公开(公告)号：US20090242757A1

公开(公告)日：2009-10-01

申请号：US12310149

申请日：2007-08-03

申请人： Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

发明人： Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

IPC分类号： G01N23/00 ,  H01J3/14

CPC分类号： H01J37/09 ,  H01J37/15 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/024 ,  H01J2237/0458

摘要： There are provided a charged particle beam apparatus and a method of adjusting an axis of an aperture capable of adjusting a position of a center axis of the aperture easily and accurately in a short period of time.A charged particle beam apparatus 1 includes a charged particle source 9, an aperture 18, an object lens 12, observing means 32, an aperture driving portion 19, and a control portion 30. The control portion 30 includes spot pattern forming means 33 for forming a plurality of spot patterns on a surface N1 of a sample N by irradiating a charged particle beam I, analyzing means for calculating a position of a spot center of the spot pattern and a geometrical center position of a halo, and adjusting position determining means 35 for calculating an adjusting position based on a position of intersecting lines of connecting the positions of the spot centers of the respective spot patterns and the center position of the halo, in which a position of the aperture 18 is adjusted by moving the center axis of the aperture 18 to the adjusting position.

摘要翻译： 提供了一种带电粒子束装置和一种在短时间内容易且准确地调整能够调节孔径的中心轴的位置的孔的轴线的方法。 带电粒子束装置1包括带电粒子源9，孔18，物镜12，观察装置32，孔径驱动部分19和控制部分30.控制部分30包括用于形成的斑点图案形成装置33 通过照射带电粒子束I的样品N的表面N1上的多个斑点图案，用于计算斑点图案的斑点中心的位置和光晕的几何中心位置的分析装置，以及调节位置确定装置35 用于基于连接各个斑点图案的光点中心的位置和光晕的中心位置的相交线的位置来计算调节位置，其中通过移动光圈的中心轴来调节光圈18的位置 孔18到调节位置。

公开(公告)号：US08698105B2

公开(公告)日：2014-04-15

申请号：US12449633

申请日：2008-02-04

申请人： Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

发明人： Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

IPC分类号： G21G5/00

CPC分类号： H01J37/28 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/216

摘要： A charged particle beam apparatus which is able to adjust charged particle optics easily in a short time with a high degree of accuracy and a method of adjusting charged particle optics are provided. A charged particle beam apparatus 1 includes a charged particle source 9, charged particle optics 12, 16 configured to set the ion beam I to a bean characteristic value corresponding to an input value to cause a sample to be irradiated therewith, scanning means 17 configured to be able to move the irradiation point of the charged particle beam I relatively with each other, observing means 32 being capable of obtaining an image, and a control unit 30, and the control unit 30 includes spot pattern forming means 33 configured to set the input value to different values and cause the sample to be irradiated with the charged particle beam I by a plurality of times at different positions to form a plurality of spot patterns and spot pattern analyzing means 34 configured to select a spot pattern having a smallest characteristic value, and sets the input values of the charged particle optics 12, 16 to a value equal to the input value corresponding to the selected spot pattern.

摘要翻译： 提供一种能够以高精度容易地在短时间内调节带电粒子光学的带电粒子束装置和调节带电粒子光学的方法。 带电粒子束装置1包括带电粒子源9，带电粒子光学器件12,16，被配置为将离子束I设置为对应于输入值的豆特征值以使样品照射;扫描装置17，被配置为 能够相对地移动带电粒子束I的照射点，观察装置32能够获得图像，以及控制单元30，并且控制单元30包括斑点图案形成装置33，其被配置为设置输入 值到不同的值，并且使得样品在不同位置被多次照射带电粒子束I以形成多个斑点图案和​​斑点图案分析装置34，其被配置为选择具有最小特征值的斑点图案， 并将带电粒子光学器件12,16的输入值设置为等于对应于所选择的斑点图案的输入值的值。

公开(公告)号：US08124932B2

公开(公告)日：2012-02-28

申请号：US12310149

申请日：2007-08-03

申请人： Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

发明人： Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

IPC分类号： G01N23/00

CPC分类号： H01J37/09 ,  H01J37/15 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/024 ,  H01J2237/0458

摘要： A charged particle beam apparatus includes a charged particle source, an aperture, an object lens, an observing unit, an aperture driving portion, and a control portion. The control portion includes a spot pattern forming portion that forms a plurality of spot patterns on a surface of a sample by irradiating a charged particle beam, an analyzing portion that calculates a position of a spot center of the spot pattern and a geometrical center position of a halo, and an adjusting position determining portion that calculates an adjusting position based on a position of intersecting lines connecting the positions of the spot centers of the respective spot patterns and the center position of the halo. In this manner, the position of the aperture can be easily and accurately adjusted in a short period of time by moving the center axis of the aperture to the adjusting position.

