公开(公告)号：US08960442B2

公开(公告)日：2015-02-24

申请号：US14356852

申请日：2011-11-08

申请人： Takaharu Oyama ,  Chiaki Matsutori ,  Tsuyoshi Nagashima ,  Shuichi Inoue ,  Hiroyuki Shida ,  Hiroki Yamagishi ,  Kazumasa Onuki

发明人： Takaharu Oyama ,  Chiaki Matsutori ,  Tsuyoshi Nagashima ,  Shuichi Inoue ,  Hiroyuki Shida ,  Hiroki Yamagishi ,  Kazumasa Onuki

IPC分类号： B65D85/48 ,  H01L21/673

CPC分类号： H01L21/67383 ,  H01L21/67386 ,  Y10S206/832

摘要： Wafer support shelves (10, 10) are each provided with wafer support projections (A, B1, B2) on which parts of the outer margins of a semiconductor wafer (W) are to be placed. In each case, one of the support projections (A, B1, B2) is provided on the far side of the center position of the semiconductor wafer (W), and two of the support projections are provided on the near side of the center of the semiconductor wafer. By means of this structure, in a state in which a lid body (3) is not attached to a wafer extraction/insertion opening (2), the flexure amount of the semiconductor wafers placed on the support projections of multiple locations in the wafer support shelves can be reduced with a minimal number of projections, so that a hindrance is not created to an operation such as extraction by a robot arm.

摘要翻译： 晶片支撑架（10,10）各自设置有晶片支撑突起（A，B1，B2），半导体晶片（W）的外边缘的一部分将被放置在其上。 在每种情况下，支撑突起（A，B1，B2）中的一个设置在半导体晶片（W）的中心位置的远侧，并且两个支撑突起设置在 半导体晶片。 通过这种结构，在盖体（3）未安装在晶片拔出/插入口（2）的状态下，放置在晶片支撑体中的多个位置的支撑突起上的半导体晶片的挠曲量 可以以最少数量的突起来减少搁架，从而不会对诸如由机器人臂提取的操作产生障碍。

公开(公告)号：US20140138279A1

公开(公告)日：2014-05-22

申请号：US14131120

申请日：2012-07-03

申请人： Tsuyoshi Nagashima ,  Shuichi Inoue ,  Takaharu Oyama ,  Chiaki Matsutori ,  Kazumasa Ohnuki ,  Hiroyuki Shida ,  Hiroki Yamagishi

发明人： Tsuyoshi Nagashima ,  Shuichi Inoue ,  Takaharu Oyama ,  Chiaki Matsutori ,  Kazumasa Ohnuki ,  Hiroyuki Shida ,  Hiroki Yamagishi

IPC分类号： B65D43/02

CPC分类号： B65D43/02 ,  H01L21/67373

摘要： A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.

摘要翻译： 基板收容容器包括：容纳半导体晶片的容器本体; 安装在容器主体前部的门; 以及锁定机构。 锁定机构包括：旋转驱动器，其由门支撑并从盖板侧操作; 以及随着旋转驱动器旋转而垂直滑动以使远端进入和离开容器主体的锁定中空的锁定杆。 旋转驱动器分离成第一和第二旋转驱动器。 第一和第二旋转驱动器分别形成有第一和第二凸轮部分。 第一和第二凸轮部分被制成以支撑其间的锁定杆的近端，使得锁定杆可以在门的厚度方向上摆动。

公开(公告)号：US09387960B2

公开(公告)日：2016-07-12

申请号：US14131120

申请日：2012-07-03

申请人： Tsuyoshi Nagashima ,  Shuichi Inoue ,  Takaharu Oyama ,  Chiaki Matsutori ,  Kazumasa Ohnuki ,  Hiroyuki Shida ,  Hiroki Yamagishi

发明人： Tsuyoshi Nagashima ,  Shuichi Inoue ,  Takaharu Oyama ,  Chiaki Matsutori ,  Kazumasa Ohnuki ,  Hiroyuki Shida ,  Hiroki Yamagishi

IPC分类号： B65D43/02 ,  H01L21/673

CPC分类号： B65D43/02 ,  H01L21/67373

摘要： A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.

