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公开(公告)号：US08082124B2
公开(公告)日：2011-12-20
申请号：US12089664
申请日：2007-07-02
IPC分类号： G06F11/30
CPC分类号： H05H1/0006 , H01J37/32935 , H01J2237/0206
摘要： Provided are a data obtaining section (21) that obtains a time-series data fluctuating in accordance with the plasma conditions, a translation error calculation section (24) that calculates a determinism providing an indicator of whether the time-series data in the plasma are deterministic or stochastic, from the time-series data that have been obtained in the data obtaining unit (21), and an abnormal discharge determination section (26) that determines that the plasma is under the abnormal discharge conditions, in the case that the value representing the determinism calculated in the determinism derivation unit is less than or equal to a given threshold value, during the plasma generation. Examples of the value representing the determinism include translation error or permutation entropy. In the case the permutation entropy is used as a value representing the determinism, a permutation entropy calculation section is provided.
摘要翻译： 提供一种获取根据等离子体条件波动的时间序列数据的数据获取部（21），计算提供等离子体中的时间序列数据的指标的确定性的平移误差计算部（24） 在数据获取单元（21）中获得的时间序列数据和确定等离子体处于异常放电条件下的异常放电确定部分（26）的确定性或随机性的情况下，在值 在等离子体产生期间表示在确定性推导单元中计算的确定性小于或等于给定阈值。 表示确定性的值的示例包括平移误差或置换熵。 在使用置换熵作为表示确定性的值的情况下，提供置换熵计算部。
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2.发明申请METHOD FOR DIAGNOSING ABNORMAL PLASMA DISCHARGE, ABNORMAL PLASMA DISCHARGE DIAGNOSTICS SYSTEM, AND COMPUTER PROGRAM 有权诊断异常血浆放电的方法，异常血浆放射诊断系统和计算机程序公开(公告)号：US20100161278A1
公开(公告)日：2010-06-24
申请号：US12089664
申请日：2007-07-02
IPC分类号： G06F15/00
CPC分类号： H05H1/0006 , H01J37/32935 , H01J2237/0206
摘要： Provided are a data obtaining section (21) that obtains a time-series data fluctuating in accordance with the plasma conditions, a translation error calculation section (24) that calculates a determinism providing an indicator of whether the time-series data in the plasma are deterministic or stochastic, from the time-series data that have been obtained in the data obtaining unit (21), and an abnormal discharge determination section (26) that determines that the plasma is under the abnormal discharge conditions, in the case that the value representing the determinism calculated in the determinism derivation unit is less than or equal to a given threshold value, during the plasma generation. Examples of the value representing the determinism include translation error or permutation entropy. In the case the permutation entropy is used as a value representing the determinism, a permutation entropy calculation section is provided.
摘要翻译： 提供一种获取根据等离子体条件波动的时间序列数据的数据获取部（21），计算提供等离子体中的时间序列数据的指标的确定性的平移误差计算部（24） 在数据获取单元（21）中获得的时间序列数据和确定等离子体处于异常放电条件下的异常放电确定部分（26）的确定性或随机性的情况下，在值 在等离子体产生期间表示在确定性推导单元中计算的确定性小于或等于给定阈值。 表示确定性的值的示例包括平移误差或置换熵。 在使用置换熵作为表示确定性的值的情况下，提供置换熵计算部。
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公开(公告)号：US6012334A
公开(公告)日：2000-01-11
申请号：US84096
申请日：1998-05-26
申请人： Shigeru Ando , Takaya Miyano , Toshiyuki Matsumoto , Muneo Harada
发明人： Shigeru Ando , Takaya Miyano , Toshiyuki Matsumoto , Muneo Harada
摘要： A vibration wave detector, having a receiver for receiving vibration waves such as sound waves and so on to be propagated in a medium, a resonant unit having a plurality of cantilever resonators each having such a length as to resonate at an individual predetermined frequency, a retaining rod for retaining the resonant unit, a vibration intensity detector for detecting the vibration intensity, for each predetermined frequency, of each of the resonators, by the vibration waves received by the receiver and propagated to the resonant unit by way of the retaining rod.
