝缘层; 形成在与所述有源层对应的所述栅极绝缘层上的栅电极; 形成在所述栅绝缘层上的层间电介质层; 源极/漏电极，形成在所述层间电介质层上并电耦合到所述有源层; 形成在源极/漏极上的绝缘层; 和形成在绝缘层上并电耦合到源/漏电极的有机发光二极管。 此外，有机发光显示器包括形成在基板和缓冲层之一上的对准标记。

公开(公告)号：US20080157099A1

公开(公告)日：2008-07-03

申请号：US11961213

申请日：2007-12-20

申请人： Taehoon Yang ,  Jinwook Seo ,  Byoungkeon Park ,  Kiyong Lee ,  Seihwan Jung

发明人： Taehoon Yang ,  Jinwook Seo ,  Byoungkeon Park ,  Kiyong Lee ,  Seihwan Jung

IPC分类号： H01L31/12 ,  H01L21/00

CPC分类号： H01L27/1285 ,  G09G3/3233 ,  G09G2300/0819 ,  G09G2300/0852 ,  G09G2300/0861 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02672 ,  H01L27/1296 ,  H01L2251/566

摘要： An organic light emitting display and a fabricating method thereof in which an alignment mark is formed in the non-display region. The organic light emitting display includes a substrate having a display region and a non-display region; a buffer layer formed the overall substrate; a gate insulating layer; a gate electrode formed on the gate insulating layer corresponding to the active layer; an interlayer dielectric layer formed on the gate insulating layer; a source/drain electrode formed on the interlayer dielectric layer and electrically coupled to the active layer; an insulating layer formed on the source/drain electrode; and an organic light emitting diode formed on the insulating layer and electrically coupled to the source/drain electrode. Further, the organic light emitting display includes an alignment mark formed on one of the substrate and the buffer layer.

摘要翻译： 一种有机发光显示器及其制造方法，其中在非显示区域中形成对准标记。 有机发光显示器包括具有显示区域和非显示区域的基板; 形成整个基板的缓冲层; 栅极绝缘层; 形成在与所述有源层对应的所述栅极绝缘层上的栅电极; 形成在所述栅绝缘层上的层间电介质层; 源极/漏电极，形成在所述层间电介质层上并电耦合到所述有源层; 形成在源极/漏极上的绝缘层; 和形成在绝缘层上并电耦合到源/漏电极的有机发光二极管。 此外，有机发光显示器包括形成在基板和缓冲层之一上的对准标记。

公开(公告)号：US20080157082A1

公开(公告)日：2008-07-03

申请号：US11961187

申请日：2007-12-20

申请人： Taehoon Yang ,  Kiyong Lee ,  Jinwook Seo ,  Taewook Kang ,  Byoungkeon Park ,  Seihwan Jung

发明人： Taehoon Yang ,  Kiyong Lee ,  Jinwook Seo ,  Taewook Kang ,  Byoungkeon Park ,  Seihwan Jung

IPC分类号： H01L29/04 ,  H01L21/00 ,  H01L27/28

CPC分类号： H01L27/1288 ,  H01L27/1214 ,  H01L27/1277 ,  H01L27/3244

摘要： An organic light emitting display and a method of manufacturing the same that reduce the number of the masks needed and improve production yield by forming alignment marks during an SGS crystallization process for producing a thin film transistor includes a substrate having a display region and a non-display region, at least one pixel region formed of a thin film transistor and an organic light emitting element electrically coupled each other in the display region of the substrate, and at least one alignment mark formed in a non-display region of the substrate by SGS crystallization process.

摘要翻译： 在用于制造薄膜晶体管的SGS结晶工艺期间，通过形成对准标记来减少需要的掩模数量并提高制造成品率的有机发光显示器及其制造方法包括具有显示区域和非显示区域的基板， 显示区域，由薄膜晶体管形成的至少一个像素区域和在衬底的显示区域中彼此电耦合的有机发光元件，以及通过SGS形成在衬底的非显示区域中的至少一个对准标记 结晶过程。