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公开(公告)号：US08268209B2
公开(公告)日：2012-09-18
申请号：US11623776
申请日：2007-01-17
申请人： Masahiko Ogino , Akihiro Miyauchi , Takashi Ando , Chiseki Haginoya , Susumu Komoriya , Yasunari Sohda , Souichi Katagiri , Hiroya Ohta , Yoshinori Nakayama
发明人： Masahiko Ogino , Akihiro Miyauchi , Takashi Ando , Chiseki Haginoya , Susumu Komoriya , Yasunari Sohda , Souichi Katagiri , Hiroya Ohta , Yoshinori Nakayama
IPC分类号： H01L23/544
CPC分类号： H01L21/76838 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/7076 , G11B5/855 , H01L23/544 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： In a mold in which a pattern is formed of a fine concavo-convex shape, two or more of alignment marks for determining a relative positional relation between a substrate and a mold are formed concentrically. Moreover, a damaged mark is identified from the positional information and shape of the respective marks, and an alignment between the mold and the substrate to which a resin film is applied is carried out excluding the damaged mark.
摘要翻译： 在图案形成为微细凹凸形状的模具中，同心地形成用于确定基板和模具之间的相对位置关系的两个或更多个对准标记。 此外，根据各个标记的位置信息和形状来识别损坏的标记，并且除了损坏的标记之外，执行模具和施加了树脂膜的基板之间的对准。
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公开(公告)号：US20060286193A1
公开(公告)日：2006-12-21
申请号：US11438336
申请日：2006-05-23
IPC分类号： B28B11/08
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F9/703 , G03F9/7088
摘要： In an imprint device and a microstructure transfer method, a fluid is ejected at the back of at least either a stamper or a transfer target body during pressurization of the stamper and the transfer target body. The fluid is ejected through plural holes formed in a stage disposed at the back of at least either the stamper or the transfer target body. The plural holes are connected to independent pressure regulating mechanisms, which can individually control the amount of fluid ejection, the timing of start of ejection, and so on. When the stamper is peeled from the transfer target body, the plural holes are evacuated to fix the stamper or the transfer target body to the stage by suction so as to peel the stamper. The present invention enables to apply uniform pressure to the stamper against the surface of the target substrate, to control the in-plane pressure distribution according to the surface profile or external appearance of the stamper or the target substrate, and to peel the stamper from the target substrate immediately after pressurization.
摘要翻译： 在压印装置和微结构转印方法中，在压模和转印体的加压期间，在至少压模或转印体的至少一个的背面喷射流体。 流体通过形成在设置在压模或转印体中的至少一个的背面的台中的多个孔喷出。 多个孔连接到独立的压力调节机构，其可以单独控制流体喷射的量，喷射开始的时间等。 当压模从转印体上剥离时，将多个孔抽真空，通过抽吸将压模或转印目标体固定在平台上，从而剥离压模。 本发明能够对压模施加均匀的压力以抵抗目标基板的表面，以根据压模或目标基板的表面轮廓或外观来控制平面内的压力分布，并且将压模从 加压后立即进行目标基材。
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公开(公告)号：US20070164458A1
公开(公告)日：2007-07-19
申请号：US11623776
申请日：2007-01-17
申请人： Masahiko Ogino , Akihiro Miyauchi , Takashi Ando , Chiseki Haginoya , Susumu Komoriya , Yasunari Sohda , Souichi Katagiri , Hiroya Ohta , Yoshinori Nakayama
发明人： Masahiko Ogino , Akihiro Miyauchi , Takashi Ando , Chiseki Haginoya , Susumu Komoriya , Yasunari Sohda , Souichi Katagiri , Hiroya Ohta , Yoshinori Nakayama
IPC分类号： H01L23/544 , H01L21/47
CPC分类号： H01L21/76838 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/7076 , G11B5/855 , H01L23/544 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： In a mold in which a pattern is formed of a fine concavo-convex shape, two or more of alignment marks for determining a relative positional relation between a substrate and a mold are formed concentrically. Moreover, a damaged mark is identified from the positional information and shape of the respective marks, and an alignment between the mold and the substrate to which a resin film is applied is carried out excluding the damaged mark.