摘要翻译： 一种振动波检测器，具有用于接收在介质中传播的诸如声波等的振动波的接收器，具有多个悬臂谐振器的谐振单元，每个悬臂谐振器具有以各个预定频率谐振的长度; 用于保持谐振单元的保持杆，振动强度检测器，用于通过接收器接收的振动波，通过保持杆传播到谐振单元，检测每个谐振器的每个预定频率的振动强度。
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公开(公告)号：US06373264B1
公开(公告)日：2002-04-16
申请号：US09402724
申请日：1999-10-08
IPC分类号： G01R2726
CPC分类号： G01D5/2417 , G01D5/24 , G01D5/2405 , G01H11/06 , H04R5/04
摘要： An apparatus for detecting an impedance variable in response to a sensed physical amount of a sensor is provided which comprises an impedance-frequency conversion unit and a counter. The impedance-frequency conversion unit converts the sensor impedance to an oscillation signal a frequency of which corresponds to the sensor impedance. The impedance-frequency conversion unit comprises an impedance-voltage converter for providing a voltage corresponding to the sensor impedance, and a Wien bridge oscillator including an element an impedance of which varies in response to the voltage from the impedance-voltage converter, for generating the oscillation signal. The Wien bridge oscillator is capable of generating a square wave signal as the oscillation signal. The counter counts the number of waves (or wave number) of the oscillation signal in a predetermined time period to output a count value which can be handled as a digital signal.
摘要翻译： 提供了一种用于响应于感测到的传感器的物理量来检测阻抗变量的装置，其包括阻抗 - 频率转换单元和计数器。 阻抗 - 频率转换单元将传感器阻抗转换为与传感器阻抗相对应的频率的振荡信号。 阻抗 - 频率转换单元包括用于提供与传感器阻抗相对应的电压的阻抗 - 电压转换器，以及包括响应于来自阻抗 - 电压转换器的电压而变化的阻抗的元件的维恩桥式振荡器，用于产生 振荡信号。 维恩桥式振荡器能够产生方波信号作为振荡信号。 该计数器在预定时间周期内对振荡信号的波数（或波数）进行计数，以输出可作为数字信号处理的计数值。
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公开(公告)号：US06326795B1
公开(公告)日：2001-12-04
申请号：US09402699
申请日：1999-10-08
IPC分类号： G01R2726
CPC分类号： G01D5/2417 , G01D5/24 , G01D5/2405 , G01H11/06 , H04R5/04
摘要： A detection circuit which is capable of outputting a voltage proportional to a static capacitance of a sensor is provided, which comprises a voltage input terminal connected to receive an input voltage and an operational amplifier. The input voltage received at the voltage input terminal is changed between two different reference voltages. An inverting input terminal of the amplifier is connected to the voltage input terminal through a resistor, and a non-inverting input terminal of the amplifier is connected to the voltage input terminal through the sensor capacitance and to one of the reference voltages through a switch. An output voltage of the amplifier is connected to the inverting input terminal through a feedback circuit including a resistor and a switch. The switches are closed and the one of the reference voltages is supplied to the input terminal during an initialization cycle. The switches are opened and the other reference voltage is supplied to the input terminal during a measurement cycle. The operational amplifier outputs an output voltage which linearly varies in response to the sensor capacitance.
摘要翻译： 提供能够输出与传感器的静态电容成比例的电压的检测电路，其包括连接以接收输入电压的电压输入端子和运算放大器。 在电压输入端子处接收的输入电压在两个不同的参考电压之间变化。 放大器的反相输入端子通过电阻连接到电压输入端子，放大器的非反相输入端子通过传感器电容连接到电压输入端子，并通过开关连接到参考电压之一。 放大器的输出电压通过包括电阻和开关的反馈电路连接到反相输入端子。 在初始化周期期间，开关闭合，并且将参考电压中的一个提供给输入端。 开关断开，另一个参考电压在测量周期内提供给输入端。 运算放大器输出响应于传感器电容线性变化的输出电压。
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公开(公告)号：US06227054B1
公开(公告)日：2001-05-08
申请号：US09384202
申请日：1999-08-27
申请人： Shigeru Ando , Takaya Miyano , Toshiyuki Matsumoto , Muneo Harada
发明人： Shigeru Ando , Takaya Miyano , Toshiyuki Matsumoto , Muneo Harada
IPC分类号： G01D2100
摘要： A vibration wave detector, having a receiver for receiving vibration waves such as sound waves and so on to be propagated in a medium, a resonant unit having a plurality of cantilever resonators each having such a length as to resonate at an individual predetermined frequency, a retaining rod for retaining the resonant unit, a vibration intensity detector for detecting the vibration intensity, for each predetermined frequency, of each of the resonators, by the vibration waves received by the receiver and propagated to the resonant unit by way of the retaining rod.