摘要翻译： 带电粒子束装置包括带电粒子源，孔径，物镜，观察单元，孔径驱动部分和控制部分。 控制部分包括通过照射带电粒子束在样品的表面上形成多个斑点图案的斑点图形形成部分，计算斑点图案的斑点中心的位置和几何中心位置的分析部分 光圈和调整位置确定部分，其基于连接各个光点图案的光点中心的位置和光晕的中心位置的交叉线的位置来计算调整位置。 以这种方式，通过将孔的中心轴线移动到调节位置，可以在短时间内容易且精确地调节孔径的位置。

公开(公告)号：US20100116984A1

公开(公告)日：2010-05-13

申请号：US12449633

申请日：2008-02-04

申请人： Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

发明人： Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

IPC分类号： G21K1/00 ,  G01N23/00

CPC分类号： H01J37/28 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/216

摘要： A charged particle beam apparatus which is able to adjust charged particle optics easily in a short time with a high degree of accuracy and a method of adjusting charged particle optics are provided. A charged particle beam apparatus 1 includes a charged particle source 9, charged particle optics 12, 16 configured to set the ion beam I to a bean characteristic value corresponding to an input value to cause a sample to be irradiated therewith, scanning means 17 configured to be able to move the irradiation point of the charged particle beam I relatively with each other, observing means 32 being capable of obtaining an image, and a control unit 30, and the control unit 30 includes spot pattern forming means 33 configured to set the input value to different values and cause the sample to be irradiated with the charged particle beam I by a plurality of times at different positions to form a plurality of spot patterns and spot pattern analyzing means 34 configured to select a spot pattern having a smallest characteristic value, and sets the input values of the charged particle optics 12, 16 to a value equal to the input value corresponding to the selected spot pattern.

摘要翻译： 提供一种能够以高精度容易地在短时间内调节带电粒子光学的带电粒子束装置和调节带电粒子光学的方法。 带电粒子束装置1包括带电粒子源9，带电粒子光学器件12,16，被配置为将离子束I设置为对应于输入值的豆特征值以使样品照射;扫描装置17，被配置为 能够相对地移动带电粒子束I的照射点，观察装置32能够获得图像，以及控制单元30，并且控制单元30包括斑点图案形成装置33，其被配置为设置输入 值到不同的值，并且使得样品在不同位置被多次照射带电粒子束I以形成多个斑点图案和​​斑点图案分析装置34，其被配置为选择具有最小特征值的斑点图案， 并将带电粒子光学器件12,16的输入值设置为等于对应于所选择的斑点图案的输入值的值。

公开(公告)号：US06698469B2

公开(公告)日：2004-03-02

申请号：US10180497

申请日：2002-06-27

申请人： Yutaka Sakamoto ,  Tsuneo Kano ,  Takashi Ogawa ,  Hiroshi Matsumura ,  Toshiaki Sango ,  Kiyoto Itoh ,  Norio Otake

发明人： Yutaka Sakamoto ,  Tsuneo Kano ,  Takashi Ogawa ,  Hiroshi Matsumura ,  Toshiaki Sango ,  Kiyoto Itoh ,  Norio Otake

IPC分类号： F17C1300

CPC分类号： F17C13/04 ,  F17C2205/0323 ,  F17C2205/0332 ,  F17C2223/0123 ,  F17C2227/044 ,  F17C2270/0518

摘要： A cylinder containing gas has a valve and is connected to a delivery side through a filling pipe, a primary pipe, a first air-operated valve, a pressure reducing valve, a secondary pipe, and a second air-operated valve. Inert gas flows into the primary pipe through an air-operated valve. The primary pipe is connected to a vacuum generator through an air-operated valve and a pipe. Gas remaining in the primary pipe is purged as exhaust gas by automatically repeating leaving-pipe-in-pressurized-state purge for pressurizing the inside of the primary pipe by the inert gas and leaving the pipe in this state for 2 to 10 minutes and evacuating the pipe for 20 seconds. Gas remaining in the primary pipe is purged with high-efficiency, and the vacuum generator is stopped while the inside of the primary pipe is pressurized in the leaving-pipe-in-pressurized-state purge and the just-before-replacement purge.

