公开(公告)号：US07098156B2

公开(公告)日：2006-08-29

申请号：US10475142

申请日：2002-04-04

申请人： Takayuki Wakabayashi ,  Toshiyuki Uchino ,  Yasuo Kiguchi ,  Atsuyoshi Koike

发明人： Takayuki Wakabayashi ,  Toshiyuki Uchino ,  Yasuo Kiguchi ,  Atsuyoshi Koike

IPC分类号： H01L21/00

CPC分类号： H01L21/67724 ,  G05B19/41895 ,  H01L21/67173 ,  H01L21/67727 ,  Y02P90/285 ,  Y02P90/60 ,  Y10S414/135

摘要： The conveyance of wafers in bays (equipment groups) of a clean room is performed by RGVs (Rail Guided Vehicles) that linearly travel at high speed on conveying rails laid on the floor of the clean room. A structure is adopted wherein a conveying area, over which the RGV travels, is separated from a human working area by a compartment (partition), and a human is not allowed to enter the conveying area upon operation of a line.

摘要翻译： 在洁净室的托架（设备组）中输送硅片由RGV（轨道导引车辆）执行，该车辆在洁净室地板上的输送轨道上高速线性行进。 采用这样的结构，其中RGV行进的输送区域通过隔室（分隔）与人工作区域分离，并且在操作线路时不允许人进入输送区域。

公开(公告)号：US20050149217A1

公开(公告)日：2005-07-07

申请号：US11030154

申请日：2005-01-07

申请人： Yoshio Okada ,  Takayuki Wakabayashi ,  Atsuyoshi Koike ,  Naoki Takehara

发明人： Yoshio Okada ,  Takayuki Wakabayashi ,  Atsuyoshi Koike ,  Naoki Takehara

IPC分类号： H01L21/02 ,  G06F19/00 ,  G06Q10/00 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68

CPC分类号： G06Q10/06 ,  H01L21/67276 ,  H01L21/67727

摘要： A semiconductor manufacturing system in a clean room is composed of a combination of a flow shop section and a job shop section. The flow shop section is composed of a quasi flow shop section and a quasi job shop section. In the quasi flow shop section, manufacturing apparatuses are arranged respectively so that a difference between processing ability of the manufacturing apparatuses is taken into consideration and a balance in productivity is achieved. In the quasi job shop section, manufacturing apparatuses are arranged respectively so that the balance in productivity is not achieved due to low or high processing ability of the manufacturing apparatuses, and are provided so as to be shared by the quasi flow shop section. Accordingly, a difference between the processing ability of the manufacturing apparatuses can be reduced and the cycle time can be significantly reduced.

摘要翻译： 无尘室中的半导体制造系统由流动车间部和作业车间部的组合构成。 流动车间部分由准流动车间部分和准作业车间部分组成。 在准流动车间部分，分别配置制造装置，从而考虑到制造装置的处理能力之间的差异，并且实现了生产率的平衡。 在准作业车间部分中，分别配置制造装置，由于制造装置的低或高处理能力而不能实现生产率的平衡，并且被设置为由准流动车间部分共享。 因此，可以减少制造装置的处理能力之间的差异，并且可以显着地减少循环时间。

公开(公告)号：US08982172B2

公开(公告)日：2015-03-17

申请号：US13978192

申请日：2012-01-04

申请人： Takayuki Wakabayashi ,  Naruki Suzuki ,  Katsumi Arai ,  Yaomin Zhou

发明人： Takayuki Wakabayashi ,  Naruki Suzuki ,  Katsumi Arai ,  Yaomin Zhou

IPC分类号： B41J2/435 ,  B41J27/00 ,  H02K33/00 ,  G02B7/182 ,  G02B26/10 ,  H02K33/16 ,  B41J2/44 ,  G03B21/28 ,  H02K15/00 ,  H04N1/113

摘要： The oscillation element according to the present invention includes a torsion bar mounted on a base, and an oscillating member having a light reflection surface for reflecting light from a light source, which is fixed on the torsion bar protruding from the base. The oscillating member oscillates about a longitudinal axis of the torsion bar with an elastic deformation of the torsion bar, thereby deflecting the light that reflects at the light reflection surface in a direction intersecting the longitudinal axis. The oscillating member has two plates that are joined together so as to sandwich the torsion bar. On joining surfaces of the plates are provided with grooves for receiving the torsion bar, respectively. The plates have a symmetrical shape that the longitudinal axis serves as the axis of symmetry.

