公开(公告)号：US20100103490A1

公开(公告)日：2010-04-29

申请号：US12579571

申请日：2009-10-15

申请人： Kazutaka Noguchi ,  Takeshi Endo ,  Hiroshi Hatano ,  Tetsuya Noda ,  Hiroyuki Matsuda ,  Shigeru Yamasaki

发明人： Kazutaka Noguchi ,  Takeshi Endo ,  Hiroshi Hatano ,  Tetsuya Noda ,  Hiroyuki Matsuda ,  Shigeru Yamasaki

IPC分类号： G03H1/04 ,  G03H1/22

CPC分类号： G03H1/0486 ,  G03H1/2286 ,  G03H2001/0491 ,  G03H2222/36 ,  G11B7/0065 ,  G11B7/08564 ,  G11B7/131

摘要： In the optical information recording reproducing apparatus that makes a reference light beam to interfere with an information light beam so as to record the information of the information light beam in a recording medium based on a two light beam interference method, or irradiates the reference light beam to a recording medium so as to emit a light beam and reproduces information stored in the recording medium by leading the light beam emitted from the recording medium an the image light receiving element, the optical information recording reproducing apparatus comprises a detector to detect positional deviation of at least one of the reference light beam and the information light beam from a predetermined optical path; and a correcting mechanism to correct the positional deviation based on an output from the detector.

摘要翻译： 在使基准光束干涉信息光束以便根据两种光束干涉法将信息光束的信息记录在记录介质中的光信息记录重放装置中，或照射参考光束 通过将从记录介质发射的光束引导到图像光接收元件而发射光束并再现存储在记录介质中的信息，光信息记录再现装置包括检测器，以检测位置偏差 来自预定光路的参考光束和信息光中的至少一个; 以及基于来自检测器的输出来校正位置偏差的校正机构。

公开(公告)号：US08040783B2

公开(公告)日：2011-10-18

申请号：US12606705

申请日：2009-10-27

申请人： Takeshi Endo ,  Hiroshi Hatano ,  Tetsuya Noda ,  Kazutaka Noguchi ,  Hiroyuki Matsuda ,  Shigeru Yamasaki

发明人： Takeshi Endo ,  Hiroshi Hatano ,  Tetsuya Noda ,  Kazutaka Noguchi ,  Hiroyuki Matsuda ,  Shigeru Yamasaki

IPC分类号： G11B7/00

CPC分类号： G11B7/083 ,  G11B7/0065 ,  G11B7/082 ,  G11B7/1362

摘要： An optical information recording and reproducing apparatus relating to the invention employs a two-beam interference method. In the optical information recording and reproducing apparatus, a moving device moves an information recording medium between a recording and reproducing position and a retracting position, and a mirror moves together with the information recording medium. When the information recording medium moves to the recording and reproducing position, the mirror moves to a position which is displaced from the at least one of the reference beam and the information beam. When the information recording medium moves to the retracting position, the mirror moves to a position where the mirror can reflect the at least one of the reference beam and the information beam toward a detector for detecting a deviation of the at least one of the reference beam and the information beam.

摘要翻译： 本发明的光信息记录再现装置采用双光束干涉法。 在光学信息记录和再现装置中，移动装置在记录和再现位置与缩回位置之间移动信息记录介质，并且反射镜与信息记录介质一起移动。 当信息记录介质移动到记录和再现位置时，反射镜移动到从参考光束和信息光束中的至少一个偏移的位置。 当信息记录介质移动到缩回位置时，反射镜移动到反射镜可以将参考光束和信息光束中的至少一个反射到检测器的位置，用于检测参考光束中的至少一个的偏差 和信息光束。

公开(公告)号：US20100110865A1

公开(公告)日：2010-05-06

申请号：US12606705

申请日：2009-10-27

申请人： Takeshi Endo ,  Hiroshi Hatano ,  Tetsuya Noda ,  Kazutaka Noguchi ,  Hiroyuki Matsuda ,  Shigeru Yamasaki

