公开(公告)号：US20080236291A1

公开(公告)日：2008-10-02

申请号：US12139881

申请日：2008-06-16

申请人： Takeshi Yane ,  Yasuhiro Mizohata

发明人： Takeshi Yane ,  Yasuhiro Mizohata

IPC分类号： G01L7/08

CPC分类号： G01L9/0072 ,  G01L9/0077

摘要： A pressure sensor comprises a thin disk-shaped diaphragm, a laser displacement meter for detecting an amount of deformation of the diaphragm, and an operation part connected to the laser displacement meter. In the pressure sensor, an amount of deformation of the diaphragm due to pressure of fluid flowing into the pressure sensor is detected by the laser displacement meter, and pressure of the fluid is obtained on the basis of the amount of deformation and conversion information stored in the operation part in advance. The base part of the diaphragm of the pressure sensor is made of graphite (or silicon substrate), and a thin film of silicon carbide which is in contact with fluid is formed on a surface of the base part. This improves chemical resistance to the pressure sensor and extends the lifetime of the pressure sensor while preventing metal elution.

摘要翻译： 压力传感器包括薄盘状隔膜，用于检测隔膜变形量的激光位移计和连接到激光位移计的操作部。 在压力传感器中，通过激光位移计检测由于流入压力传感器的流体的压力引起的膜片的变形量，并且基于存储在压力传感器的变形量和转换信息的数量获得流体的压力 操作部分提前。 压力传感器的隔膜的基部由石墨（或硅基板）制成，并且在基部的表面上形成与流体接触的碳化硅薄膜。 这提高了对压力传感器的耐化学性，并延长了压力传感器的寿命，同时防止金属洗脱。

公开(公告)号：US07409864B2

公开(公告)日：2008-08-12

申请号：US11417765

申请日：2006-05-01

申请人： Takeshi Yane ,  Yasuhiro Mizohata

发明人： Takeshi Yane ,  Yasuhiro Mizohata

IPC分类号： G01L7/08

CPC分类号： G01L9/0072 ,  G01L9/0077

摘要： A pressure sensor comprises a thin disk-shaped diaphragm, a laser displacement meter for detecting an amount of deformation of the diaphragm, and an operation part connected to the laser displacement meter. In the pressure sensor, an amount of deformation of the diaphragm due to pressure of fluid flowing into the pressure sensor is detected by the laser displacement meter, and pressure of the fluid is obtained on the basis of the amount of deformation and conversion information stored in the operation part in advance. The base part of the diaphragm of the pressure sensor is made of graphite (or silicon substrate), and a thin film of silicon carbide which is in contact with fluid is formed on a surface of the base part. This improves chemical resistance to the pressure sensor and extends the lifetime of the pressure sensor while preventing metal elution.

摘要翻译： 压力传感器包括薄盘状隔膜，用于检测隔膜变形量的激光位移计和连接到激光位移计的操作部。 在压力传感器中，通过激光位移计检测由于流入压力传感器的流体的压力引起的膜片的变形量，并且基于存储在压力传感器的变形量和转换信息的数量获得流体的压力 操作部分提前。 压力传感器的隔膜的基部由石墨（或硅基板）制成，并且在基部的表面上形成与流体接触的碳化硅薄膜。 这提高了对压力传感器的耐化学性，并延长了压力传感器的寿命，同时防止金属洗脱。

公开(公告)号：US20060260409A1

公开(公告)日：2006-11-23

申请号：US11417765

申请日：2006-05-01

申请人： Takeshi Yane ,  Yasuhiro Mizohata

发明人： Takeshi Yane ,  Yasuhiro Mizohata

IPC分类号： G01L7/08

CPC分类号： G01L9/0072 ,  G01L9/0077

摘要： A pressure sensor comprises a thin disk-shaped diaphragm, a laser displacement meter for detecting an amount of deformation of the diaphragm, and an operation part connected to the laser displacement meter. In the pressure sensor, an amount of deformation of the diaphragm due to pressure of fluid flowing into the pressure sensor is detected by the laser displacement meter, and pressure of the fluid is obtained on the basis of the amount of deformation and conversion information stored in the operation part in advance. The base part of the diaphragm of the pressure sensor is made of graphite (or silicon substrate), and a thin film of silicon carbide which is in contact with fluid is formed on a surface of the base part. This improves chemical resistance to the pressure sensor and extends the lifetime of the pressure sensor while preventing metal elution.