摘要翻译： 基板收容容器包括：容纳半导体晶片的容器本体; 安装在容器主体前部的门; 以及锁定机构。 锁定机构包括：旋转驱动器，其由门支撑并从盖板侧操作; 以及随着旋转驱动器旋转而垂直滑动以使远端进入和离开容器主体的锁定中空的锁定杆。 旋转驱动器分离成第一和第二旋转驱动器。 第一和第二旋转驱动器分别形成有第一和第二凸轮部分。 第一和第二凸轮部分被制成以支撑其间的锁定杆的近端，使得锁定杆可以在门的厚度方向上摆动。

公开(公告)号：US20060021904A1

公开(公告)日：2006-02-02

申请号：US11242566

申请日：2005-10-04

申请人： Chiaki Matsutori ,  Takaharu Oyama

发明人： Chiaki Matsutori ,  Takaharu Oyama

IPC分类号： B65D85/48

CPC分类号： H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386

摘要： A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to support the lid. A supporting member is attached to the container body. The supporting member includes a base plate portion, side plates extending from the base plate portion, and a handle on each side plate for lifting the container body. The thin plate supporting member has contacting portions to support the thin plates, supporting members which elastically support the contacting portions, and a base support bar to support the supporting portions. The tip end of each supporting portion contacts a support stage, and elastically supports the contacting portions from both sides.

公开(公告)号：US20050161367A1

公开(公告)日：2005-07-28

申请号：US11087048

申请日：2005-03-23

申请人： Chiaki Matsutori ,  Tadahiro Obayashi ,  Takaharu Oyama

发明人： Chiaki Matsutori ,  Tadahiro Obayashi ,  Takaharu Oyama

IPC分类号： H01L21/673 ,  B65D85/30

CPC分类号： H01L21/67369 ,  H01L21/67373 ,  H01L21/67383

摘要： The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its components, and to a wafer presser for retaining the semiconductor wafers in position when the container is shaken. The latching mechanism includes a locking member which, when projected, secures the lid unit to the container body; an actuator for moving the locking member between projected and retracted positions; a tip-side cam for pressing a tip portion of the locking member in one direction relative to the lid unit when the locking member is projected by the actuator; a base-end lower cam for pressing a base-end of the locking member in a second direction, opposite the one direction; and a base-end upper cam and a cam projection follower for pressing the base-end in the second direction. The wafer presser is supported by a supporting projection bar formed with its ends thinner than its center portion.

摘要翻译： 本发明涉及一种具有用于将盖单元牢固地固定到用于容纳半导体晶片等的容器主体的闩锁机构的盖单元，该闩锁机构可以容易地拆卸以用于其部件的清洁和干燥以及晶片 当将容器摇动时，用于将半导体晶片保持在适当位置。 锁定机构包括锁定构件，其在投影时将盖单元固定到容器主体; 致动器，用于在伸出和缩回位置之间移动锁定构件; 当所述锁定构件被所述致动器突出时，所述尖端侧凸轮用于在相对于所述盖单元的一个方向上按压所述锁定构件的前端部; 一个底端下凸轮，用于在与第一方向相反的第二方向上按压锁定件的底端; 以及基端上凸轮和用于在第二方向上按压基端的凸轮凸块随动件。 晶片压脚由其端部比其中心部分更薄的端部形成的支撑突起支撑。

公开(公告)号：US07726490B2

公开(公告)日：2010-06-01

申请号：US12222681

申请日：2008-08-14

申请人： Chiaki Matsutori ,  Tadahiro Obayashi ,  Takaharu Oyama

发明人： Chiaki Matsutori ,  Tadahiro Obayashi ,  Takaharu Oyama

IPC分类号： B65D85/30

CPC分类号： H01L21/67369 ,  H01L21/67373 ,  H01L21/67383

摘要： The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its components, and to a wafer presser for retaining the semiconductor wafers in position when the container is shaken. The latching mechanism includes a locking member which, when projected, secures the lid unit to the container body; an actuator for moving the locking member between projected and retracted positions; a tip-side cam for pressing a tip portion of the locking member in one direction relative to the lid unit when the locking member is projected by the actuator; a base-end lower cam for pressing a base-end of the locking member in a second direction, opposite the one direction; and a base-end upper cam and a cam projection follower for pressing the base-end in the second direction. The wafer presser is supported by a supporting projection bar formed with its ends thinner than its center portion.

