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41 条记录 (耗时 0.018 秒)

    Physical vapor deposition with phase shift
    5.
    发明授权
    Physical vapor deposition with phase shift 有权
    具有相移的物理气相沉积

    公开(公告)号：US08557088B2

    公开(公告)日：2013-10-15

    申请号：US12389241

    申请日：2009-02-19

    申请人： Youming Li ,  Jeffrey Birkmeyer ,  Takamichi Fujii ,  Takayuki Naono ,  Yoshikazu Hishinuma

    发明人： Youming Li ,  Jeffrey Birkmeyer ,  Takamichi Fujii ,  Takayuki Naono ,  Yoshikazu Hishinuma

    IPC分类号： C23C14/34

    CPC分类号： C23C14/345 ,  H01J37/3408 ,  H01J37/3438 ,  H01J37/3444

    摘要： A method of physical vapor deposition includes applying a first radio frequency signal having a first phase to a cathode in a physical vapor deposition apparatus, wherein the cathode includes a sputtering target, applying a second radio frequency signal having a second phase to a chuck in the physical vapor deposition apparatus, wherein the chuck supports a substrate, and wherein a difference between the first and second phases creates a positive self bias direct current voltage on the substrate, and depositing a material from the sputtering target onto the substrate.

    摘要翻译： 一种物理气相沉积方法包括在物理气相沉积设备中向阴极施加具有第一相的第一射频信号，其中所述阴极包括溅射靶，将具有第二相的第二射频信号施加到卡盘中的第二相位 物理气相沉积设备，其中所述卡盘支撑衬底，并且其中所述第一和第二相之间的差产生在所述衬底上的正自偏压直流电压，以及将材料从所述溅射靶沉积到所述衬底上。

    Piezoelectric Actuator, Method of Driving Same, Liquid Ejection Apparatus and Piezoelectric Ultrasonic Osicllator
    6.
    发明申请
    Piezoelectric Actuator, Method of Driving Same, Liquid Ejection Apparatus and Piezoelectric Ultrasonic Osicllator 有权
    压电致动器，驱动方法，液体喷射装置和压电超声波振荡器

    公开(公告)号：US20110074888A1

    公开(公告)日：2011-03-31

    申请号：US12892904

    申请日：2010-09-28

    申请人： Takamichi Fujii ,  Yoshikazu Hishinuma ,  Yoshinori Katoh ,  Takami Arakawa ,  Takayuki Naono

    发明人： Takamichi Fujii ,  Yoshikazu Hishinuma ,  Yoshinori Katoh ,  Takami Arakawa ,  Takayuki Naono

    IPC分类号： B41J2/045 ,  H01L41/09 ,  H01L41/18

    CPC分类号： H01L41/042 ,  B41J2/04581 ,  B41J2/04588 ,  H01L41/0973 ,  H01L41/1876

    摘要： A method of driving a piezoelectric actuator including: a piezoelectric element containing a piezoelectric body having coercive field points on a negative field side and a positive field side respectively and having asymmetrical bipolar polarization—electric field hysteresis characteristics in which an absolute value of a coercive electric field on the negative field side and a coercive electric field value on the positive field side are mutually different, and a pair of electrodes for applying voltage to the piezoelectric body; and a diaphragm which externally transmits, as displacement, distortion produced in the piezoelectric body when the voltage is applied to the piezoelectric body, includes the step of driving the piezoelectric actuator between a positive drive voltage and a negative drive voltage in a range not exceeding the coercive electric field, from among the positive and negative coercive electric fields, which has the larger absolute value.

    摘要翻译： 一种驱动压电致动器的方法，包括：压电元件，其包含分别具有负场侧和正场侧的矫顽场的压电体，并具有不对称双极偏振电场滞后特性，其中矫顽电绝对值 并且在正场侧的矫顽电场值相互不同，以及一对用于向压电体施加电压的电极; 以及当施加电压施加到压电体时，在外部透射作为位移的压电体产生的变形的振动膜包括在不超过压电体的范围内驱动压电致动器的正驱动电压和负驱动电压之间的步骤 矫顽电场中，绝对值较大的正，负矫顽电场。

    Piezoelectric device, process for producing the same, and liquid discharge device
    8.
    发明授权
    Piezoelectric device, process for producing the same, and liquid discharge device 有权
    压电元件及其制造方法以及液体排出装置

    公开(公告)号：US08733905B2

    公开(公告)日：2014-05-27

    申请号：US13347333

    申请日：2012-01-10

    申请人： Takamichi Fujii ,  Takayuki Naono ,  Yoshikazu Hishinuma

    发明人： Takamichi Fujii ,  Takayuki Naono ,  Yoshikazu Hishinuma

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0475 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/42

    摘要： A piezoelectric device includes a substrate; and a laminated film formed above the substrate. The laminated film includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in this order, and the lower electrode layer is a metal electrode layer containing as one or more main components one or more nonnoble metals and/or one or more nonnoble alloys. Preferably, the one or more main components are one or more of the metals Cr, W, Ti, Al, Fe, Mo, In, Sn, Ni, Cu, Co, and Ta, and alloys of the metals.

    摘要翻译： 压电装置包括基板; 以及形成在基板上方的层叠膜。 层叠膜包括依次形成的下电极层，压电层和上电极层，下电极层是含有作为一种或多种主要成分的一种或多种非金属和/或一种或多种非金属的金属电极层， 更多的nonnoble合金。 优选地，一种或多种主要组分是金属Cr，W，Ti，Al，Fe，Mo，In，Sn，Ni，Cu，Co和Ta中的一种或多种，​​以及金属的合金。