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公开(公告)号：USD335888S
公开(公告)日：1993-05-25
申请号：US621550
申请日：1990-12-03
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公开(公告)号：US5059793A
公开(公告)日：1991-10-22
申请号：US591457
申请日：1990-10-01
申请人： Hirofumi Miyamoto , Takao Okada , Tsugiko Takase , Shuzo Mishima , Hiroko Ota
发明人： Hirofumi Miyamoto , Takao Okada , Tsugiko Takase , Shuzo Mishima , Hiroko Ota
CPC分类号： G01Q60/16 , B82Y35/00 , Y10S977/851
摘要： A scanning tunneling microscope includes a piezoelectric driver expanding and contracting according to a voltage applied thereto to adjust the distance between a sample and a probe. A servo circuit outputs a servo voltage to control the expansion and contraction of the piezoelectric driver to keep a tunnel current flowing between the sample and the probe at a constant value. A correction voltage generating circuit generates a given correction voltage to correct a voltage to be applied to the piezoelectric driver. An adding circuit adds the servo voltage and the correction voltage together and supplies an added output to the piezoelectric driver. A control circuit controls the correction voltage according to the servo voltage to set the added output to a given reference voltage.
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公开(公告)号：US5296704A
公开(公告)日：1994-03-22
申请号：US821123
申请日：1992-01-14
申请人： Shuzo Mishima , Takao Okada , Tsugiko Takase , Hiroko Ota , Hirofumi Miyamoto
发明人： Shuzo Mishima , Takao Okada , Tsugiko Takase , Hiroko Ota , Hirofumi Miyamoto
IPC分类号： G01Q20/02 , G01B7/34 , G01B21/30 , G01N27/00 , G01N37/00 , G01Q10/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q60/16 , G01Q70/04 , H01J37/00
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/025 , G01Q30/08 , G01Q30/18 , Y10S977/869
摘要： A scanning tunneling microscope has an STM unit including a probe for scanning the surface of an object. The STM unit has at its outer peripheral surface a cylindrical enclosing member extending towards an object table. When the object is observed, the object table is elevated or the STM unit is lowered, so that the enclosing member is urged upon the table. The table and the STM unit constitute one body. As a result, relative movement between the object and the probe can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member isolates the object and the probe from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.
摘要翻译： 扫描隧道显微镜具有包括用于扫描物体表面的探针的STM单元。 STM单元在其外周表面具有朝向物台延伸的圆柱形封闭构件。 当观察对象时，对象表被升高或者STM单元被降低，使得封闭构件被推到桌子上。 表和STM单元构成一体。 结果，可以防止物体和探针之间的相对运动，并且还可以防止由振动引起的影响。 此外，封闭构件将物体和探针与外部空间隔离，由此屏蔽电噪声，磁噪声，声音噪声和空气流。 因此，可以降低由外部振动引起的影响，提高稳定性。
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公开(公告)号：US5083022A
公开(公告)日：1992-01-21
申请号：US589491
申请日：1990-09-27
申请人： Hirofumi Miyamoto , Tsugiko Takase , Takao Okada , Shuzo Mishima , Hiroko Ohta
发明人： Hirofumi Miyamoto , Tsugiko Takase , Takao Okada , Shuzo Mishima , Hiroko Ohta
IPC分类号： G01B7/34 , G01N27/00 , G01Q10/02 , G01Q20/02 , G01Q30/02 , G01Q60/10 , H01J37/28 , H01J37/00
CPC分类号： G01Q70/02 , B82Y35/00 , G01Q10/02 , G01Q30/025 , G01Q60/16 , B82Y20/00 , Y10S977/869
摘要： A scanning tunneling microscope includes an observation optical system for optically observing the surface of an object. The optical system is fixed on an optical system fixing member. The optical system is moved in a direction (Z-direction) vertical to the surface of the object by means of a motor, whereby the focal point of the optical system is adjusted. An STM measurement probe supported by an optically transparent member is disposed between the optical system and the object. When the object is optically observed, the probe is displaced from the focal point by means of a micrometer. Thus, an optical observation image of the surface of the object, which is not affected by the shadow of the probe, can be obtained. When the STM measurement is carried out, a probe unit enables the probe to scan the surface of the object, and an STM image is obtained by a conventional method.