摘要翻译： 在图案形成为微细凹凸形状的模具中，同心地形成用于确定基板和模具之间的相对位置关系的两个或更多个对准标记。 此外，根据各个标记的位置信息和形状来识别损坏的标记，并且除了损坏的标记之外，执行模具和施加了树脂膜的基板之间的对准。
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公开(公告)号：US08133418B2
公开(公告)日：2012-03-13
申请号：US11833284
申请日：2007-08-03
IPC分类号： B29C45/76
CPC分类号： G11B7/263 , B29C33/303 , B29C43/003 , B29C43/021 , B29C43/58 , B29C2043/025 , B29C2043/043 , B29C2043/3602 , B29C2043/3634 , B29C2043/5833 , B29L2011/0075 , B29L2017/005 , B29L2031/756
摘要： In order to allow for aligning a relative position between a transferred object and a stamper with high accuracy without providing an alignment pattern in the transferred object, there are provided: a pattern transfer method, including: when adjusting the relative position between the stamper and the transferred object, a step of detecting at least two or more edge positions of the transferred object and calculating an arbitrary point from the detected edge positions; a step of detecting a position of the stamper from an edge of the stamper or an alignment mark formed in the stamper; and a step of adjusting the relative position between the transferred object and the stamper from the arbitrary point and the position of the stamper; and an imprint device using the same.
摘要翻译： 为了允许高精度地对准被转印物体与压模之间的相对位置，而不在被转移物体中提供对准图案，提供了一种图案转印方法，包括：当调节压模和 检测被转移对象的至少两个以上边缘位置的步骤，并从检测到的边缘位置计算任意点; 从压模的边缘或形成在压模中的对准标记检测压模的位置的步骤; 以及从任意点和压模的位置调整被转印物体与压模之间的相对位置的步骤; 以及使用其的压印装置。
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公开(公告)号：US20120074615A1
公开(公告)日：2012-03-29
申请号：US13312189
申请日：2011-12-06
IPC分类号： B29C59/02
CPC分类号： B29C43/021 , B29C43/003 , B29C43/58 , B29C2043/025 , B29C2043/3634 , B29C2043/5808 , B29L2011/0016 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： There is provided an imprint device for transferring a fine pattern to a material to form a patterned material. The device comprises a stamper having the fine pattern thereon, and a pressure distribution mechanism. The stamper is pressed against the material, and the pressure distribution mechanism provides a nonuniform pressure distribution in a patterned region of the patterned material, while the stamper is in contact with the material. There are provided an imprint device and a microstructure transfer method, by which it is possible to sufficiently spread a resin or other material for forming a pattern layer between a stamper and a patterned material with a lower pressure so as not to damage the stamper or the patterned material, and to form a pattern formation layer having the uniform thickness on the patterned material.
摘要翻译： 提供了用于将精细图案转印到材料以形成图案化材料的压印装置。 该装置包括其上具有精细图案的压模和压力分布机构。 压模被压在材料上，并且压力分配机构在图案化材料的图案化区域中提供不均匀的压力分布，同时压模与材料接触。 提供了压印装置和微结构转印方法，通过该方法可以在压模和图案化材料之间以较低的压力充分地铺展树脂或其它材料以形成图案层，以便不损坏压模或 并且在图案化材料上形成具有均匀厚度的图案形成层。
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公开(公告)号：US08109751B2
公开(公告)日：2012-02-07
申请号：US11774244
申请日：2007-07-06
IPC分类号： B28B11/08
CPC分类号： B29C43/021 , B29C43/003 , B29C43/58 , B29C2043/025 , B29C2043/3634 , B29C2043/5808 , B29L2011/0016 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： There is provided an imprint device for transferring a fine pattern to a material to form a patterned material. The device comprises a stamper having the fine pattern thereon, and a pressure distribution mechanism. The stamper is pressed against the material, and the pressure distribution mechanism provides a nonuniform pressure distribution in a patterned region of the patterned material, while the stamper is in contact with the material. There are provided an imprint device and a microstructure transfer method, by which it is possible to sufficiently spread a resin or other material for forming a pattern layer between a stamper and a patterned material with a lower pressure so as not to damage the stamper or the patterned material, and to form a pattern formation layer having the uniform thickness on the patterned material.
