Method and apparatus for vacuum deposition plating
    2.
    发明授权
    Method and apparatus for vacuum deposition plating 失效
    真空沉积电镀方法和装置

    公开(公告)号:US4674443A

    公开(公告)日:1987-06-23

    申请号:US855793

    申请日:1986-04-24

    IPC分类号: C21D9/56 C23C14/56 C23C13/08

    摘要: A vacuum deposition plating apparatus having an inlet-side vacuum sealing device provided in front of a vacuum deposition plating chamber, an inlet-side inactive gas replacement chamber provided between the inlet-side vacuum sealing device and an annealing furnace, an outlet-side vacuum sealing device provided in the rear of the vacuum deposition plating chamber, an outlet-side inactive gas replacement chamber provided between the outlet-side vacuum sealing device and the atmosphere, and an inactive gas circulating/purifying device for circulating an inactive gas from vacuum chambers of both the vacuum sealing devices to atmospheric pressure chambers of both the vacuum sealing devices and for removing water, oil and oxygen from the inactive gas; a pressure gauge provided on the annealing furnace; a pressure gauge, a control valve, an automatic valve, a hydrogen concentration detector and a discharge valve provided on the inlet-side inactive gas replacement chamber; a pressure gauge and an automatic valve provided on the outlet-side inactive gas replacement chamber; and an automatic valve connecting to an inactive gas tank for emergency provided on the atmospheric pressure chambers of both the vacuum sealing devices.

    摘要翻译: 一种真空沉积电镀装置,其具有设置在真空沉积电镀室前面的入口侧真空密封装置,设置在入口侧真空密封装置和退火炉之间的入口侧非活性气体置换室,出口侧真空 密封装置,设置在真空沉积电镀室的后部,设置在出口侧真空密封装置和大气之间的出口侧非活性气体置换室,以及用于使来自真空室的惰性气体循环的惰性气体循环/净化装置 两个真空密封装置与两个真空密封装置的大气压室和从惰性气体中除去水,油和氧的两个; 设置在退火炉上的压力计; 压力计,控制阀,自动阀,氢浓度检测器和设置在入口侧非活性气体置换室上的排出阀; 设置在出口侧非活性气体置换室上的压力计和自动阀; 以及连接到两个真空密封装置的大气压室上的用于紧急的惰性气体罐的自动阀。

    Vacuum evaporation coating equipment
    6.
    发明授权
    Vacuum evaporation coating equipment 失效
    真空蒸镀设备

    公开(公告)号:US4649860A

    公开(公告)日:1987-03-17

    申请号:US713743

    申请日:1985-03-19

    IPC分类号: C23C14/26 C23C14/56 C23C13/08

    CPC分类号: C23C14/562

    摘要: A vacuum evaporation equipment for continuous vacuum evaporation of a metal onto a band or strip of product including at least one vacuum sealing station, provision of ducts that are disposed surrounding the band product and extending from the point of vapor deposition where the band product is subjected to a vacuum evaporation process an a chamber held at a reduced pressure or vacuum state to the extent that substantially no reevaporation of once deposited metal is effectively prevented from occurring. The ducts are adapted to be heated to a temperature substantially higher than the temperature of the steel band product. In addition, there is provided at least one vacuum sealing station with rolls rotatably mounted in the interior of a casing and a complementary sealing bar mounted in a complementary engagement relationship with the rolls having a close gap therebetween. A side panel is mounted self-adjustably in sliding motion in the longitudinal direction along the axes of the rolls on the opposite ends thereof, and heaters are provided to heat the rolls, sealing bar and side panel, respectively.

    摘要翻译: 一种用于将金属连续真空蒸发到包括至少一个真空密封站的产品带或条带上的真空蒸发设备,提供围绕带产品设置并从带状产品所受到的气相沉积点延伸的管道 在真空蒸发过程中,保持在减压或真空状态的室被有效地防止发生一次沉积的金属的基本上不再蒸发。 管道适于被加热到显着高于钢带产品的温度的温度。 此外,提供了至少一个具有可旋转地安装在壳体内部的辊的真空密封站和与辊之间具有紧密间隙的互补啮合关系安装的互补密封条。 侧板在其相对端沿辊的轴线沿纵向方向自由调节地安装,并且分别设置加热器以加热辊,密封条和侧板。