摘要翻译： 含气体的气体具有阀，并且通过填充管，主管，第一气动阀，减压阀，副管和第二气动阀连接到输送侧。 惰性气体通过气动阀流入主管道。 主管通过气动阀和管连接到真空发生器。 主管中残留的气体通过自动重复离开管加压状态吹扫而被排出，通过惰性气体对主管内部进行加压，并在该状态下离开管道2至10分钟并排空 管道20秒。 在主管中剩余的气体被高效率地清除，并且在加压状态的排气管和刚刚更换前的吹扫中，主管内部被加压，真空发生器停止。

公开(公告)号：US20140201998A1

公开(公告)日：2014-07-24

申请号：US13996743

申请日：2012-09-11

申请人： Shirou Yamashita ,  Hironori Kitashima ,  Tadashi Endo ,  Hiroshi Matsumura ,  Mie Morishima

发明人： Shirou Yamashita ,  Hironori Kitashima ,  Tadashi Endo ,  Hiroshi Matsumura ,  Mie Morishima

IPC分类号： H05K13/00

CPC分类号： H05K13/0015 ,  H05K13/0061 ,  Y10T29/49169

摘要： A pre-array temporary placement area A2 and a post-return temporary placement area A3 are set along with a lower receiving area A1. Temporary placement positions TP for lower receiving pins 22 in the pre-array temporary placement area A2 and the post-return temporary placement area A3 are previously assigned in consideration of requirements for preventing occurrence of interference between the lower receiving pins 22, which would otherwise occur during transfer of the lower receiving pins 22, and in accordance with array positions AP of the lower receiving pins 22 in the lower receiving area A1. Further, a transfer sequence is set in accordance with array positions AP.

摘要翻译： 预排列临时放置区域A2和返回后临时放置区域A3与下容纳区域A1一起设置。 在预排列临时放置区域A2和返回后临时放置区域A3中的下接收销22的临时放置位置TP考虑到防止下接收销22之间的干扰的要求而被预先分配，否则将发生 在下接收销22的传送期间，并且根据下接收引脚22在下接收区域A1中的阵列位置AP。 此外，根据阵列位置AP设定传送序列。

公开(公告)号：US07506434B2

公开(公告)日：2009-03-24

申请号：US10863403

申请日：2004-06-08

申请人： Hideki Sumi ,  Hiroshi Matsumura

发明人： Hideki Sumi ,  Hiroshi Matsumura

IPC分类号： H05K3/30

CPC分类号： H05K13/0417 ,  H05K13/022 ,  Y10T29/4913 ,  Y10T29/53174 ,  Y10T29/53178

摘要： An electronic parts mounting apparatus and an electronic parts mounting method for picking up a plurality of electronic parts simultaneously by a transfer head having a plurality of suction nozzles from a plurality of tape feeders and then mounting the electronic parts on a substrate are provided. Displacement amounts of parts stop positions in respective tape feeders are detected in advance and stored as stop position correction data, and then tape feeding mechanisms are controlled based on the stop position correction data upon picking up the parts by the transfer head to execute such a registration that causes the parts stop positions to coincide with parts suction positions of the suction nozzles in the transfer head.

摘要翻译： 提供一种电子部件安装装置和电子部件安装方法，用于通过具有多个吸嘴的多个吸嘴的传送头同时拾取多个电子部件，然后将电子部件安装在基板上。 预先检测各个带式送料机中的零件停止位置的位移量并作为停止位置校正数据存储，然后在由转印头拾取零件时基于停止位置校正数据来控制带进给机构，以执行这种注册 这导致部件停止位置与转印头中的吸嘴的部件吸入位置一致。