公开(公告)号：US09327968B2

公开(公告)日：2016-05-03

申请号：US13493313

申请日：2012-06-11

申请人： Naruki Suzuki ,  Katsumi Arai ,  Takayuki Wakabayashi

发明人： Naruki Suzuki ,  Katsumi Arai ,  Takayuki Wakabayashi

IPC分类号： H01L41/08 ,  B81C1/00 ,  G02B26/08

CPC分类号： B81C1/00658 ,  B81B2201/042 ,  G02B26/085

摘要： A work hardening treatment which decreases the Young's modulus, and an age hardening treatment which recovers or increases the Young's modulus decreased by the work hardening treatment are performed to form a vibrating portion, thereby attaining a vibrating element advantageous in downsizing while ensuring desired fatigue characteristics and vibration characteristics. This downsizes, for example, an actuator device, an optical scanning device, a video projection apparatus, and an image forming apparatus.

摘要翻译： 进行降低杨氏模量的加工硬化处理和通过加工硬化处理而使杨氏模量恢复或增加的时效硬化处理，形成振动部，从而获得有利于小型化同时确保所需的疲劳特性的振动元件， 振动特性。 例如，致动器装置，光学扫描装置，视频投影装置和图像形成装置的尺寸缩小。

公开(公告)号：US09024992B2

公开(公告)日：2015-05-05

申请号：US13978192

申请日：2012-01-04

申请人： Takayuki Wakabayashi ,  Naruki Suzuki ,  Katsumi Arai ,  Yaomin Zhou

发明人： Takayuki Wakabayashi ,  Naruki Suzuki ,  Katsumi Arai ,  Yaomin Zhou

IPC分类号： B41J2/435 ,  B41J27/00 ,  H02K33/00 ,  G02B7/182 ,  G02B26/10 ,  H02K33/16 ,  B41J2/44 ,  G03B21/28 ,  H02K15/00 ,  H04N1/113

CPC分类号： H02K33/00 ,  B41J2/44 ,  B41J2/471 ,  G02B7/1821 ,  G02B26/10 ,  G02B26/105 ,  G03B21/28 ,  H02K15/00 ,  H02K33/16 ,  H04N1/1135 ,  Y10T29/49009

摘要： The oscillation element according to the present invention includes a torsion bar mounted on a base, and an oscillating member having a light reflection surface for reflecting light from a light source, which is fixed on the torsion bar protruding from the base. The oscillating member oscillates about a longitudinal axis of the torsion bar with an elastic deformation of the torsion bar, thereby deflecting the light that reflects at the light reflection surface in a direction intersecting the longitudinal axis. The oscillating member has two plates that are joined together so as to sandwich the torsion bar. On joining surfaces of the plates are provided with grooves for receiving the torsion bar, respectively. The plates have a symmetrical shape that the longitudinal axis serves as the axis of symmetry.

摘要翻译： 根据本发明的振动元件包括安装在基座上的扭杆和具有用于反射来自光源的光的光反射表面的摆动构件，该光反射表面固定在从基座突出的扭杆上。 摆动构件以扭杆的弹性变形围绕扭杆的纵向轴线摆动，从而使与光轴反射面反射的光在与纵轴相交的方向上偏转。 摆动构件具有两个连接在一起以便夹紧扭杆的板。 在板的接合表面上分别设有用于接收扭杆的槽。 板具有对称的形状，纵轴用作对称轴。

公开(公告)号：US20080278714A1

公开(公告)日：2008-11-13

申请号：US12107866

申请日：2008-04-23

申请人： Yukio Tomita ,  Kenjiro Nabeshima ,  Takayuki Wakabayashi ,  Hirotaka Yamamoto

发明人： Yukio Tomita ,  Kenjiro Nabeshima ,  Takayuki Wakabayashi ,  Hirotaka Yamamoto

