SEMICONDUCTOR DEVICE THAT IS ADVANTAGEOUS IN MICROFABRICATION AND METHOD OF MANUFACTURING THE SAME
    3.
    发明申请
    SEMICONDUCTOR DEVICE THAT IS ADVANTAGEOUS IN MICROFABRICATION AND METHOD OF MANUFACTURING THE SAME 审中-公开
    在微生物中有利的半导体器件及其制造方法

    公开(公告)号:US20090124080A1

    公开(公告)日:2009-05-14

    申请号:US12351906

    申请日:2009-01-12

    IPC分类号: H01L21/02

    摘要: A semiconductor device includes a semiconductor substrate, a first memory cell transistor, a first select gate transistor, a second memory cell transistor, a second select gate transistor, a contact plug, silicon oxide films, and plasma films which are formed as the same layer as the silicon oxide films and are provided above upper surfaces of the first and the third gate electrodes.

    摘要翻译: 半导体器件包括形成为相同层的半导体衬底,第一存储单元晶体管,第一选择栅极晶体管,第二存储单元晶体管,第二选择栅极晶体管,接触插塞,氧化硅膜和等离子体膜 作为氧化硅膜,并且设置在第一和第三栅电极的上表面之上。