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    Method for manufacturing ink jet recording heads
    1.
    发明授权
    Method for manufacturing ink jet recording heads 有权
    制造喷墨记录头的方法

    公开(公告)号：US06331259B1

    公开(公告)日：2001-12-18

    申请号：US09205172

    申请日：1998-12-04

    申请人： Teruo Ozaki ,  Masahiko Ogawa ,  Masami Ikeda ,  Ichiro Saito ,  Takayuki Yagi ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki

    发明人： Teruo Ozaki ,  Masahiko Ogawa ,  Masami Ikeda ,  Ichiro Saito ,  Takayuki Yagi ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki

    IPC分类号： G01D1520

    CPC分类号： B41J2/1625 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/03 ,  B41J2202/13

    摘要： A method for manufacturing ink jet recording heads includes the steps of forming a film of a first inorganic material in the form of ink flow path pattern using a soluble first inorganic material on the substrate having ink-discharge, pressure-generating elements formed thereon, forming a film of a second inorganic material becoming ink flow walls on the film of the first inorganic material using the second inorganic material, forming ink-discharge openings on the film of the second inorganic material above the ink-discharge, pressure-generating elements, and eluting the film of the first inorganic material. With this method, it becomes possible to set the ink-discharge, pressure-generating elements and the ink-discharge openings (ports) of each head with extremely high precision in a shorter distance with a good reproducibility to record images with higher quality and without any deformation of the head due to the applied heat, while providing a good resistance to ink and erosion, as well as a higher dimensional precision and reliability that may be affected otherwise by swelling or the like.

    摘要翻译： 一种制造喷墨记录头的方法包括以下步骤：使用在其上形成有喷墨的基板上的可溶性第一无机材料形成油墨流路图案形式的第一无机材料的膜，在其上形成压力产生元件，形成 使用第二无机材料在第一无机材料的膜上变成油墨流动壁的第二无机材料的膜，在喷墨，压力产生元件上方的第二无机材料的膜上形成油墨排出口，以及 洗脱第一种无机材料的膜。 利用这种方法，可以以较高的重复性以较高的精度设置具有极高精度的每个头部的喷墨，发泡元件和排墨口（端口） 由于施加的热量，头部的任何变形，同时提供良好的耐油墨和侵蚀性，以及更高的尺寸精度和可靠性，否则可能由于膨胀等影响。

    Method of producing micro structure, method of production liquid discharge head
    2.
    发明授权
    Method of producing micro structure, method of production liquid discharge head 有权
    产生液体排出头，由此产生的排液头，装有液体排出头的头盒，以及用于排出由其产生的液体的装置

    公开(公告)号：US06391527B2

    公开(公告)日：2002-05-21

    申请号：US09290409

    申请日：1999-04-13

    申请人： Takayuki Yagi ,  Tomoyuki Hiroki ,  Teruo Ozaki ,  Masahiko Kubota

    发明人： Takayuki Yagi ,  Tomoyuki Hiroki ,  Teruo Ozaki ,  Masahiko Kubota

    IPC分类号： G03F700

    CPC分类号： B41J2/14048 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/13

    摘要： A method of producing a micro structure on a substrate which has a support portion and a plate-like portion supported thereby at a distance from the substrate, comprising the steps of forming a spacer layer consisting of an insulating material on a substrate having an electrically conductive layer formed on its surface, forming a latent image layer consisting of an electrically conductive material on the spacer layer at a site where the plate-like portion of an intended structure is to be formed, producing an aperture, where a part of the electrically conductive layer is exposed, on the spacer layer at a site where the supporting portion of an intended structure is to be formed, forming a structure layer consisting of plating film inside of the aperture and on the latent image layer by electroplating the electrically conductive layer as a cathode, and removing the spacer layer.

    摘要翻译： 一种在基板上制造微结构的方法，其具有支撑部分和由基板支撑的板状部分，包括以下步骤：在具有导电性的基板上形成由绝缘材料构成的间隔层 在其表面上形成的层，在要形成预期结构的板状部分的位置处在间隔层上形成由导电材料构成的潜像层，产生孔，其中导电的一部分 在要形成预期结构的支撑部分的位置的间隔层上暴露层，在孔的内部由电镀膜形成的结构层和通过将导电层电镀作为潜像层的潜像层 阴极，并去除间隔层。

    Liquid discharge head, recording apparatus, and method for manufacturing liquid discharge heads
    3.
    发明授权
    Liquid discharge head, recording apparatus, and method for manufacturing liquid discharge heads 失效
    液体排出头，记录装置和液体排出头的制造方法

    公开(公告)号：US06485132B1

    公开(公告)日：2002-11-26

    申请号：US09206281

    申请日：1998-12-07

    申请人： Tomoyuki Hiroki ,  Masahiko Ogawa ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota ,  Takayuki Yagi

    发明人： Tomoyuki Hiroki ,  Masahiko Ogawa ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota ,  Takayuki Yagi

    IPC分类号： B41J205

    CPC分类号： B41J2/1604 ,  B41J2/14048 ,  B41J2/14056 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14362 ,  B41J2202/13

    摘要： A liquid discharge head includes a pair of substrates mutually fixed in lamination, a plurality of liquid flow paths arranged on the bonded faces of the substrates, the leading end of the plural liquid flow paths being communicated with a plurality of discharge ports, a plurality of heat generating members arranged on at least one of the substrates corresponding to each of the liquid flow paths and a movable member having in the liquid flow path the free end thereof on the discharge port side, and a region between the heat generating member and the movable member, where liquid exists. In the liquid discharge head, a bubble is created by enabling thermal energy generated by the heat generating members to act upon the liquid, and the bubble is controlled by the movable member to discharge liquid in the liquid flow paths from the discharge ports to the outside. Further, all of the movable members, members becoming side walls of liquid flow paths, members supporting the movable members, and members supporting the walls of liquid flow paths are formed by materials containing silicon and the side walls of liquid flow paths are formed by patterning the material containing silicon formed on the surface of one of the pair of substrates in the liquid discharge head.