摘要翻译： 本发明涉及一种具有用于将盖单元牢固地固定到用于容纳半导体晶片等的容器主体的闩锁机构的盖单元，该闩锁机构可以容易地拆卸以用于其部件的清洁和干燥以及晶片 当将容器摇动时，用于将半导体晶片保持在适当位置。 锁定机构包括锁定构件，其在投影时将盖单元固定到容器主体; 致动器，用于在伸出和缩回位置之间移动锁定构件; 当所述锁定构件被所述致动器突出时，所述尖端侧凸轮用于在相对于所述盖单元的一个方向上按压所述锁定构件的前端部; 一个底端下凸轮，用于在与第一方向相反的第二方向上按压锁定件的底端; 以及基端上凸轮和用于在第二方向上按压基端的凸轮凸块随动件。 晶片压脚由其端部比其中心部分更薄的端部形成的支撑突起支撑。

公开(公告)号：US20090038986A1

公开(公告)日：2009-02-12

申请号：US12222681

申请日：2008-08-14

申请人： Chiaki Matsutori ,  Tadahiro Obayashi ,  Takaharu Oyama

发明人： Chiaki Matsutori ,  Tadahiro Obayashi ,  Takaharu Oyama

IPC分类号： B65D85/00

CPC分类号： H01L21/67369 ,  H01L21/67373 ,  H01L21/67383

摘要： The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its components, and to a wafer presser for retaining the semiconductor wafers in position when the container is shaken. The latching mechanism includes a locking member which, when projected, secures the lid unit to the container body; an actuator for moving the locking member between projected and retracted positions; a tip-side cam for pressing a tip portion of the locking member in one direction relative to the lid unit when the locking member is projected by the actuator; a base-end lower cam for pressing a base-end of the locking member in a second direction, opposite the one direction; and a base-end upper cam and a cam projection follower for pressing the base-end in the second direction. The wafer presser is supported by a supporting projection bar formed with its ends thinner than its center portion.

摘要翻译： 本发明涉及一种具有用于将盖单元牢固地固定到用于容纳半导体晶片等的容器主体的闩锁机构的盖单元，该闩锁机构可以容易地拆卸以用于其部件的清洁和干燥以及晶片 当将容器摇动时，用于将半导体晶片保持在适当位置。 锁定机构包括锁定构件，其在投影时将盖单元固定到容器主体; 致动器，用于在伸出和缩回位置之间移动锁定构件; 当所述锁定构件被所述致动器突出时，所述尖端侧凸轮用于在相对于所述盖单元的一个方向上按压所述锁定构件的前端部; 一个底端下凸轮，用于在与第一方向相反的第二方向上按压锁定件的底端; 以及基端上凸轮和用于在第二方向上按压基端的凸轮凸块随动件。 晶片压脚由其端部比其中心部分更薄的端部形成的支撑突起支撑。

公开(公告)号：US07455181B2

公开(公告)日：2008-11-25

申请号：US11087048

申请日：2005-03-23

申请人： Chiaki Matsutori ,  Tadahiro Obayashi ,  Takaharu Oyama

发明人： Chiaki Matsutori ,  Tadahiro Obayashi ,  Takaharu Oyama

IPC分类号： B65D85/30

CPC分类号： H01L21/67369 ,  H01L21/67373 ,  H01L21/67383

摘要： The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its components, and to a wafer presser for retaining the semiconductor wafers in position when the container is shaken. The latching mechanism includes a locking member which, when projected, secures the lid unit to the container body; an actuator for moving the locking member between projected and retracted positions; a tip-side cam for pressing a tip portion of the locking member in one direction relative to the lid unit when the locking member is projected by the actuator; a base-end lower cam for pressing a base-end of the locking member in a second direction, opposite the one direction; and a base-end upper cam and a cam projection follower for pressing the base-end in the second direction. The wafer presser is supported by a supporting projection bar formed with its ends thinner than its center portion.

