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    Wafer storing container
    1.
    发明授权
    Wafer storing container 有权
    晶圆储存容器

    公开(公告)号：US08960442B2

    公开(公告)日：2015-02-24

    申请号：US14356852

    申请日：2011-11-08

    申请人： Takaharu Oyama ,  Chiaki Matsutori ,  Tsuyoshi Nagashima ,  Shuichi Inoue ,  Hiroyuki Shida ,  Hiroki Yamagishi ,  Kazumasa Onuki

    发明人： Takaharu Oyama ,  Chiaki Matsutori ,  Tsuyoshi Nagashima ,  Shuichi Inoue ,  Hiroyuki Shida ,  Hiroki Yamagishi ,  Kazumasa Onuki

    IPC分类号： B65D85/48 ,  H01L21/673

    CPC分类号： H01L21/67383 ,  H01L21/67386 ,  Y10S206/832

    摘要： Wafer support shelves (10, 10) are each provided with wafer support projections (A, B1, B2) on which parts of the outer margins of a semiconductor wafer (W) are to be placed. In each case, one of the support projections (A, B1, B2) is provided on the far side of the center position of the semiconductor wafer (W), and two of the support projections are provided on the near side of the center of the semiconductor wafer. By means of this structure, in a state in which a lid body (3) is not attached to a wafer extraction/insertion opening (2), the flexure amount of the semiconductor wafers placed on the support projections of multiple locations in the wafer support shelves can be reduced with a minimal number of projections, so that a hindrance is not created to an operation such as extraction by a robot arm.

    摘要翻译： 晶片支撑架（10,10）各自设置有晶片支撑突起（A，B1，B2），半导体晶片（W）的外边缘的一部分将被放置在其上。 在每种情况下，支撑突起（A，B1，B2）中的一个设置在半导体晶片（W）的中心位置的远侧，并且两个支撑突起设置在 半导体晶片。 通过这种结构，在盖体（3）未安装在晶片拔出/插入口（2）的状态下，放置在晶片支撑体中的多个位置的支撑突起上的半导体晶片的挠曲量 可以以最少数量的突起来减少搁架，从而不会对诸如由机器人臂提取的操作产生障碍。

    SUBSTRATE STORING CONTAINER
    2.
    发明申请
    SUBSTRATE STORING CONTAINER 有权
    基座储存容器

    公开(公告)号：US20140138279A1

    公开(公告)日：2014-05-22

    申请号：US14131120

    申请日：2012-07-03

    申请人： Tsuyoshi Nagashima ,  Shuichi Inoue ,  Takaharu Oyama ,  Chiaki Matsutori ,  Kazumasa Ohnuki ,  Hiroyuki Shida ,  Hiroki Yamagishi

    发明人： Tsuyoshi Nagashima ,  Shuichi Inoue ,  Takaharu Oyama ,  Chiaki Matsutori ,  Kazumasa Ohnuki ,  Hiroyuki Shida ,  Hiroki Yamagishi

    IPC分类号： B65D43/02

    CPC分类号： B65D43/02 ,  H01L21/67373

    摘要： A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.

    摘要翻译： 基板收容容器包括：容纳半导体晶片的容器本体; 安装在容器主体前部的门; 以及锁定机构。 锁定机构包括：旋转驱动器，其由门支撑并从盖板侧操作; 以及随着旋转驱动器旋转而垂直滑动以使远端进入和离开容器主体的锁定中空的锁定杆。 旋转驱动器分离成第一和第二旋转驱动器。 第一和第二旋转驱动器分别形成有第一和第二凸轮部分。 第一和第二凸轮部分被制成以支撑其间的锁定杆的近端，使得锁定杆可以在门的厚度方向上摆动。

    Substrate storing container
    3.
    发明授权
    Substrate storing container 有权
    基材储存容器

    公开(公告)号：US09387960B2

    公开(公告)日：2016-07-12

    申请号：US14131120

    申请日：2012-07-03

    申请人： Tsuyoshi Nagashima ,  Shuichi Inoue ,  Takaharu Oyama ,  Chiaki Matsutori ,  Kazumasa Ohnuki ,  Hiroyuki Shida ,  Hiroki Yamagishi

    发明人： Tsuyoshi Nagashima ,  Shuichi Inoue ,  Takaharu Oyama ,  Chiaki Matsutori ,  Kazumasa Ohnuki ,  Hiroyuki Shida ,  Hiroki Yamagishi

    IPC分类号： B65D43/02 ,  H01L21/673

    CPC分类号： B65D43/02 ,  H01L21/67373

    摘要： A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.