发明人： Takeshi Endo ,  Hiroshi Hatano ,  Tetsuya Noda ,  Kazutaka Noguchi ,  Hiroyuki Matsuda ,  Shigeru Yamasaki

IPC分类号： G11B7/135 ,  G11B23/03

CPC分类号： G11B7/083 ,  G11B7/0065 ,  G11B7/082 ,  G11B7/1362

摘要： An optical information recording and reproducing apparatus relating to the invention employs a two-beam interference method. In the optical information recording and reproducing apparatus, a moving device moves an information recording medium between a recording and reproducing position and a retracting position, and a mirror moves together with the information recording medium. When the information recording medium moves to the recording and reproducing position, the mirror moves to a position which is displaced from the at least one of the reference beam and the information beam. When the information recording medium moves to the retracting position, the mirror moves to a position where the mirror can reflect the at least one of the reference beam and the information beam toward a detector for detecting a deviation of the at least one of the reference beam and the information beam.

摘要翻译： 本发明的光信息记录再现装置采用双光束干涉法。 在光学信息记录和再现装置中，移动装置在记录和再现位置与缩回位置之间移动信息记录介质，并且反射镜与信息记录介质一起移动。 当信息记录介质移动到记录和再现位置时，反射镜移动到从参考光束和信息光束中的至少一个偏移的位置。 当信息记录介质移动到缩回位置时，反射镜移动到反射镜可以将参考光束和信息光束中的至少一个反射到检测器的位置，用于检测参考光束中的至少一个的偏差 和信息光束。

公开(公告)号：US5561524A

公开(公告)日：1996-10-01

申请号：US364193

申请日：1994-12-27

申请人： Shigeru Yamasaki ,  Masafumi Sueyoshi

发明人： Shigeru Yamasaki ,  Masafumi Sueyoshi

IPC分类号： G01B9/02 ,  G03F7/20 ,  G12B5/00

CPC分类号： G01B9/02021 ,  G01B9/02018 ,  G01B9/02034 ,  G03F7/70716 ,  G03F7/70775 ,  G01B2290/70

摘要： An interferometric distance measuring interferometer comprises a light source (11) for irradiating a main light beam (L), a beam splitting member (56) for splitting the main light beam into a first light beam (MR1, MR2) and a second light beam (MM1, MM2), a first reflection member (28) and second reflection member (14) for reflecting the first light beam and the second light beam, respectively, an optical composition member (25) for compositing the first light beam reflected by the first reflection member (28) and the second light beam reflected by the second reflection member (14), and a photoelectric converter (19) for receiving the composited light beam from the optical composition member. Whereby, a relative displacement between the first reflection member (28) and the second reflection member (14) is detected based on a photoelectric conversion signal from the photoelectric converter (19). The apparatus according to the present invention further comprises an asymmetric conversion member (12) for establishing the optical intensity distribution of a cross-section of at least one beam selected from a group of light beams including the main light beam (L) irradiated from the light source (11), the first light beam (MR1, MR2) and the second light beam (MM1, MM2). The asymmetric conversion member is arranged at at least one portion on an optical path of the light beam between the light source (11) and the photoelectric converter (19).

摘要翻译： 干涉距离测量干涉仪包括用于照射主光束（L）的光源（11），用于将主光束分成第一光束（MR1，MR2）的分束构件（56）和第二光束 （MM1，MM2），第一反射构件（28）和第二反射构件（14），用于分别反射第一光束和第二光束;光学组合构件（25），用于将由 第一反射构件（28）和由第二反射构件（14）反射的第二光束，以及用于接收来自光学组合构件的复合光束的光电转换器（19）。 由此，基于来自光电转换器（19）的光电转换信号来检测第一反射构件（28）和第二反射构件（14）之间的相对位移。 根据本发明的装置还包括非对称转换构件（12），用于建立从包括从所述主光束（L）照射的主光束（L）的一组光束中选择的至少一个光束的横截面的光强度分布 光源（11），第一光束（MR1，MR2）和第二光束（MM1，MM2）。 非对称转换构件被布置在光源（11）和光电转换器（19）之间的光束的光路上的至少一部分上。