IPC分类号： G01B11/26

CPC分类号： B63H25/36

摘要： The inner cylindrical body is mounted on the top surface of the rudder-stock; the outer cylindrical body is put on the inner cylindrical body exteriorly; the gudgeon pin provided on the top reverse surface of the outer cylindrical body is inserted into the gudgeon provided on the top surface of the inner cylindrical body; the pin protruded on the top surface of the outer cylindrical body is inserted into the chest fixated to the supports; the rotational movement checking device, that obstructs the pin to rotate, and at the same time, permits it to be displaced in the radial direction, is provided inside the chest; the scale is provided on the outer circumferential surface of the inner cylindrical body; and, the rudder angle detecting optical sensors facing the scale are mounted on the inner circumferential surface of the outer cylindrical body.

摘要翻译： 内筒体安装在舵杆的顶面上; 外筒体外部放置在内筒体上; 设置在外筒体的顶面上的舵杆插入设置在内筒体的上表面上的舵柄上; 突出在外筒体顶表面上的销插入固定在支架上的胸部; 所述旋转运动检查装置在所述胸部内设置有阻止所述销旋转的同时允许其沿径向移位的旋转运动检查装置， 在内筒体的外周面上设置刻度尺; 并且面向刻度的舵角检测光学传感器安装在外筒体的内周面上。

公开(公告)号：US20050005808A1

公开(公告)日：2005-01-13

申请号：US10886708

申请日：2004-07-09

申请人： Takayuki Wakabayashi ,  Shinichi Watanabe

发明人： Takayuki Wakabayashi ,  Shinichi Watanabe

IPC分类号： B65G49/07 ,  G05D1/02 ,  H01L21/00 ,  H01L21/677 ,  B61K1/00

CPC分类号： H01L21/67276

摘要： The present invention provides a transfer technique that can improve the transfer ability when reinforcing and expanding the transfer system, with effectively using the existing system. The transfer system includes tracks that link a plurality of manufacturing equipments, a plurality of carriers having different performances that run on the tracks to transfer objects between the manufacturing equipments and the like in a factory space having a plurality of manufacturing equipments, and the plurality of carriers having different performances are simultaneously provided and run on the same tracks. The plurality of carriers are composed of old carriers and new carriers that provided together and run depending on their own performances (running performance such as running speed, acceleration/deceleration, and the like and transfer performance such as transfer speed and the like).

摘要翻译： 本发明提供了一种转移技术，其可以有效地利用现有的系统来提高加强和扩大转移系统时的转移能力。 传送系统包括链接多个制造设备的轨道，在具有多个制造设备的工厂空间中在轨道上运行的具有不同性能的多个载体在制造设备之间转移物体，并且多个 同时提供具有不同性能的载波并在同一轨道上运行。 多个载体由根据其自己的性能（诸如行驶速度，加速/减速等的运行性能以及诸如传送速度等的传送性能）组合并运行的旧载体和新载体构成。

公开(公告)号：US4645065A

公开(公告)日：1987-02-24

申请号：US707910

申请日：1985-03-04

申请人： Yukio Tomita ,  Takayuki Wakabayashi ,  Mitsunobu Matsuda ,  Nobuji Shibamoto ,  Yoshihiro Yamashiro

发明人： Yukio Tomita ,  Takayuki Wakabayashi ,  Mitsunobu Matsuda ,  Nobuji Shibamoto ,  Yoshihiro Yamashiro

IPC分类号： B65G43/08 ,  B65G47/57 ,  B65G65/46 ,  F23G5/44 ,  F23K3/00

CPC分类号： B65G43/08 ,  F23G5/444

摘要： An apparatus for feeding waste tire chips (12) to an incinerator (11) having a feed chute (13) comprises a container (17) provided with a screw feeder (22, 23) at its bottom, upper and lower two vibrating feeders (24A), (24B), and a transfer conveyor (36) extending between the lower vibrating feeder (24B) and the feed chute (13). The screw feeder (22, 23) is controlled by a first controller (34) in response to an output signal from a first photoswitch (33) which is mounted on the upper vibrating feeder (24A) for detecting the quantity of chips delivered from the container (17). The transfer conveyor (36) and the lower vibrating feeder (24B) are controlled by a second controller (42) in accordance with an output signal from a second photoswitch (41) which is mounted on the feed chute (13) for detecting the quantity of chips to be fed to the incinerator (11) at a time. The upper vibrating feeder (24 A) is intermittently operated by a third controller (43).