    摘要翻译： 基板收容容器包括：容纳半导体晶片的容器本体; 安装在容器主体前部的门; 以及锁定机构。 锁定机构包括：旋转驱动器，其由门支撑并从盖板侧操作; 以及随着旋转驱动器旋转而垂直滑动以使远端进入和离开容器主体的锁定中空的锁定杆。 旋转驱动器分离成第一和第二旋转驱动器。 第一和第二旋转驱动器分别形成有第一和第二凸轮部分。 第一和第二凸轮部分被制成以支撑其间的锁定杆的近端，使得锁定杆可以在门的厚度方向上摆动。

    Substrate storage container
    4.
    发明授权
    Substrate storage container 有权
    基材储存容器

    公开(公告)号：US08910792B2

    公开(公告)日：2014-12-16

    申请号：US13579898

    申请日：2010-05-24

    申请人： Tsuyoshi Nagashima

    发明人： Tsuyoshi Nagashima

    IPC分类号： B65D85/86 ,  B65D85/30 ,  H01L21/673

    CPC分类号： H01L21/67369 ,  H01L21/67383

    摘要： The position of a substrate temporal placement piece (4) is set so that the substrate temporal placement piece (4) does not overlap a disc-shaped substrate (W) from a viewing direction perpendicular to the surface of the disc-shaped substrate (W), when a lid (20) is attached to a substrate transfer opening (2) of a container main body (1) and the disc-shaped substrate (W) is pressed to a location where the substrate is positioned and held by a back side holding portion (3). Thereby, even if the disc-shaped substrate (W) stored in the container main body (1) is bent due to vibration, impact, etc., there is no danger that the substrate (W) is in contact with the substrate temporal placement piece (4), and the disc-shaped substrate (W) having a larger diameter can be safely stored.

    摘要翻译： 衬底时间放置片（4）的位置被设定为使得衬底时间放置片（4）从与盘状衬底（W）的表面垂直的观察方向不与盘形衬底（W）重叠 ），当将盖（20）附接到容器主体（1）的基板传送开口（2）并且将盘形基板（W）压到基板定位的位置并被背部保持的位置 侧保持部（3）。 因此，即使存储在容器主体（1）中的盘状基板（W）由于振动，冲击等而弯曲，也不存在基板（W）与基板临时放置接触的危险 （4），并且可以安全地存储具有较大直径的盘形基板（W）。

    Semiconductor Wafer Storing Container
    5.
    发明申请
    Semiconductor Wafer Storing Container 有权
    半导体晶圆储存容器

    公开(公告)号：US20120312720A1

    公开(公告)日：2012-12-13

    申请号：US13518287

    申请日：2010-01-26

    申请人： Tsuyoshi Nagashima

    发明人： Tsuyoshi Nagashima

    IPC分类号： H01L21/67

    CPC分类号： H01L21/67376

    摘要： The dimensions of the deformation margins (Xh, Xp) of a gasket (8), in a state wherein an opening (2) for transferring a wafer into/from a container is closed with a covering body (5) and a gap between the end portion of the covering body (5) and the end portion of the opening (2) is sealed by means of the gasket (8), are formed smaller in a region which seals an end portion (2p) perpendicular to the surface of the semiconductor wafer (W) than those in a region which seals an end portion (2h) parallel to the surface of the semiconductor wafer(W), said regions being the parts of the end portion of the opening (2). Thereby the semiconductor wafer (W) is not contaminated due to dusts and the like sucked from the outside at a moment when the covering body (5) is opened.

