摘要:
A silicon wafer which has DZ layers formed on both sides thereof by heat treatment in an atmosphere of reducing gas (such as hydrogen) or rare gas (such as argon) with a specific temperature profile for heating, holding, and cooling, and which also has a gettering site of BMD in the bulk inside the DZ layer. A silicon wafer which has a silicon epitaxial layer formed on one side thereof. The DZ layer and the silicon epitaxial layer contain dissolved oxygen introduced into their surface parts, with the concentration and distribution of dissolved oxygen properly controlled. Introduction of oxygen into the surface part is accomplished by heat treatment and ensuing rapid cooling in an atmosphere of oxygen-containing gas.
摘要:
A silicon wafer which has DZ layers formed on both sides thereof by heat treatment in an atmosphere of reducing gas (such as hydrogen) or rare gas (such as argon) with a specific temperature profile for heating, holding, and cooling, and which also has a gettering site of BMD in the bulk inside the DZ layer. A silicon wafer which has a silicon epitaxial layer formed on one side thereof. The DZ layer and the silicon epitaxial layer contain dissolved oxygen introduced into their surface parts, with the concentration and distribution of dissolved oxygen properly controlled. Introduction of oxygen into the surface part is accomplished by heat treatment and ensuing rapid cooling in an atmosphere of oxygen-containing gas.
摘要:
A silicon wafer which has DZ layers formed on both sides thereof by heat treatment in an atmosphere of reducing gas (such as hydrogen) or rare gas (such as argon) with a specific temperature profile for heating, holding, and cooling, and which also has a gettering site of BMD in the bulk inside the DZ layer. A silicon wafer which has a silicon epitaxial layer formed on one side thereof. The DZ layer and the silicon epitaxial layer contain dissolved oxygen introduced into their surface parts, with the concentration and distribution of dissolved oxygen properly controlled. Introduction of oxygen into the surface part is accomplished by heat treatment and ensuing rapid cooling in an atmosphere of oxygen-containing gas.
摘要:
A ball screw assembly includes a screw shaft with a spiral groove, balls along the groove, a nut with the screw shaft relatively rotatable with the balls, and a seal device. A portion of each seal member is radially divided into blocks by plural slits so as to extend from one end surface directing outward in an axial direction of the nut to an axial intermediate portion of the seal member, each block having a pair of end faces, the end faces including one end face directed to a rotational direction of the nut with respect to the screw shaft when the screw shaft is screwed into the nut and another end face opposing to the other end face, this one end face being inclined so as to be gradually displaced, towards an outer peripheral side from an inner peripheral side of the seal member, in a direction reverse to the rotational direction with respect to a radial direction of the nut, and the other end face extending in this radial direction of the nut or in a direction inclined to a side reverse to the one end face with respect to the radial direction of the nut.
摘要:
A disk drive apparatus for recording (writing) and/or reproducing (reading) information on an optical disk by rotating the optical disk, and adjusting the tilt angle of an optical pickup device with respect to the optical disk. A spindle chassis rotationally supports a turntable on which the optical disk is placed. A pickup chassis, rotationally supported on said spindle chassis, movably supports an optical pickup device that writes and/or reads the information to/from the optical disk and is movable toward and away from the turntable. A tilt mechanism adjusts the tilt angle of the optical pickup device with respect to the optical disk by rotating the pickup chassis with respect to the spindle chassis.
摘要:
A ball screw unit comprising a screw having a helical ball rolling groove on the outer peripheral surface thereof, a nut assembly having a load zone formed of a helical load rolling groove opposing to the ball rolling groove of the screw and a no-load zone forming a ball endless track by establishing communication between the starting end and the terminating end of the load zone, a number of balls rolling within the endless track of the nut assembly and a ball coupler comprised of coupling members for retaining the balls to rotate in their aligned state, wherein guide grooves for guiding the coupling members of the ball coupler are formed in the load zone of the ball endless track such that the coupling members of the ball coupler are moved by each of the balls in the no-load zone of the endless track while each of the balls is guided to move by the coupling members of the ball coupler in the no-load zone of the endless track, and guide sections for guiding the ball coupling members of the ball coupler along the progressing direction of the balls moving in the load zone are provided at least at both ends of the no-load zone near the load zone, respectively. Thus, according to the present invention, the delivery and reception of the balls are performed smoothly between the load zone and the no-load zone of the ball endless track to thereby achieve the smooth circulation of the balls.
摘要:
A method of removing metallic impurities diffused in a semiconductor substrate, comprising, the semiconductor-substrate-heating step of heating a semiconductor substrate to at least 200.degree. C. or higher and promoting the release and rediffusion of metallic impurities diffused in the semiconductor substrate, and the metallic-impurity-removing step of dissolving the metallic impurities arrived at the surface of the semiconductor substrate with a chemical agent and removing them from the substrate.
摘要:
A slide-feed drive part (27) uses a stepping motor as a slide-feed motor for changing the position of a optical pick-up (3) with respect to the rotation surface of an optical disk (1), and has a micro-controller (31) provided therein and a slide-feed motor controller (32) both for correcting drive current waveforms to drive the stepping motor. Therefore, by correcting the motor driving waveforms, the optical pick-up (3) can be linearly moved with respect to the rotation of the slide-feed motor (14). It is thereby possible to do away with a position sensor and make a fine positional control of the optical pick-up (3) with no variation. As a result of this, it is possible to provide an optical disk driving apparatus, an optical disk driving method, and an optical disk apparatus, which enhances the linearity of the rotation of the motor with a simple construction.
摘要:
A ball screw comprises a screw shaft formed on an outer peripheral surface thereof with a spiral ball rolling groove, a nut member having an inner peripheral surface on which a spiral loaded ball rolling groove corresponding to the spiral ball rolling groove of the screw shaft is formed, both the spiral grooves constituting a loaded ball rolling passage in combination thereof when the screw shaft is fitted to the nut member, a number of balls rolling in the loaded ball rolling passage, and a return pipe having one end connected to one end of the loaded ball rolling passage and another end connected to another end of the loaded ball rolling passage so as to scoop the balls rolling in the loaded ball rolling passage at the one end of the return pipe and return the balls to the loaded ball rolling passage at the other one end of the return pipe. Cutouts, each having a width gradually reduced, are formed to both end portions of the return pipe so that the width of the cutout is gradually reduced towards the inside of the return pipe.
摘要:
One of the problems to be resolved by the present invention is to stably and sustainably produce active ingredients contained in Bignoniaceous plants of which a mass production is difficult in a conventional manner. The present invention relates to a method for efficiently preparing an anticancer active ingredient NQ801 by a cell cultivation of Bignoniaceous plants under specific culture conditions. An ingredient-production system in the present invention has an anticancer activity.