公开(公告)号：US4730649A

公开(公告)日：1988-03-15

申请号：US906010

申请日：1986-09-11

申请人： Hiroshi Matsumura ,  Siro Masai ,  Noboru Oguma ,  Haruhisa Yamada

发明人： Hiroshi Matsumura ,  Siro Masai ,  Noboru Oguma ,  Haruhisa Yamada

IPC分类号： B67D7/00 ,  B67D7/46 ,  G01F23/292 ,  B65B3/36

CPC分类号： B67D7/465 ,  G01F23/2921 ,  G01F23/2928

摘要： A liquid delivery nozzle to be used in gasoline stations comprising two pairs of light sensor in which the first pair arranged at the tip end of the nozzle is of reflection type and the second pair arranged a little higher up from said first pair is of usual contact type, for more relevantly coping with full tank delivery. The sensors are mounted in a casing which is to be mounted on the nozzle inner wall surface near the tip end. In order to prevent leads extending through said nozzle and a hose connected therewith for angular movement from being damaged due to such angular movement, a flexible sheet on which leads are printed or embedded, has a part wound to form several spiral turns. The sheet is arranged in the portion where angular movement occurs to cope with such movement by loosening or tightening of the spiral turns.

摘要翻译： 用于加油站的液体输送喷嘴，包括两对光传感器，其中布置在喷嘴前端的第一对是反射型的，并且从所述第一对布置得高一点的第二对是通常的接触 类型，以更有效地应付满罐的运送。 传感器安装在要安装在靠近末端的喷嘴内壁表面上的壳体中。 为了防止延伸穿过所述喷嘴的引线和与其连接的角度运动的软管由于这种角度运动而被损坏，在其上印刷或嵌入导线的柔性片具有部分卷绕以形成几个螺旋形卷曲。 片材布置在发生角运动的部分中，以通过松动或拧紧螺旋线圈来应对这种运动。

公开(公告)号：US4533750A

公开(公告)日：1985-08-06

申请号：US169808

申请日：1980-07-17

申请人： Hiroshi Matsumura ,  Masato Otani ,  Fumiki Murakami

发明人： Hiroshi Matsumura ,  Masato Otani ,  Fumiki Murakami

IPC分类号： C07C51/00 ,  C07C51/48 ,  C07C57/055 ,  C07C57/07 ,  C07C67/00 ,  C07C57/05

CPC分类号： C07C51/48

摘要： A process for isolating methacrylic acid by solvent extraction from an aqueous methacrylic acid solution obtained from a gas phase catalytic oxidation reaction, characterized in that the aqueous methacrylic acid solution is previously first contacted with an extraction solvent, polymers precipitated out from the aqueous methacrylic acid solution are removed and the remainder is fed into an extraction column.

摘要翻译： 通过从气相催化氧化反应获得的甲基丙烯酸水溶液中通过溶剂萃取分离甲基丙烯酸的方法，其特征在于甲基丙烯酸水溶液预先首先与萃取溶剂接触，从甲基丙烯酸水溶液中沉淀出的聚合物 并将其余部分进料到提取塔中。

公开(公告)号：US08705698B2

公开(公告)日：2014-04-22

申请号：US13027881

申请日：2011-02-15

申请人： Hiroshi Matsumura ,  Kiyoshi Hasegawa

发明人： Hiroshi Matsumura ,  Kiyoshi Hasegawa

IPC分类号： H05G1/62 ,  G01N23/201 ,  G06K9/78 ,  G06K9/82

CPC分类号： G01N23/223 ,  G01N2223/076 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/10121 ,  G06T2207/30148

摘要： Provided are an X-ray analyzer and a mapping method for an X-ray analysis which, in a inspection for a harmful substance contained in, for example, a material or a composite electronic component, enable determination as to whether a sample is normal or abnormal to be performed visually based on an image obtained by the X-ray mapping analysis. In the X-ray analyzer, an X-ray mapping image of a sample which is confirmed to be normal in advance is obtained as a reference mapping image. A mapping analysis is performed on a inspection sample. A difference from the reference mapping image is obtained for each pixel, to thereby display a difference mapping image. A region in which the amount of specific element is larger than a reference amount is displayed with high brightness, and hence an abnormal portion may be easily found.

摘要翻译： 提供了一种X射线分析仪和用于X射线分析的映射方法，其在包含在例如材料或复合电子部件中的有害物质的检查中能够确定样品是正常还是 基于通过X射线映射分析获得的图像，可视化地进行异常。 在X射线分析装置中，作为基准对照图像，获得确认为正常的样本的X射线映射图像。 对检查样品进行映射分析。 对于每个像素获得与参考映射图像的差异，从而显示差异映射图像。 特定元素的量大于基准量的区域以高亮度显示，因此可能容易发现异常部分。