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公开(公告)号：US5041783A
公开(公告)日：1991-08-20
申请号：US475169
申请日：1990-02-05
申请人： Hiroko Ohta , Tsugiko Takase , Shuzo Mishima , Hirofumi Miyamoto , Takao Okada
发明人： Hiroko Ohta , Tsugiko Takase , Shuzo Mishima , Hirofumi Miyamoto , Takao Okada
IPC分类号： G01B7/34 , G01N27/00 , G01N37/00 , G01Q30/02 , G01Q30/08 , G01Q60/10 , G01Q60/16 , G01Q60/38 , G01R31/00 , H01J37/00 , H01J37/28
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/025 , G01Q70/02 , Y10S977/861
摘要： A probe unit includes a disk-like substrate made of transparent material, a transparent electrode coated on all over the substrate, and a metal wire whose sharp tip is projected vertically and upwardly from the center of the substrate through the transparent electrode. The metal wire is made of Pt-Ir, which incudes a sharp tip projected from the upper surface of the substrate and a stem embedded in a hole of the electrode and fixed to the electrode and substrate by conductive adhesive.
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公开(公告)号：US5260824A
公开(公告)日：1993-11-09
申请号：US511054
申请日：1990-04-19
申请人： Takao Okada , Shuzo Mishima , Tsugiko Takase , Hirofumi Miyamoto , Hiroko Ohta , Yasushi Satoh , Yoshimitsu Enomoto , Toshiaki Matsuzawa , Yuzo Nakamura , Hiroshi Kajimura
发明人： Takao Okada , Shuzo Mishima , Tsugiko Takase , Hirofumi Miyamoto , Hiroko Ohta , Yasushi Satoh , Yoshimitsu Enomoto , Toshiaki Matsuzawa , Yuzo Nakamura , Hiroshi Kajimura
IPC分类号： G01B7/34 , G01B21/30 , G01L5/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q60/38 , G02B4/00 , G01B5/28 , G01N23/00
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , G01Q30/025 , Y10S977/87
摘要： An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.
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公开(公告)号：US5136162A
公开(公告)日：1992-08-04
申请号：US730475
申请日：1991-07-16
IPC分类号： G01B7/34 , G01N37/00 , G01Q30/18 , G01Q60/10 , G01Q70/08 , G05D3/12 , H01J37/252 , H01J37/26 , H01J37/28 , H01L41/09
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q10/04 , G01Q20/04 , Y10S977/86
摘要： A probe for scanning a sample is attached to a probe electrode supported by a cylindrical piezoelectric actuator. The actuator has four drive electrodes on its periphery, and deforms in the three axial directions in accordance with the voltage applied to the drive electrodes. A girdling electrode is provided between the actuator and the probe electrode. The girdling electrode is insulated from the probe electrode and the drive electrodes by insulator members provided on its upper and lower surfaces. A bias voltage signal S1 is input to an operational amplifier of which the output is connected to the girdling electrode. The amplifier is a voltage follower for equalizing the potential of the girdling electrode to that of the bias voltage signal S1. An operational amplifier has a non-inversion input to which the bias voltage signal S1 is input, and an inversion input connected to the probe electrode. While equalizing the potential of the probe electrode to that of the bias input voltage S1, the amplifier converts a tunnel current flowing between the probe and the sample to a voltage signal S2. An operational amplifier subtracts a bias voltage component from the voltage signal S2, and outputs a tunnel current signal S3.
摘要翻译： 用于扫描样品的探针连接到由圆柱形压电致动器支撑的探针电极。 致动器在其周围具有四个驱动电极，并且根据施加到驱动电极的电压在三个轴向方向上变形。 在致动器和探针电极之间提供环形电极。 环形电极通过设置在其上表面和下表面上的绝缘体与探针电极和驱动电极绝缘。 偏置电压信号S1输入到输出与环绕电极连接的运算放大器。 放大器是用于使环形电极的电位与偏置电压信号S1的电位相等的电压跟随器。 运算放大器具有输入偏置电压信号S1的非反相输入端和连接到探针电极的反相输入端。 在使探针电极的电位与偏置输入电压S1的电位相等的同时，放大器将在探头和样品之间流动的隧道电流转换为电压信号S2。 运算放大器从电压信号S2中减去偏置电压分量，并输出隧道电流信号S3。
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公开(公告)号：US5835251A
公开(公告)日：1998-11-10
申请号：US896644
申请日：1997-07-18
申请人： Akitoshi Toda , Shuichi Ito , Hirofumi Miyamoto , Akira Yagi
发明人： Akitoshi Toda , Shuichi Ito , Hirofumi Miyamoto , Akira Yagi
CPC分类号： G01Q70/04 , B82Y35/00 , G01B11/26 , G01Q10/04 , Y10S977/868 , Y10S977/87
摘要： A scanner system includes, a tube type piezoelectric scanner having a free end displaceable in X, Y and Z directions and supporting a sample at its free end, a driven for applying voltages to the scanner for displacing the sample an optical unit for optically detecting the X, Y and Z direction displacements of the free end and for outputting corresponding displacement signals, and a scan controller for computing correction signals based on the displacement signals so as to apply voltages which correct the voltage-displacement nonlinear characteristic of the scanner to the scanner and for supplying them to the driver.
