公开(公告)号：US20230284366A1

公开(公告)日：2023-09-07

申请号：US18298927

申请日：2023-04-11

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tai-Yu CHEN ,  Cho-Ying LIN ,  Sagar Deepak KHIVSARA ,  Hsiang CHEN ,  Chieh HSIEH ,  Sheng-Kang YU ,  Shang-Chieh CHIEN ,  Kai Tak LAM ,  Li-Jui CHEN ,  Heng-Hsin LIU ,  Zhiqiang WU

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/008 ,  H05G2/006 ,  G03F7/7055 ,  G03F7/7085 ,  G03F7/70033

Abstract: A light source is provided capable of maintaining the temperature of a collector surface at or below a predetermined temperature. The light source in accordance with various embodiments of the present disclosure includes a processor, a droplet generator for generating a droplet to create extreme ultraviolet light, a collector for reflecting the extreme ultraviolet light into an intermediate focus point, a light generator for generating pre-pulse light and main pulse light, and a thermal image capture device for capturing a thermal image from a reflective surface of the collector.

公开(公告)号：US20210149317A1

公开(公告)日：2021-05-20

申请号：US16683432

申请日：2019-11-14

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Hsiang CHEN ,  Sheng-Kang YU ,  Shang-Chieh CHIEN ,  Li-Jui CHEN

IPC: G03F9/00 ,  G03F7/20

Abstract: A method of controlling a temperature of the semiconductor device includes operating an semiconductor apparatus; maintaining a temperature of a vessel of the semiconductor apparatus with a first cooling output by a cooling controller; heating the vessel for removing a material on the vessel; transferring a first signal, by a converter, to the cooling controller when heating the vessel; and reducing the first cooling output to a second cooling output by the cooling controller base on the first signal.

公开(公告)号：US20230065403A1

公开(公告)日：2023-03-02

申请号：US17462563

申请日：2021-08-31

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tai-Yu CHEN ,  Cho-Ying LIN ,  Sagar Deepak KHIVSARA ,  Hsiang CHEN ,  Chieh HSIEH ,  Sheng-Kang YU ,  Shang-Chieh CHIEN ,  Kai Tak LAM ,  Li-Jui CHEN ,  Heng-Hsin LIU ,  Zhiqiang WU

IPC: H05G2/00 ,  G03F7/20

Abstract: A light source is provided capable of maintaining the temperature of a collector surface at or below a predetermined temperature. The light source in accordance with various embodiments of the present disclosure includes a processor, a droplet generator for generating a droplet to create extreme ultraviolet light, a collector for reflecting the extreme ultraviolet light into an intermediate focus point, a light generator for generating pre-pulse light and main pulse light, and a thermal image capture device for capturing a thermal image from a reflective surface of the collector.