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公开(公告)号：US08960442B2
公开(公告)日：2015-02-24
申请号：US14356852
申请日：2011-11-08
申请人： Takaharu Oyama , Chiaki Matsutori , Tsuyoshi Nagashima , Shuichi Inoue , Hiroyuki Shida , Hiroki Yamagishi , Kazumasa Onuki
发明人： Takaharu Oyama , Chiaki Matsutori , Tsuyoshi Nagashima , Shuichi Inoue , Hiroyuki Shida , Hiroki Yamagishi , Kazumasa Onuki
IPC分类号： B65D85/48 , H01L21/673
CPC分类号： H01L21/67383 , H01L21/67386 , Y10S206/832
摘要： Wafer support shelves (10, 10) are each provided with wafer support projections (A, B1, B2) on which parts of the outer margins of a semiconductor wafer (W) are to be placed. In each case, one of the support projections (A, B1, B2) is provided on the far side of the center position of the semiconductor wafer (W), and two of the support projections are provided on the near side of the center of the semiconductor wafer. By means of this structure, in a state in which a lid body (3) is not attached to a wafer extraction/insertion opening (2), the flexure amount of the semiconductor wafers placed on the support projections of multiple locations in the wafer support shelves can be reduced with a minimal number of projections, so that a hindrance is not created to an operation such as extraction by a robot arm.
摘要翻译： 晶片支撑架（10,10）各自设置有晶片支撑突起（A，B1，B2），半导体晶片（W）的外边缘的一部分将被放置在其上。 在每种情况下，支撑突起（A，B1，B2）中的一个设置在半导体晶片（W）的中心位置的远侧，并且两个支撑突起设置在 半导体晶片。 通过这种结构，在盖体（3）未安装在晶片拔出/插入口（2）的状态下，放置在晶片支撑体中的多个位置的支撑突起上的半导体晶片的挠曲量 可以以最少数量的突起来减少搁架，从而不会对诸如由机器人臂提取的操作产生障碍。
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公开(公告)号：US20140138279A1
公开(公告)日：2014-05-22
申请号：US14131120
申请日：2012-07-03
申请人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
发明人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
IPC分类号： B65D43/02
CPC分类号： B65D43/02 , H01L21/67373
摘要： A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.
摘要翻译： 基板收容容器包括：容纳半导体晶片的容器本体; 安装在容器主体前部的门; 以及锁定机构。 锁定机构包括：旋转驱动器，其由门支撑并从盖板侧操作; 以及随着旋转驱动器旋转而垂直滑动以使远端进入和离开容器主体的锁定中空的锁定杆。 旋转驱动器分离成第一和第二旋转驱动器。 第一和第二旋转驱动器分别形成有第一和第二凸轮部分。 第一和第二凸轮部分被制成以支撑其间的锁定杆的近端，使得锁定杆可以在门的厚度方向上摆动。
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公开(公告)号：US09387960B2
公开(公告)日：2016-07-12
申请号：US14131120
申请日：2012-07-03
申请人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
发明人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
IPC分类号： B65D43/02 , H01L21/673
CPC分类号： B65D43/02 , H01L21/67373
摘要： A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.
摘要翻译： 基板收容容器包括：容纳半导体晶片的容器本体; 安装在容器主体前部的门; 以及锁定机构。 锁定机构包括：旋转驱动器，其由门支撑并从盖板侧操作; 以及随着旋转驱动器旋转而垂直滑动以使远端进入和离开容器主体的锁定中空的锁定杆。 旋转驱动器分离成第一和第二旋转驱动器。 第一和第二旋转驱动器分别形成有第一和第二凸轮部分。 第一和第二凸轮部分被制成以支撑其间的锁定杆的近端，使得锁定杆可以在门的厚度方向上摆动。
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公开(公告)号：US07789240B2
公开(公告)日：2010-09-07
申请号：US12104214
申请日：2008-04-16
IPC分类号： B65D85/00
CPC分类号： H01L21/67379
摘要： A substrate container includes: a container main body including an opening and containing a substrate; a lid body closing the opening; and a pair of handles provided on a pair of opposing side walls of the container main body, and the handle is secured to an edge portion of the side wall.