摘要翻译： 提供了用于将精细图案转印到材料以形成图案化材料的压印装置。 该装置包括其上具有精细图案的压模和压力分布机构。 压模被压在材料上，并且压力分配机构在图案化材料的图案化区域中提供不均匀的压力分布，同时压模与材料接触。 提供了压印装置和微结构转印方法，通过该方法可以在压模和图案化材料之间以较低压力充分地铺展树脂或其它材料以形成图案层，以便不损坏压模或 并且在图案化材料上形成具有均匀厚度的图案形成层。
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公开(公告)号：US20080028953A1
公开(公告)日：2008-02-07
申请号：US11833284
申请日：2007-08-03
CPC分类号： G11B7/263 , B29C33/303 , B29C43/003 , B29C43/021 , B29C43/58 , B29C2043/025 , B29C2043/043 , B29C2043/3602 , B29C2043/3634 , B29C2043/5833 , B29L2011/0075 , B29L2017/005 , B29L2031/756
摘要： In order to allow for aligning a relative position between a transferred object and a stamper with high accuracy without providing an alignment pattern in the transferred object, there are provided: a pattern transfer method, including: when adjusting the relative position between the stamper and the transferred object, a step of detecting at least two or more edge positions of the transferred object and calculating an arbitrary point from the detected edge positions; a step of detecting a position of the stamper from an edge of the stamper or an alignment mark formed in the stamper; and a step of adjusting the relative position between the transferred object and the stamper from the arbitrary point and the position of the stamper; and an imprint device using the same.
摘要翻译： 为了允许高精度地对准被转印物体与压模之间的相对位置，而不在被转移物体中提供对准图案，提供了一种图案转印方法，包括：当调节压模与 检测被转移对象的至少两个以上边缘位置的步骤，并从检测到的边缘位置计算任意点; 从压模的边缘或形成在压模中的对准标记检测压模的位置的步骤; 以及从任意点和压模的位置调整被转印物体与压模之间的相对位置的步骤; 以及使用其的压印装置。
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公开(公告)号：US08491291B2
公开(公告)日：2013-07-23
申请号：US13366792
申请日：2012-02-06
IPC分类号： B29C59/16
CPC分类号： G11B7/263 , B29C33/303 , B29C43/003 , B29C43/021 , B29C43/58 , B29C2043/025 , B29C2043/043 , B29C2043/3602 , B29C2043/3634 , B29C2043/5833 , B29L2011/0075 , B29L2017/005 , B29L2031/756
摘要： In order to allow for aligning a relative position between a transferred object and a stamper with high accuracy without providing an alignment pattern in the transferred object, there are provided: a pattern transfer method, including: when adjusting the relative position between the stamper and the transferred object, a step of detecting at least two or more edge positions of the transferred object and calculating an arbitrary point from the detected edge positions; a step of detecting a position of the stamper from an edge of the stamper or an alignment mark formed in the stamper; and a step of adjusting the relative position between the transferred object and the stamper from the arbitrary point and the position of the stamper; and an imprint device using the same.
摘要翻译： 为了允许高精度地对准被转印物体与压模之间的相对位置，而不在被转移物体中提供对准图案，提供了一种图案转印方法，包括：当调节压模和 检测被转移物体的至少两个以上边缘位置的步骤，并从检测到的边缘位置计算任意点; 从压模的边缘或形成在压模中的对准标记检测压模的位置的步骤; 以及从任意点和压模的位置调整被转印物体与压模之间的相对位置的步骤; 以及使用其的压印装置。
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公开(公告)号：US07998605B2
公开(公告)日：2011-08-16
申请号：US11522204
申请日：2006-09-15
申请人： Chiseki Haginoya , Takashi Ando , Masahiko Ogino
发明人： Chiseki Haginoya , Takashi Ando , Masahiko Ogino
IPC分类号： G11B5/66
CPC分类号： G11B5/7325 , G11B5/8404 , G11B5/855
摘要： Embodiments of the invention provide ways to manufacture an inexpensive high-density magnetic recording medium. A high-density magnetic recording medium is composed of a flat substrate, a nonmagnetic intermediary body having a periodic recessed-relieved structure, and a magnetic film formed on the intermediary body.
摘要翻译： 本发明的实施例提供了制造便宜的高密度磁记录介质的方法。 高密度磁记录介质由平面基板，具有周期性凹陷释放结构的非磁性中间体和形成在中间体上的磁性膜构成。
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公开(公告)号：US20070072013A1
公开(公告)日：2007-03-29
申请号：US11522204
申请日：2006-09-15
申请人： Chiseki Haginoya , Takashi Ando , Masahiko Ogino
发明人： Chiseki Haginoya , Takashi Ando , Masahiko Ogino
CPC分类号： G11B5/7325 , G11B5/8404 , G11B5/855
摘要： Embodiments of the invention provide ways to manufacture an inexpensive high-density magnetic recording medium. A high-density magnetic recording medium is composed of a flat substrate, a nonmagnetic intermediary body having a periodic recessed-relieved structure, and a magnetic film formed on the intermediary body.
摘要翻译： 本发明的实施例提供了制造便宜的高密度磁记录介质的方法。 高密度磁记录介质由平面基板，具有周期性凹陷释放结构的非磁性中间体和形成在中间体上的磁性膜构成。
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