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公开(公告)号:US20180315728A1
公开(公告)日:2018-11-01
申请号:US15499962
申请日:2017-04-28
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hao-Jan PEI , Chih-Chiang TSAO , Wei-Yu CHEN , Hsiu-Jen LIN , Ming-Da CHENG , Ching-Hua HSIEH , Chung-Shi LIU
CPC classification number: H01L24/19 , H01L21/565 , H01L21/6835 , H01L23/293 , H01L23/3128 , H01L24/13 , H01L24/25 , H01L24/73 , H01L24/96 , H01L25/105 , H01L2221/68345 , H01L2221/68368 , H01L2224/13024 , H01L2224/19 , H01L2224/25171 , H01L2224/2518 , H01L2224/73209 , H01L2225/1035 , H01L2225/1058 , H01L2924/3511
Abstract: Structures and formation methods of a chip package are provided. The method includes forming a protective layer to surround a semiconductor die, and the protective layer has opposing first and second surfaces. The method also includes forming a dielectric layer over the first surface of the protective layer and the semiconductor die. The method further includes forming a conductive feature over the dielectric layer such that the conductive feature is electrically connected to a conductive element of the semiconductor die. In addition, the method includes printing a warpage-control element over the second surface of the protective layer and the semiconductor die such that the semiconductor die is between the warpage-control element and the dielectric layer.
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公开(公告)号:US20200279823A1
公开(公告)日:2020-09-03
申请号:US16876371
申请日:2020-05-18
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hao-Jan PEI , Chih-Chiang TSAO , Wei-Yu CHEN , Hsiu-Jen LIN , Ming-Da CHENG , Ching-Hua HSIEH , Chung-Shi LIU
Abstract: A method for forming a package structure is provided. The method includes forming a protective layer to surround a semiconductor die and forming a conductive structure over the protective layer. The method also includes disposing a polymer-containing material over the protective layer to partially surround the conductive structure. The method further includes curing the polymer-containing material to form a warpage-control element.
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公开(公告)号:US20190252340A1
公开(公告)日:2019-08-15
申请号:US16398119
申请日:2019-04-29
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
Inventor: Hao-Jan PEI , Chih-Chiang TSAO , Wei-Yu CHEN , Hsiu-Jen LIN , Ming-Da CHENG , Ching-Hua HSIEH , Chung-Shi LIU
CPC classification number: H01L24/19 , H01L21/565 , H01L21/6835 , H01L23/293 , H01L23/3128 , H01L24/13 , H01L24/25 , H01L24/73 , H01L24/96 , H01L25/105 , H01L25/115 , H01L2221/68345 , H01L2221/68368 , H01L2224/13024 , H01L2224/19 , H01L2224/25171 , H01L2224/2518 , H01L2224/73209 , H01L2225/1035 , H01L2225/1058 , H01L2924/3511
Abstract: A package structure is provided. The package structure includes a semiconductor die and a protective layer surrounding the semiconductor die. The package structure also includes a conductive structure and a warpage-control element over a same side of the protective layer. A bottom surface of the warpage-control element is higher than a bottom surface of the conductive structure. The bottom surface of the warpage-control element is lower than a top surface of the conductive bump.
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