公开(公告)号：US5983513A

公开(公告)日：1999-11-16

申请号：US122754

申请日：1998-07-27

申请人： Atsushi Yamaguchi ,  Shigeru Yamasaki

发明人： Atsushi Yamaguchi ,  Shigeru Yamasaki

IPC分类号： B23Q1/00 ,  B23Q1/76 ,  F16F15/02 ,  F16F15/023 ,  F16F15/027 ,  G03F7/20 ,  G03F9/00 ,  G05B19/23 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66 ,  H01L21/68 ,  G01B5/004

CPC分类号： G03F7/70716 ,  F16F15/02 ,  F16F15/0232 ,  F16F15/027 ,  G03F7/70725 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/709 ,  G05B19/232 ,  G05B2219/37376 ,  G05B2219/37388 ,  G05B2219/42104 ,  G05B2219/45027 ,  G05B2219/49048 ,  G05B2219/49176

摘要： A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information. A method for manufacturing a staging apparatus and a method for controlling movement of a stage are also provided.

摘要翻译： 一种定位分段装置，包括设置在地板上的基座，设置在基座上并可移动到基座的台架，用于输出用于将台架移动到预定目标位置的平台定位信息的输出单元，设置在基座上的平台驱动单元 用于驱动载物台并输出驱动信息的载物台控制单元，用于控制载物台驱动单元根据载物台定位信息来加速和减速载物台以停止在目标位置的载物台位移检测单元， 由舞台驱动单元驱动的舞台的位移以输出舞台位移信息，以及设置在地板和底座之间的防振单元，用于向基座施加力以抑制由于移动而产生的底座的振动 阶段。 防振单元根据台位移信息和平台定位信息之一产生抑制力。 还提供了一种用于制造分级装置的方法和用于控制台的运动的方法。

公开(公告)号：US5832620A

公开(公告)日：1998-11-10

申请号：US593934

申请日：1996-01-30

申请人： Atsushi Yamaguchi ,  Shigeru Yamasaki

发明人： Atsushi Yamaguchi ,  Shigeru Yamasaki

IPC分类号： B23Q1/00 ,  B23Q1/76 ,  F16F15/02 ,  F16F15/023 ,  F16F15/027 ,  G03F7/20 ,  G03F9/00 ,  G05B19/23 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66 ,  H01L21/68 ,  G01B5/004

CPC分类号： G03F7/70716 ,  F16F15/02 ,  F16F15/0232 ,  F16F15/027 ,  G03F7/70725 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/709 ,  G05B19/232 ,  G05B2219/37376 ,  G05B2219/37388 ,  G05B2219/42104 ,  G05B2219/45027 ,  G05B2219/49048 ,  G05B2219/49176

摘要： A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information.

公开(公告)号：US06272763B1

公开(公告)日：2001-08-14

申请号：US09400540

申请日：1999-09-21

申请人： Atsushi Yamaguchi ,  Shigeru Yamasaki

发明人： Atsushi Yamaguchi ,  Shigeru Yamasaki

IPC分类号： G01B5004

CPC分类号： G03F7/70716 ,  F16F15/02 ,  F16F15/0232 ,  F16F15/027 ,  G03F7/70725 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/709 ,  G05B19/232 ,  G05B2219/37376 ,  G05B2219/37388 ,  G05B2219/42104 ,  G05B2219/45027 ,  G05B2219/49048 ,  G05B2219/49176

摘要： A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information. A method for manufacturing a staging apparatus and a method for controlling movement of a stage are also provided.

