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公开(公告)号：US09046796B2
公开(公告)日：2015-06-02
申请号：US13407620
申请日：2012-02-28
CPC分类号： G03F7/70958 , G03F7/70341
摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
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公开(公告)号：US08149381B2
公开(公告)日：2012-04-03
申请号：US11415160
申请日：2006-05-02
CPC分类号： G03F7/70958 , G03F7/70341
摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
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公开(公告)号：US20090103070A1
公开(公告)日：2009-04-23
申请号：US12292271
申请日：2008-11-14
IPC分类号： G03F7/20
CPC分类号： G03F7/70341 , G02B1/105 , G02B1/14 , G03F7/70875 , G03F7/70958 , G03F7/70983
摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
摘要翻译： 光学元件用于曝光装置，其被配置为用曝光光束照射掩模，用于通过投影光学系统将掩模上的图案转印到基板上，并将给定的液体插入在 基板和投影光学系统。 光学元件包括设置在投影光学系统的基板侧的透射光学元件的表面上的第一防溶解部件。
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公开(公告)号：US08189170B2
公开(公告)日：2012-05-29
申请号：US12659121
申请日：2010-02-25
IPC分类号： G03B27/42
CPC分类号： G03F7/70341 , G02B1/105 , G02B1/14 , G03F7/70875 , G03F7/70958 , G03F7/70983
摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
摘要翻译： 光学元件用于曝光装置，其被配置为用曝光光束照射掩模，用于通过投影光学系统将掩模上的图案转印到基板上，并将给定的液体插入在 基板和投影光学系统。 光学元件包括设置在投影光学系统的基板侧的透射光学元件的表面上的第一防溶解部件。
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公开(公告)号：US07697111B2
公开(公告)日：2010-04-13
申请号：US10569207
申请日：2004-08-26
IPC分类号： G03B27/42
CPC分类号： G03F7/70341 , G02B1/105 , G02B1/14 , G03F7/70875 , G03F7/70958 , G03F7/70983
摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
摘要翻译： 光学元件用于曝光装置，其被配置为用曝光光束照射掩模，用于通过投影光学系统将掩模上的图案转印到基板上，并将给定的液体插入在 基板和投影光学系统。 光学元件包括设置在投影光学系统的基板侧的透射光学元件的表面上的第一防溶解部件。
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公开(公告)号：US07993008B2
公开(公告)日：2011-08-09
申请号：US12292271
申请日：2008-11-14
IPC分类号： G03B27/42
CPC分类号： G03F7/70341 , G02B1/105 , G02B1/14 , G03F7/70875 , G03F7/70958 , G03F7/70983
摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
摘要翻译： 光学元件用于曝光装置，其被配置为用曝光光束照射掩模，用于通过投影光学系统将掩模上的图案转印到基板上，并将给定的液体插入在 基板和投影光学系统。 光学元件包括设置在投影光学系统的基板侧的透射光学元件的表面上的第一防溶解部件。
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公开(公告)号：US20100220305A1
公开(公告)日：2010-09-02
申请号：US12659121
申请日：2010-02-25
CPC分类号： G03F7/70341 , G02B1/105 , G02B1/14 , G03F7/70875 , G03F7/70958 , G03F7/70983
摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
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公开(公告)号：US20060203218A1
公开(公告)日：2006-09-14
申请号：US11415160
申请日：2006-05-02
IPC分类号： G03B27/42
CPC分类号： G03F7/70958 , G03F7/70341
摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
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公开(公告)号：US20060291060A1
公开(公告)日：2006-12-28
申请号：US10569207
申请日：2004-08-26
IPC分类号： G02B1/10
CPC分类号： G03F7/70341 , G02B1/105 , G02B1/14 , G03F7/70875 , G03F7/70958 , G03F7/70983
摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
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10.发明申请Method for producing Ca-La-F based transparent ceramic, Ca-La-F based transparent ceramic, optical element, optical system, and ceramic-forming composition 有权用于生产Ca-La-F系透明陶瓷，Ca-La-F系透明陶瓷，光学元件，光学系统和陶瓷形成组合物的方法公开(公告)号：US20100323878A1
公开(公告)日：2010-12-23
申请号：US12801512
申请日：2010-06-11
申请人： Hitoshi Ishizawa
发明人： Hitoshi Ishizawa
IPC分类号： C04B35/553 , G02B3/00
CPC分类号： C04B35/553 , B82Y30/00 , C04B35/6263 , C04B35/62635 , C04B35/6264 , C04B35/645 , C04B35/6455 , C04B2235/3208 , C04B2235/3225 , C04B2235/3227 , C04B2235/449 , C04B2235/5252 , C04B2235/5436 , C04B2235/5445 , C04B2235/5454 , C04B2235/549 , C04B2235/661 , C04B2235/761 , C04B2235/9653 , C04B2235/9661 , G02B1/02
摘要： A method of producing a Ca—La—F based transparent ceramic, including: mixing CaF2 particles and LaF3 particles that are prepared separately from the CaF2 particles to form a mixed body of particles, and sintering the mixed body of particles and making the mixed body transparent, thereby producing a transparent ceramic.
摘要翻译： 一种Ca-La-F系透明陶瓷的制造方法，其特征在于，包括：将与CaF 2粒子分开制备的CaF 2粒子和LaF 3粒子混合，形成粒子的混合体，并烧结混合体的粒子， 透明，从而产生透明陶瓷。
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