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    Communication control method
    1.
    发明授权
    Communication control method 有权

    公开(公告)号：US10725384B2

    公开(公告)日：2020-07-28

    申请号：US16102865

    申请日：2018-08-14

    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

    Inventor： Chao-Chen Chang ,  Shao-Wei Luo ,  Shang-Chieh Chien ,  Li-Jui Chen ,  Po-Chung Cheng

    IPC: G03F7/20

    Abstract: A method includes operation below. A first task is performed by a control circuit according to a first request from a processor. A second request, for triggering a second task to be performed by the control circuit, is received by an interface circuit. A first data rate, for transmitting first data generated in the first task, is calculated by the interface circuit. A second data rate, for transmitting second data to be generated in the second task, is estimated by the interface circuit. The second task other than the first task is performed by the control circuit. The first data and the second data are transmitted from the control circuit to the processor in a condition that a sum of the first data rate and the second data rate complies with a bandwidth of a data switch coupled between the control circuit and the processor.

    Process system and operating method thereof
    2.
    发明授权
    Process system and operating method thereof 有权

    公开(公告)号：US11237482B2

    公开(公告)日：2022-02-01

    申请号：US16195945

    申请日：2018-11-20

    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

    Inventor： Chao-Chen Chang ,  Shao-Wei Luo ,  Jen-Yang Chung ,  Shang-Chieh Chien ,  Li-Jui Chen ,  Po-Chung Cheng

    IPC: G03F7/20 ,  H05G2/00

    Abstract: A device is disclosed that includes a master controller, a process chamber, a local controller, a switch, and a data storage. The process chamber is configured to generate a data according to a EUV light generation process. The local controller is coupled to the master controller and configured to control the process chamber. The switch is coupled between the master controller and the local controller, wherein the switch is configured to provide paths for the local controller to communicate with the master controller. The data storage directly connected to the local controller and configured to store the data. The local controller communicates directly with the data storage.

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