公开(公告)号：US20110311339A1

公开(公告)日：2011-12-22

申请号：US13163165

申请日：2011-06-17

申请人： Takeshi YASUI ,  Yukitomo HIROCHI ,  Satoshi TAKANO ,  Ritsuo HORII ,  Makoto KAWABATA

发明人： Takeshi YASUI ,  Yukitomo HIROCHI ,  Satoshi TAKANO ,  Ritsuo HORII ,  Makoto KAWABATA

IPC分类号： H01L21/677

CPC分类号： H01L21/67196 ,  H01J37/32743 ,  H01J37/32788 ,  H01J37/32889 ,  H01J37/32899 ,  H01L21/67201

摘要： Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher temperature while cooling a plurality of substrates in a cooling chamber. The substrate processing apparatus includes a load lock chamber configured to accommodate stacked substrates; a first transfer mechanism having a first transfer arm provided with a first end effector, and configured to transfer the substrates into/from the load lock chamber at a first side of the load lock chamber; a second transfer mechanism having a second transfer arm provided with a second end effector, and configured to transfer the substrates into/from the load lock chamber at a second side of the load lock chamber; a barrier installed between the substrates to be spaced apart from the substrates supported by a substrate support provided in the load lock chamber; and a barrier auxiliary unit installed between the substrate support and the barrier, wherein the barrier auxiliary unit is installed at places other than standby spaces of the end effectors.

摘要翻译： 由于具有较低温度的基板在冷却室中冷却多个基板的同时不受具有较高温度的基板的辐射热的影响，因此抑制了具有较低温度的基板的冷却速率的降低。 基板处理装置包括：负载锁定室，被配置为容纳堆叠的基板; 第一传送机构，其具有设置有第一端部执行器的第一传送臂，并且被配置为在所述负载锁定室的第一侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 第二传送机构，具有设置有第二端部执行器的第二传送臂，并且被配置为在所述负载锁定室的第二侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 安装在基板之间的屏障，其与由设置在负载锁定室中的基板支撑件支撑的基板间隔开; 以及安装在基板支撑件和屏障之间的屏障辅助单元，其中屏障辅助单元安装在末端执行器的备用空间以外的位置。

公开(公告)号：US20080230661A1

公开(公告)日：2008-09-25

申请号：US12042796

申请日：2008-03-05

申请人： Makoto KAWABATA

发明人： Makoto KAWABATA

IPC分类号： F16B47/00 ,  B29C70/80

CPC分类号： F16B47/00 ,  B29C45/0001 ,  B29C45/0053 ,  B29C45/16 ,  B29K2221/003

摘要： A suction cup, includes: a suction cup body made of a synthetic resin material having elasticity; and a gel layer bonded to the suction cup body and having a surface serving as a suction face; the suction cup body being made of thermoplastic polyurethane elastomer, the gel layer being made of two-pack thermosetting polyurethane gel, the suction cup body and the gel layer being bonded to each other by bonding of an isocyanate group which the thermoplastic polyurethane elastomer has and a hydroxyl group which the two-pack thermosetting polyurethane gel has.

摘要翻译： 吸盘包括：具有弹性的合成树脂材料制成的吸盘体; 以及凝胶层，其结合到所述吸盘体并具有用作吸力面的表面; 吸盘主体由热塑性聚氨酯弹性体制成，凝胶层由双组分热固性聚氨酯凝胶制成，吸杯体和凝胶层通过热塑性聚氨酯弹性体具有的异氰酸酯基团与 双组分热固性聚氨酯凝胶具有的羟基。