摘要翻译： 本发明涉及一种具有用于将盖单元牢固地固定到用于容纳半导体晶片等的容器主体的闩锁机构的盖单元，该闩锁机构可以容易地拆卸以用于其部件的清洁和干燥以及晶片 当将容器摇动时，用于将半导体晶片保持在适当位置。 锁定机构包括锁定构件，其在投影时将盖单元固定到容器主体; 致动器，用于在伸出和缩回位置之间移动锁定构件; 当所述锁定构件被所述致动器突出时，所述尖端侧凸轮用于在相对于所述盖单元的一个方向上按压所述锁定构件的前端部; 一个底端下凸轮，用于在与第一方向相反的第二方向上按压锁定件的底端; 以及基端上凸轮和用于在第二方向上按压基端的凸轮凸块随动件。 晶片压脚由其端部比其中心部分更薄的端部形成的支撑突起支撑。

公开(公告)号：US20060027477A1

公开(公告)日：2006-02-09

申请号：US11242531

申请日：2005-10-04

申请人： Chiaki Matsutori ,  Takaharu Oyama

发明人： Chiaki Matsutori ,  Takaharu Oyama

IPC分类号： B65D85/48

CPC分类号： H01L21/67376 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386

摘要： A wafer storage container has a container body and a lid. Thin plates are inserted into and picked up from the container body. The container has lid supporters placed on a lid receptacle of the container body, and contacting portions contact with the lid supporters to support the lid. A supporting member is a member attached to support the container body. The supporting member has a base plate portion to support the container body, side plate portions formed as standing from the base plate portion, and a handle on each side plate gripped to lift the container body. The thin plate supporting member has contacting portions to support thin plates, supporting members to support the contacting portions elastically, and base supporting bar portions to support the supporting portions. Tip end of each supporting portion contacts with a contacting portion of each supporting stage, and elastically supports the contacting portions from both sides.

摘要翻译： 晶片储存容器具有容器主体和盖子。 将薄板从容器主体插入并从容器主体拾起。 容器具有放置在容器主体的盖容器上的盖支撑件，并且接触部分与盖支撑件接触以支撑盖子。 支撑构件是附接以支撑容器主体的构件。 支撑构件具有用于支撑容器主体的基板部分，从基板部分竖立形成的侧板部分，以及夹持在每个侧板上的手柄以提升容器主体。 薄板支撑构件具有用于支撑薄板的接触部分，支撑构件以弹性地支撑接触部分，并且支撑基部支撑支撑部分。 每个支撑部分的尖端与每个支撑台的接触部分接触，并且从两侧弹性地支撑接触部分。

公开(公告)号：US07316315B2

公开(公告)日：2008-01-08

申请号：US11242566

申请日：2005-10-04

申请人： Chiaki Matsutori ,  Takaharu Oyama

发明人： Chiaki Matsutori ,  Takaharu Oyama

IPC分类号： B65D85/48 ,  A47G19/08

CPC分类号： H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386

摘要： A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to support the lid. A supporting member is attached to the container body. The supporting member includes a base plate portion, side plates extending from the base plate portion, and a handle on each side plate for lifting the container body. The thin plate supporting member has contacting portions to support the thin plates, supporting members which elastically support the contacting portions, and a base support bar to support the supporting portions. The tip end of each supporting portion contacts a support stage, and elastically supports the contacting portions from both sides.

摘要翻译： 晶片储存容器具有容器主体和盖子。 容器主体具有盖子插座中的盖子支撑插件，并且盖子具有用于与盖子支撑插件接触以支撑盖子的角插入件。 支撑构件附接到容器主体。 支撑构件包括基板部分，从基板部分延伸的侧板和用于提升容器主体的每个侧板上的手柄。 薄板支撑构件具有用于支撑薄板的接触部分，弹性支撑接触部分的支撑构件和支撑支撑部分的基部支撑杆。 每个支撑部分的末端接触支撑台，并且从两侧弹性地支撑接触部分。