摘要翻译： 一种振动波检测器，具有用于接收在介质中传播的诸如声波等的振动波的接收器，具有多个悬臂谐振器的谐振单元，每个悬臂谐振器具有以各个预定频率谐振的长度; 用于保持谐振单元的保持杆，振动强度检测器，用于通过接收器接收的振动波，通过保持杆传播到谐振单元，检测每个谐振器的每个预定频率的振动强度。
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7.发明授权Method of detecting end point of process, end point detector, computer memory product and chemical mechanical polishing apparatus 有权检测终点检测方法，终点检测器，计算机存储产品和化学机械抛光装置公开(公告)号：US06327540B1
公开(公告)日：2001-12-04
申请号：US09160699
申请日：1998-09-25
申请人： Takaya Miyano , Kiyoshi Miura , Kazuto Hasegawa , Yasuo Shirai
发明人： Takaya Miyano , Kiyoshi Miura , Kazuto Hasegawa , Yasuo Shirai
IPC分类号： G01R1500
CPC分类号： H01L22/26
摘要： The invention provides a method of detecting an end point, an end point detector, a computer memory product and a chemical mechanical polishing apparatus, in which a physical quantity changing in accordance with proceeding of a process is measured, first time series data and second time series data delayed by a predetermined time from the first time series data are extracted on the basis of the measured Physical quantity, and the end point of the process is detected on the basis of correlation between the first time series data and the second time series data. Thus, the end point can be detected in a shorter period of time without previously performing plural tests.
摘要翻译： 本发明提供了一种检测端点的方法，终点检测器，计算机存储器产品和化学机械抛光装置，其中测量根据处理进程的物理量变化，第一时间序列数据和第二次 基于所测量的物理量提取从第一时间序列数据延迟预定时间的串行数据，并且基于第一时间序列数据和第二时间序列数据之间的相关性来检测处理的结束点 。 因此，可以在更短的时间段内检测终点，而无需先前执行多个测试。
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公开(公告)号：US4989065A
公开(公告)日：1991-01-29
申请号：US365521
申请日：1989-06-13
申请人： Junichi Tsuchimoto , Tooru Yamada , Takaya Miyano
发明人： Junichi Tsuchimoto , Tooru Yamada , Takaya Miyano
IPC分类号： H01L21/28 , H01L21/285 , H01L29/45
CPC分类号： H01L21/28575 , H01L29/452 , Y10S148/056 , Y10S148/058
摘要： This invention comprises a Pd layer formed on an n-type GaAs semiconductor crystals, and a Ge layer being formed on the Pd layer, characterized in that the thickness of the Pd layer is between 300 .ANG. and 1500 .ANG. and the thickness of the Ge layer is between 500 .ANG. and 1500 .ANG..And this invention provides an ohmic electrode forming process for compound semiconductor crystals for forming an ohmic electrode on n-type GaAs semiconductor crystals, comprising a first layer forming step for forming a palladium (Pd) layer on a compound semiconductor crystal; a second layer forming step for forming a germanium layer (Ge) on the Pd layer; and a annealing step for annealing the Pd layer and the Ge layer by a rapid thermal annealing treatment.The Pd layer is formed between 300 .ANG. and 1500 .ANG. in the first layer forming step; the Ge layer is between 500 .ANG. and 1500 .ANG. in the second layer forming step; and the Pd layer and the Ge layer are heated in the annealing step for 3 seconds to 20 seconds at a temperature of 500.degree. C. to 650.degree. C. by a rapid thermal annealing treatment. As the rapid thermal annealing treatment, the flash annealing treatment is effective.
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公开(公告)号：US5091338A
公开(公告)日：1992-02-25
申请号：US512360
申请日：1990-04-23
申请人： Junichi Tsuchimoto , Tooru Yamada , Takaya Miyano
发明人： Junichi Tsuchimoto , Tooru Yamada , Takaya Miyano
IPC分类号： H01L21/28 , H01L21/285 , H01L29/45
CPC分类号： H01L21/28575 , H01L29/452 , Y10S148/056 , Y10S148/058
摘要： This invention comprises a Pd layer formed on an n-type GaAs semiconductor crystals, and a Ge layer being formed on the Pd layer, characterized in that the thickness of the Pd layer is between 300 .ANG. and 1500 .ANG. and the thickness of the Ge layer is between 500 .ANG. and 1500 .ANG..In addition, this invention provides an ohmic electrode forming process for compound semiconductor crystals for forming an ohmic electrode on an n-type GaAs semiconductor crystal, comprising a first layer forming step for forming a palladium (pd) layer on a compound semiconductor crystal; a second layer forming step for forming a germanium layer (Ge) on the Pd layer; and an annealing step for annealing the Pd layer and the Ge layer by a rapid thermal annealing treatment.The Pd layer is formed between 300 .ANG. and 1500 .ANG. in the first layer forming step; the Ge layer is between 500 .ANG. and 1500 .ANG. in the second layer forming step; and the Pd layer and the Ge layer are heated in the annealing step for 3 seconds to 20 seconds at a temperature of 500.degree. C. to 650.degree. C. by a rapid thermal annealing treatment. As the rapid thermal annealing treatment, the flash annealing treatment is effective.
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