公开(公告)号：US20240087861A1

公开(公告)日：2024-03-14

申请号：US18513313

申请日：2023-11-17

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Jen YANG ,  Yi-Zhen CHEN ,  Chih-Pin WANG ,  Chao-Li SHIH ,  Ching-Hou SU ,  Cheng-Yi HUANG

IPC: H01J37/34 ,  C23C14/35

CPC classification number: H01J37/3408 ,  C23C14/35 ,  H01J37/3458 ,  H01J2237/152

Abstract: In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.

公开(公告)号：US20180174807A1

公开(公告)日：2018-06-21

申请号：US15475196

申请日：2017-03-31

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tsung-Min LIN ,  Ming-Hsing LI ,  Fang-Chi CHIEN ,  Chao-Li SHIH ,  Hong-Hsing CHOU

IPC: H01J37/32 ,  H01L21/265

CPC classification number: H01J37/32678 ,  H01J37/32192 ,  H01J37/32229 ,  H01J37/32412 ,  H01J37/32651 ,  H01J2237/3365 ,  H01L21/265

Abstract: An ion implanter comprises a dissociation chamber in the ion implanter. The dissociation chamber has an input port for receiving a gas and an output port for outputting ions. A vacuum chamber surrounds the dissociation chamber. A plurality of rods or plates of magnetic material are located adjacent to the dissociation chamber on at least two sides of the dissociation chamber. A magnet is magnetically coupled to the plurality of rods or plates of magnetic material. A microwave source is provided for supplying microwaves to the dissociation chamber, so as to cause electron cyclotron resonance in the dissociation chamber to ionize the gas.

公开(公告)号：US20220367160A1

公开(公告)日：2022-11-17

申请号：US17876422

申请日：2022-07-28

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Jen YANG ,  Yi-Zhen CHEN ,  Chih-Pin WANG ,  Chao-Li SHIH ,  Ching-Hou SU ,  Cheng-Yi HUANG

IPC: H01J37/34 ,  C23C14/35

Abstract: In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.

公开(公告)号：US20250112032A1

公开(公告)日：2025-04-03

申请号：US18981170

申请日：2024-12-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Jen YANG ,  Yi-Zhen CHEN ,  Chih-Pin WANG ,  Chao-Li SHIH ,  Ching-Hou SU ,  Cheng-Yi HUANG

IPC: H01J37/34 ,  C23C14/35

Abstract: In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.

公开(公告)号：US20200161108A1

公开(公告)日：2020-05-21

申请号：US16596109

申请日：2019-10-08

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Jen YANG ,  Yi-Zhen CHEN ,  Chih-Pin WANG ,  Chao-Li SHIH ,  Ching-Hou SU ,  Cheng-Yi HUANG

IPC: H01J37/34 ,  C23C14/35

Abstract: In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.