摘要翻译： 基板容器包括：容器主体，其包括开口并容纳基板; 封闭开口的盖体; 以及设置在所述容器主体的一对相对的侧壁上的一对把手，并且所述手柄固定在所述侧壁的边缘部分。
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公开(公告)号：US20090206001A1
公开(公告)日：2009-08-20
申请号：US12301123
申请日：2007-05-21
IPC分类号： B65D85/90 , H01L21/673
CPC分类号： H01L21/67376
摘要： A container includes: a container body for storing substrates of semiconductor wafers; a door element detachably fitted to an open front portion of the container body; and a compressively deformable gasket for sealing between the container body and the door element. While a sealing surface for the gasket is formed on an inner periphery of an open front portion of the container body so that the difference between the maximum and minimum of a flatness is less than 0.50 mm, a fitting portion for the gasket is formed in a frame shape. The gasket is formed of a base fitted to the fitting portion; a flexible sealing part extended from the base toward the sealing surface; and a contact portion that is curvedly formed at a distal end of the sealing part and put in press-contact with the sealing surface.
摘要翻译： 容器包括：用于存储半导体晶片的衬底的容器主体; 门元件，其可拆卸地装配到所述容器主体的敞开的前部; 以及用于在容器主体和门元件之间密封的可压缩变形的垫圈。 虽然用于垫圈的密封表面形成在容器主体的敞开的前部的内周上，使得平坦度的最大和最小之间的差小于0.50mm，但是垫圈的嵌合部分形成在 框架形状。 垫圈由安装在装配部上的底座形成; 柔性密封部件，从基部向密封面延伸; 以及在密封部的前端弯曲地形成并与密封面压接的接触部。
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6.发明授权Start-up method of steam turbine plant and condenser employed for said method 失效用于所述方法的蒸汽轮机设备和冷凝器的启动方法
公开(公告)号：US5095706A
公开(公告)日：1992-03-17
申请号：US673076
申请日：1991-03-21
申请人： Kohei Saito , Hiroki Yamagishi , Toshiki Furukawa , Toshio Sato , Hiroshi Hamano , Yoshio Nakano , Katsuaki Tanaka , Satoru Sakamoto
发明人： Kohei Saito , Hiroki Yamagishi , Toshiki Furukawa , Toshio Sato , Hiroshi Hamano , Yoshio Nakano , Katsuaki Tanaka , Satoru Sakamoto
摘要： A start-up method of a steam turbine plant including a condenser is disclosed. The condenser includes a tube bundle composed of a number of pipes for condensing an exhaust steam from a steam turbine and a hot well for receiving and storing a condensate therein. The interior of the condenser is airtightly divided into two spaces with a partition therebetween, one of them being an upper space containing the tube bundle and the other one being a lower space containing the hot well. A communication passageway(s) extends between the upper space and the lower space with an isolation valve in the form of a butterfly valve disposed on the communication passageway. At the shut-down of the steam turbine plant, the isolation valve is closed to isolate the upper space from the lower space while the lower space is maintained in vacuum. At the start-up of the steam turbine plant, the isolation valve is opened after the upper space is evacuated, and the upper space is then communicated with the lower space which is maintained still in vacuum.
摘要翻译： 公开了一种包括冷凝器的汽轮机设备的启动方法。 冷凝器包括由许多用于冷凝来自蒸汽轮机的排气蒸汽的管道和用于在其中接收和存储冷凝物的热井组成的管束。 冷凝器的内部气密地分成两个空间，其间具有间隔，其中一个是容纳管束的上部空间，另一个是容纳热井的下部空间。 连通通道在上部空间和下部空间之间延伸，并具有设置在连通通道上的蝶阀形式的隔离阀。 在蒸汽轮机厂关闭时，隔离阀关闭，以将上部空间与下部空间隔离开，同时将下部空间保持在真空状态。 在蒸汽轮机厂启动时，在上部空间抽真空之后隔离阀打开，上部空间与保持在真空中的下部空间连通。
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公开(公告)号：US20120325708A1
公开(公告)日：2012-12-27
申请号：US13603497
申请日：2012-09-05
IPC分类号： H01L21/673 , B65D85/30
CPC分类号： H01L21/67376
摘要： A substrate storage container includes: a container body molded of molding material in a front open box type for storing substrates; a door element fitted to an opening at the front of the container body; and a compressively deformable gasket for sealing between the container body and the door element. The opening of the container body is projected sidewards and outwards forming a rim portion. A sealing surface for the gasket is formed on an inner surface of the rim portion. The container body is formed with a reinforcing rib directed toward the rim portion. An opposing portion of the reinforcing rib that opposes the rim portion of the container body is reduced in thickness so as to prevent a depression from forming in the sealing surface of the rim portion during molding the container body.