摘要翻译： 一种定位分段装置，包括设置在地板上的基座，设置在基座上并可移动到基座的台架，用于输出用于将台架移动到预定目标位置的平台定位信息的输出单元，设置在基座上的平台驱动单元 用于驱动载物台并输出驱动信息的载物台控制单元，用于控制载物台驱动单元根据载物台定位信息来加速和减速载物台以停止在目标位置的载物台位移检测单元， 由舞台驱动单元驱动的舞台的位移以输出舞台位移信息，以及设置在地板和底座之间的防振单元，用于向基座施加力以抑制由于移动而产生的底座的振动 阶段。 防振单元根据台位移信息和平台定位信息之一产生抑制力。 还提供了一种用于制造分级装置的方法和用于控制台的运动的方法。

公开(公告)号：US6122036A

公开(公告)日：2000-09-19

申请号：US206238

申请日：1998-12-07

申请人： Shigeru Yamasaki ,  Masahiko Okumura

发明人： Shigeru Yamasaki ,  Masahiko Okumura

IPC分类号： G03B27/42 ,  G03F7/20 ,  G03F9/00 ,  G03B27/54

CPC分类号： G03F7/70691 ,  G03B27/42 ,  G03F7/70358 ,  G03F9/7034

摘要： In a projection exposure apparatus and method in which a substrate is exposed with a projected image of a mask through a projection optical system, a table which is movable in a direction of an optical axis of the projection optical system in arranged at an image side of the projection optical system to hold the substrate. A tilt amount of the table is monitored, and position information of a mark on the table is detected, which changes in accordance with the tilt of the table. Information on the relationship between a displacement amount of the substrate and a plane perpendicular to the optical axis and the tilt angle of the substrate is obtained, based on the monitored tilt amount and the position information of the mark.

摘要翻译： 在通过投影光学系统以掩模的投影图像曝光基板的投影曝光装置和方法中，可以在投影光学系统的光轴的方向上移动的工作台，该工作台布置在投影光学系统的图像侧 投影光学系统保持基板。 监视表的倾斜量，并检测表上的标记的位置信息，其根据表的倾斜而改变。 基于所监视的倾斜量和标记的位置信息，获得关于基板的位移量和垂直于光轴的平面与基板的倾斜角之间的关系的信息。

公开(公告)号：US5502899A

公开(公告)日：1996-04-02

申请号：US481203

申请日：1995-06-07

申请人： Atsushi Yamaguchi ,  Shigeru Yamasaki

发明人： Atsushi Yamaguchi ,  Shigeru Yamasaki

IPC分类号： B23Q1/00 ,  B23Q1/76 ,  F16F15/02 ,  F16F15/023 ,  F16F15/027 ,  G03F7/20 ,  G03F9/00 ,  G05B19/23 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66 ,  H01L21/68 ,  G01B5/004

CPC分类号： G03F7/70716 ,  F16F15/02 ,  F16F15/0232 ,  F16F15/027 ,  G03F7/70725 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/709 ,  G05B19/232 ,  G05B2219/37376 ,  G05B2219/37388 ,  G05B2219/42104 ,  G05B2219/45027 ,  G05B2219/49048 ,  G05B2219/49176

摘要： A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information.

摘要翻译： 一种定位分段装置，包括设置在地板上的基座，设置在基座上并可移动到基座的台架，用于输出用于将台架移动到预定目标位置的平台定位信息的输出单元，设置在基座上的平台驱动单元 用于驱动载物台并输出驱动信息的载物台控制单元，用于控制载物台驱动单元根据载物台定位信息来加速和减速载物台以停止在目标位置的载物台位移检测单元， 由舞台驱动单元驱动的舞台的位移以输出舞台位移信息，以及设置在地板和底座之间的防振单元，用于向基座施加力以抑制由于移动而产生的底座的振动 阶段。 防振单元根据台位移信息和平台定位信息之一产生抑制力。