    摘要翻译： 在用于将晶片转移到容器中的开口（2）用盖体（5）封闭的状态下，垫圈（8）的变形余量（Xh，Xp）的尺寸和 覆盖体（5）的端部和开口（2）的端部通过垫圈（8）密封，在密封垂直于该表面的端部（2p）的区域中形成得较小 半导体晶片（W）的厚度比密封端子部分（2h）的半导体晶片（W）的表面平行的区域的宽度小，所述区域是开口（2）的端部的部分。 因此，当打开盖体（5）的时刻，半导体晶片（W）由于从外部吸入的灰尘等而不被污染。

    Semiconductor wafer storing container
    7.
    发明授权
    Semiconductor wafer storing container 有权
    半导体晶圆储存容器

    公开(公告)号：US08720693B2

    公开(公告)日：2014-05-13

    申请号：US13518287

    申请日：2010-01-26

    申请人： Tsuyoshi Nagashima

    发明人： Tsuyoshi Nagashima

    IPC分类号： B65D85/30

    CPC分类号： H01L21/67376

    摘要： A main body may have a cavity for storing a plurality of parallel semiconductor wafers and an opening for transferring one or more semiconductor wafer into or from the cavity. A covering body may be mounted detachably to the opening in order to close the opening. A gasket may seal between an edge portion of the covering body and an edge portion of the opening. The gasket may be configured such that, when the opening is closed by the covering body, a size of a deformation margin of the gasket is formed to be smaller in a region that seals a vertical edge portion of the opening orthogonal to the face of each semiconductor wafer than in a region that seals a horizontal edge portion of the opening parallel to the face of each the semiconductor wafer.

    摘要翻译： 主体可以具有用于存储多个平行的半导体晶片的空腔和用于将一个或多个半导体晶片转移到空腔中的开口。 覆盖体可以可拆卸地安装到开口以关闭开口。 衬垫可以在覆盖体的边缘部分和开口的边缘部分之间密封。 垫圈可以被构造成使得当开口被覆盖体封闭时，在密封垂直于每个面的开口的垂直边缘部分的区域中，垫圈的变形边缘的尺寸被形成为更小， 半导体晶片比在密封平行于每个半导体晶片的表面的开口的水平边缘部分的区域中。

    Substrate Storage Container
    8.
    发明申请
    Substrate Storage Container 有权
    基材储存容器

    公开(公告)号：US20130056388A1

    公开(公告)日：2013-03-07

    申请号：US13579898

    申请日：2010-05-24

    申请人： Tsuyoshi Nagashima

    发明人： Tsuyoshi Nagashima

    IPC分类号： H01L21/673

    CPC分类号： H01L21/67369 ,  H01L21/67383

    摘要： The position of a substrate temporal placement piece (4) is set so that the substrate temporal placement piece (4) does not overlap a disc-shaped substrate (W) from a viewing direction perpendicular to the surface of the disc-shaped substrate (W), when a lid (20) is attached to a substrate transfer opening (2) of a container main body (1) and the disc-shaped substrate (W) is pressed to a location where the substrate is positioned and held by a back side holding portion (3). Thereby, even if the disc-shaped substrate (W) stored in the container main body (1) is bent due to vibration, impact, etc., there is no danger that the substrate (W) is in contact with the substrate temporal placement piece (4), and the disc-shaped substrate (W) having a larger diameter can be safely stored.

    摘要翻译： 衬底时间放置片（4）的位置被设定为使得衬底时间放置片（4）从与盘状衬底（W）的表面垂直的观察方向不与盘形衬底（W）重叠 ），当将盖（20）附接到容器主体（1）的基板传送开口（2）并且将盘形基板（W）压到基板定位的位置并被背部保持的位置 侧保持部（3）。 因此，即使存储在容器主体（1）中的盘状基板（W）由于振动，冲击等而弯曲，也不存在基板（W）与基板临时放置接触的危险 （4），并且可以安全地存储具有较大直径的盘形基板（W）。