摘要翻译： 扫描仪系统包括：管式压电扫描器，其具有在X，Y和Z方向上可移位的自由端，并且在其自由端支撑样品，被驱动以向扫描仪施加电压以使样本移位用于光学检测 自由端的X，Y和Z方向位移以及用于输出相应的位移信号;以及扫描控制器，用于基于位移信号计算校正信号，以便施加将扫描仪的电压位移非线性特性校正到扫描仪 并将其提供给司机。
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公开(公告)号：US5526165A
公开(公告)日：1996-06-11
申请号：US386225
申请日：1995-02-09
申请人： Akitoshi Toda , Shuichi Ito , Hirofumi Miyamoto , Akira Yagi
发明人： Akitoshi Toda , Shuichi Ito , Hirofumi Miyamoto , Akira Yagi
CPC分类号： G01Q70/04 , B82Y35/00 , G01B11/26 , G01Q10/04 , Y10S977/868 , Y10S977/87
摘要： A scanner system includes, a tube type piezoelectric scanner having a free end displaceable in X, Y and Z directions and supporting a sample at its free end, a driver for applying voltages to the scanner for displacing the sample, an optical unit for optically detecting the X, Y and Z direction displacements of the free end and for outputting corresponding displacement signals, and a scan controller for computing correction signals based on the displacement signals so as to apply voltages which correct the voltage-displacement nonlinear characteristic of the scanner to the scanner and for supplying them to the driver.
摘要翻译： 一种扫描仪系统，包括：管型压电扫描器，其具有在X，Y和Z方向上可移位的自由端，并且在其自由端支撑样品;驱动器，用于向扫描仪施加电压以移动样品;光学单元，用于光学检测 自由端的X，Y和Z方向位移以及用于输出相应的位移信号;以及扫描控制器，用于基于位移信号计算校正信号，以便施加将扫描仪的电压位移非线性特性校正到 扫描仪，并将其提供给司机。
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公开(公告)号：US5336887A
公开(公告)日：1994-08-09
申请号：US975598
申请日：1992-11-12
申请人： Akira Yagi , Hirofumi Miyamoto
发明人： Akira Yagi , Hirofumi Miyamoto
CPC分类号： G01Q60/30 , B82Y35/00 , G01Q10/065 , Y10S977/837 , Y10S977/849 , Y10S977/851 , Y10S977/86 , Y10S977/869 , Y10S977/871 , Y10S977/873
摘要： A sample is mounted on a piezoelectric actuator and a cantilever provided with a probe is located thereabove. A bias voltage applying circuit supplies the sample with a potential difference V.sub.T and sends out a current signal I.sub.T representing the electric current flowing between the sample and the probe to a current detecting circuit. The current signal is converted into logI.sub.T in a logarithmic amplifier and given to a differential amplifier. A displacement detecting circuit is arranged above the cantilever for detecting the displacement of the free end of the cantilever due to the atomic force appearing between the sample and the probe and for sending a displacement signal Z.sub.TIP representing the displacement to another differential amplifier. The signals from the differential amplifiers are respectively fed to terminals of an analog switch. The analog switch selects a signal to be fed to a control circuit, which control circuit generates and transmits a signal V.sub.Z as a function of the signal it receives, thereby controlling the actuator.
摘要翻译： 样品安装在压电致动器上，并且设有探头的悬臂位于其上方。 偏置电压施加电路向样本提供电位差VT，并将表示在样品和探针之间的电流的电流信号IT发送到电流检测电路。 将当前信号转换成对数放大器中的logIT并给出差分放大器。 位移检测电路布置在悬臂上方，用于由于样品和探头之间出现的原子力而检测悬臂自由端的位移，并将代表位移的位移信号ZTIP发送到另一个差分放大器。 来自差分放大器的信号分别馈送到模拟开关的端子。 模拟开关选择要馈送到控制电路的信号，该控制电路产生并发送作为其接收的信号的函数的信号VZ，从而控制致动器。
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