    摘要翻译： 液体排出头包括层叠相互固定的一对基板，布置在基板的接合面上的多个液流通道，多个液流通道的前端与多个排出口连通，多个 布置在与每个液体流动路径相对应的至少一个基板上的发热元件和在液体流动通道中具有其排出口侧的自由端的可动件，以及在发热元件和可移动的 会员，液体存在。 在液体排出头中，通过使由发热元件产生的热能作用在液体上而产生气泡，并且气泡被可移动元件控制，以将液体从排出口流出的液体排出到外部 。 此外，所有可移动部件，成为液体流路的侧壁的部件，支撑可移动部件的部件和支撑液体流动通道壁的部件由含有硅的材料形成，并且液体流动通道的侧壁通过图案形成 含有硅的材料形成在液体排出头中的一对基板中的一个的表面上。

    Method for manufacturing a liquid discharge head
    4.
    发明授权
    Method for manufacturing a liquid discharge head 失效
    液体排出头的制造方法

    公开(公告)号：US06436301B1

    公开(公告)日：2002-08-20

    申请号：US09291035

    申请日：1999-04-14

    申请人： Tomoyuki Hiroki ,  Takayuki Yagi ,  Teruo Ozaki ,  Masahiko Kubota

    发明人： Tomoyuki Hiroki ,  Takayuki Yagi ,  Teruo Ozaki ,  Masahiko Kubota

    IPC分类号： B41J204

    CPC分类号： B41J2/14064 ,  B41J2/14129 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/13

    摘要： A method for manufacturing a liquid discharge head, which is provided with a movable film supporting member for supporting a movable film separating a first liquid flow path and a bubble creation region completely, and that is displaceable by the bubble created on the heat generating element. The method comprises the steps of forming the movable film supporting member, forming on the surface of the substrate becoming the movable film supporting member the recessed portion corresponding to the movable region of the movable film, providing a material becoming the movable film on the entire surface of the substrate having the recessed portion provided therefor, removing the portion including the movable region on the substrate from the reverse side of the substrate having the movable film provided therefor and forming a slacked configuration on the portion of the movable region of the movable film.

    摘要翻译： 一种液体排出头的制造方法，该液体排出头具有可移动的薄膜支撑构件，用于支撑完全分离第一液体流动通道和气泡产生区域的可移动薄膜，并且可通过在发热元件上产生的气泡移动。 该方法包括以下步骤：形成可移动膜支撑构件，在基板的表面上形成为可移动膜支撑构件的与可移动膜的可移动区域相对应的凹部，在整个表面上提供成为可移动膜的材料 具有设置在其上的凹部的基板的背面，从其上设置有可移动薄膜的基板的背面去除包括可移动区域的部分，并在可移动薄膜的可移动区域的部分上形成松弛构造。

    Method of manufacturing a liquid discharge head
    7.
    发明授权
    Method of manufacturing a liquid discharge head 失效
    液体排出头的制造方法

    公开(公告)号：US06374482B1

    公开(公告)日：2002-04-23

    申请号：US09128538

    申请日：1998-08-04

    申请人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

    发明人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

    IPC分类号： H05B310

    CPC分类号： B41J2/14129 ,  B41J2/14024 ,  B41J2/14048 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  Y10S29/016 ,  Y10T29/49083 ,  Y10T29/49401

    摘要： A method for manufacturing liquid discharge heads is provided with discharge ports for discharging liquid, liquid flow paths communicated with the discharge ports for supplying liquid to the discharge ports, a substrate having heat generating members for creating bubbles in liquid, and movable members facing the heat generating members, each being arranged in each liquid flow path, having the free end on the discharge port side with a specific gap with the heat generating member. This method comprises the steps of forming the boundary layer used for providing a gap between the movable member and the substrate above the heat generating member on the substrate, of laminating the movable member on the boundary layer so as to position the free end above the heat generating member, at the same time fixing the movable member on the substrate, and of forming the gap between the movable member and the heat generating member by use of the boundary layer. With the structure thus arranged, there is no need for the step to position the movable member with the substrate, and also, the movable portion of the movable member is separated from the substrate after the movable member is formed on the substrate and incorporated in the liquid discharge head so as to implement arranging the interior of each liquid flow path finer and more precisely.

    摘要翻译： 一种液体排出头的制造方法，具有用于排出液体的排出口，与排出口连通的液体流路，用于向排出口供给液体，具有用于在液体中形成气泡的发热部件的基板，以及面向热量的活动部件 每个液体流路中的每一个都具有与发热元件具有特定间隙的排气口侧的自由端。 该方法包括以下步骤：形成边界层，用于在基板上的发热部件上方的可移动部件和基板之间提供间隙，将可动部件层压在边界层上，以将自由端定位在热 同时将可动构件固定在基板上，并且通过使用边界层在可动构件和发热构件之间形成间隙。 利用如此布置的结构，不需要用基板定位可移动部件的步骤，并且在可移动部件形成在基板上之后，可移动部件的可动部分也与基板分离， 液体排出头，从而更精细地布置每个液体流动通道的内部。