摘要翻译： 一种用于将垃圾轮胎碎片（12）供给到具有进料槽（13）的焚化炉（11）的设备包括：容器（17），其底部设有螺旋进料器（22,23），上下两个振动给料器 （24B），以及在下振动进料器（24B）和进料槽（13）之间延伸的转移输送器（36）。 响应于来自安装在上振动给料器（24A）上的第一光开关（33）的输出信号，螺旋给料器（22,23）由第一控制器（34）控制，用于检测从 容器（17）。 转印输送机（36）和下振动给料器（24B）由第二控制器（42）根据来自安装在进料槽（13）上的第二光开关（41）的输出信号来控制，用于检测数量 的一次供给到焚化炉（11）的芯片。 上振动给料器（24A）由第三控制器（43）间歇地操作。

公开(公告)号：US08665520B2

公开(公告)日：2014-03-04

申请号：US11847576

申请日：2007-08-30

申请人： Masayuki Uchiyama ,  Munetoshi Yoshikawa ,  Kazuo Suzuki ,  Takayuki Wakabayashi

发明人： Masayuki Uchiyama ,  Munetoshi Yoshikawa ,  Kazuo Suzuki ,  Takayuki Wakabayashi

IPC分类号： G02B1/10

CPC分类号： G02B1/118 ,  G03B11/00

摘要： A spectral reflectance in the entire visible wavelength range may be decreased to decrease inconveniences in an image such as flare or ghost. A non-reflective periodic layer including a large number of fine uneven periodic structure bodies is formed on a substrate, and a neutral density (“ND”) film is formed on the other surface of the substrate by vacuum deposition, to improve an anti-reflection function. Regarding a beam entering the ND filter, the MgF2 film of the formed ND film suppresses the spectral reflectance at the boundary of the atmosphere and the ND film and at the boundary of the ND film and the substrate. The non-reflective periodic layer decreases the reflectance at the boundary of the substrate and the atmosphere.

摘要翻译： 可以降低整个可见光波长范围内的光谱反射率，以减少图像中的不便，例如耀斑或鬼影。 在基板上形成包括大量细小的不均匀周期性结构体的非反射性周期层，通过真空沉积在基板的另一个表面上形成中性密度（“ND”）膜， 反射功能。 关于进入ND滤光片的光束，形成的ND膜的MgF 2膜抑制了在大气和ND​​膜的边界处以及在ND膜和衬底的边界处的光谱反射率。 非反射性周期层降低了基板和气氛的边界处的反射率。

公开(公告)号：US20120249804A1

公开(公告)日：2012-10-04

申请号：US13493313

申请日：2012-06-11

申请人： Naruki Suzuki ,  Katsumi Arai ,  Takayuki Wakabayashi

发明人： Naruki Suzuki ,  Katsumi Arai ,  Takayuki Wakabayashi

IPC分类号： H04N3/28 ,  H02K33/00 ,  G02B26/10

CPC分类号： B81C1/00658 ,  B81B2201/042 ,  G02B26/085

摘要： A work hardening treatment which decreases the Young's modulus, and an age hardening treatment which recovers or increases the Young's modulus decreased by the work hardening treatment are performed to form a vibrating portion, thereby attaining a vibrating element (30) advantageous in downsizing while ensuring desired fatigue characteristics and vibration characteristics. This downsizes, for example, an actuator device (1), an optical scanning device, a video projection apparatus, and an image forming apparatus.

摘要翻译： 进行降低杨氏模量的加工硬化处理和通过加工硬化处理而回复或增加杨氏模量的时效硬化处理，以形成振动部，从而获得有利于小型化的振动元件（30），同时确保期望 疲劳特性和振动特性。 例如，致动器装置（1），光学扫描装置，视频投影装置和图像形成装置的尺寸缩小。