摘要翻译： 基板存储容器包括：容器主体，其以用于存储基板的前开箱形式的成型材料模制; 安装在容器主体前部开口处的门元件; 以及用于在容器主体和门元件之间密封的可压缩变形的垫圈。 容器主体的开口向外侧向外侧突出形成边缘部。 用于垫圈的密封表面形成在边缘部分的内表面上。 容器主体形成有朝向边缘部分的加强肋。 加强肋的与容器主体的边缘部分相对的相对部分的厚度减小，以防止在模制容器主体期间在边缘部分的密封表面中形成凹陷。
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公开(公告)号：US5800194A
公开(公告)日：1998-09-01
申请号：US719538
申请日：1996-09-25
申请人： Hiroki Yamagishi
发明人： Hiroki Yamagishi
CPC分类号： H05K7/1084 , H05K7/1007
摘要： An IC socket includes a cover member vertically movable; a mounting device for placing an IC package; a slide member having a plurality of contact pins inserted therein, horizontally movable; an operating member reciprocating in accordance with the vertical movement of the cover member; and a position control device coming in contact with the slide member to press and move the slide member in a direction perpendicular to the contact surface and to enable the slide member to regain its original position. Thus, the connecting terminals of the IC package are wiped at a moderate contact pressure, and the IC socket having excellent conducting properties can be provided.
摘要翻译： IC插座包括可垂直移动的盖构件; 用于放置IC封装的安装装置; 滑动构件，其具有插入其中的多个接触销，水平可移动; 根据盖构件的垂直运动往复运动的操作构件; 以及位置控制装置，其与所述滑动构件接触，以沿垂直于所述接触表面的方向按压并移动所述滑动构件，并使所述滑动构件能够重新获得其原始位置。 因此，IC封装的连接端子以适度的接触压力擦拭，并且可以提供具有优良导电性能的IC插座。
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公开(公告)号：US20130032509A1
公开(公告)日：2013-02-07
申请号：US13641707
申请日：2011-04-08
申请人： Hiroki Yamagishi , Toshiyuki Kamada
发明人： Hiroki Yamagishi , Toshiyuki Kamada
IPC分类号： H01L21/683
CPC分类号： H01L21/67379 , B65D2585/86 , H01L21/67303 , H01L21/67386
摘要： A substrate storage container is provided with a container body for aligning and storing a plurality of sheets of semiconductor wafers, and a lid for detachably opening/closing an open front of the container body, in which a robotic flange for conveyance is attached on a substantially center portion of a ceiling of the container body, in which heavy gravity center position adjustment member is provided at a rear portion of the container body such as on a rear wall, a side wall rear portion so that inclination of the substrate container body toward the lid side is regulated with the gravity center position adjustment member.
摘要翻译： 基板储存容器设置有用于对准和存储多片半导体晶片的容器主体，以及用于可拆卸地打开/关闭容器主体的敞开前部的盖，其中用于输送的机器人凸缘基本上 容器主体的顶部的中心部分，其中重心位置调节构件设置在容器主体的后部，例如在后壁上，侧壁后部，使得基底容器主体朝向 盖侧由重心位置调节构件调节。
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公开(公告)号：US08292081B2
公开(公告)日：2012-10-23
申请号：US12301123
申请日：2007-05-21
IPC分类号： B65D85/90
CPC分类号： H01L21/67376
摘要： A container includes: a container body for storing substrates of semiconductor wafers; a door element detachably fitted to an open front portion of the container body; and a compressively deformable gasket for sealing between the container body and the door element. While a sealing surface for the gasket is formed on an inner periphery of an open front portion of the container body so that the difference between the maximum and minimum of a flatness is less than 0.50 mm, a fitting portion for the gasket is formed in a frame shape. The gasket is formed of a base fitted to the fitting portion; a flexible sealing part extended from the base toward the sealing surface; and a contact portion that is curvedly formed at a distal end of the sealing part and put in press-contact with the sealing surface.
摘要翻译： 容器包括：用于存储半导体晶片的衬底的容器主体; 门元件，其可拆卸地装配到所述容器主体的敞开的前部; 以及用于在容器主体和门元件之间密封的可压缩变形的垫圈。 虽然用于垫圈的密封表面形成在容器主体的敞开的前部的内周上，使得平坦度的最大和最小之间的差小于0.50mm，但是垫圈的嵌合部分形成在 框架形状。 垫圈由安装在装配部上的底座形成; 柔性密封部件，从基部向密封面延伸; 以及在密封部的前端弯曲地形成并与密封面压接的接触部。
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