摘要翻译： 压力传感器包括薄盘状隔膜，用于检测隔膜变形量的激光位移计和连接到激光位移计的操作部。 在压力传感器中，通过激光位移计检测由于流入压力传感器的流体的压力引起的膜片的变形量，并且基于存储在压力传感器的变形量和转换信息的数量获得流体的压力 操作部分提前。 压力传感器的隔膜的基部由石墨（或硅基板）制成，并且在基部的表面上形成与流体接触的碳化硅薄膜。 这提高了对压力传感器的耐化学性，并延长了压力传感器的寿命，同时防止金属洗脱。

公开(公告)号：US08361831B2

公开(公告)日：2013-01-29

申请号：US12636358

申请日：2009-12-11

申请人： Takeshi Yane

发明人： Takeshi Yane

IPC分类号： H01L27/142 ,  H01L21/288

CPC分类号： C25D3/22 ,  C23C18/1262 ,  C23C18/54 ,  H01G9/204 ,  H01G9/2059 ,  Y02E10/542

摘要： In the zinc oxide film forming apparatus (1), the deposit containing zinc oxide is formed on the conductive layer of the resin substrate (9) by electrodeposition in the deposition part (2), and the resin substrate (9) is carried to the applying part (4). Subsequently, the film forming material which is in liquid or paste form and contains particles of zinc oxide and solvent is applied onto the conductive layer, and then the solvent is removed from the film forming material on the conductive layer by volatilization. It is therefore possible to easily and efficiently form the porous zinc oxide film which has superior adhesion to the conductive layer of the resin substrate (9).

摘要翻译： 在氧化锌膜形成装置（1）中，通过在沉积部分（2）中电沉积，在树脂基板（9）的导电层上形成含有氧化锌的沉积物，并将树脂基板（9） 施加部分（4）。 随后，将形成液体或糊状并含有氧化锌和溶剂颗粒的成膜材料施加到导电层上，然后通过挥发将溶剂从导电层上的成膜材料中除去。 因此，可以容易且有效地形成与树脂基板（9）的导电层具有优异粘附性的多孔氧化锌膜。

公开(公告)号：US20100167460A1

公开(公告)日：2010-07-01

申请号：US12636358

申请日：2009-12-11

申请人： Takeshi Yane

发明人： Takeshi Yane

IPC分类号： H01L31/18 ,  C23C14/00

CPC分类号： C25D3/22 ,  C23C18/1262 ,  C23C18/54 ,  H01G9/204 ,  H01G9/2059 ,  Y02E10/542

摘要： In the zinc oxide film forming apparatus (1), the deposit containing zinc oxide is formed on the conductive layer of the resin substrate (9) by electrodeposition in the deposition part (2), and the resin substrate (9) is carried to the applying part (4). Subsequently, the film forming material which is in liquid or paste form and contains particles of zinc oxide and solvent is applied onto the conductive layer, and then the solvent is removed from the film forming material on the conductive layer by volatilization. It is therefore possible to easily and efficiently form the porous zinc oxide film which has superior adhesion to the conductive layer of the resin substrate (9).

摘要翻译： 在氧化锌膜形成装置（1）中，通过在沉积部分（2）中电沉积，在树脂基板（9）的导电层上形成含有氧化锌的沉积物，并将树脂基板（9） 施加部分（4）。 随后，将形成液体或糊状并含有氧化锌和溶剂颗粒的成膜材料施加到导电层上，然后通过挥发将溶剂从导电层上的成膜材料中除去。 因此，可以容易且有效地形成与树脂基板（9）的导电层具有优异粘附性的多孔氧化锌膜。

公开(公告)号：US06958113B2

公开(公告)日：2005-10-25

申请号：US10347770

申请日：2003-01-17

申请人： Yasuhiro Mizohata ,  Takeshi Yane

发明人： Yasuhiro Mizohata ,  Takeshi Yane

IPC分类号： C25D1/00 ,  C25D3/38 ,  C25D7/12 ,  C25D17/00 ,  C25D17/06 ,  C25D17/10 ,  C25D19/00 ,  C25D21/12 ,  C25D21/14 ,  H01L21/288 ,  H01L21/445

CPC分类号： C25D21/14 ,  C25D7/123 ,  C25D17/001 ,  C25D21/12 ,  H01L21/2885

摘要： A plating apparatus for plating a substrate. The apparatus is provided with a plating unit, a substrate cleaning unit, a substrate transport mechanism, a post-treatment agent supplying section, a minor constituent managing section for managing minor constituents (an accelerator, a retarder and chlorine) of a plating liquid being used in the plating unit, an enclosure which houses therein a substrate treating section including the plating unit, the cleaning unit and the substrate transport mechanism, and a system controller for controlling the entire apparatus.

摘要翻译： 一种用于电镀基板的电镀装置。 该装置设置有电镀单元，基板清洁单元，基板输送机构，后处理剂供给部，用于管理电镀液体的次要成分（促进剂，缓凝剂和氯）的次成分管理部， 在电镀单元中使用的外壳，其中容纳有包括电镀单元，清洁单元和基板输送机构的基板处理部的外壳，以及用于控制整个设备的系统控制器。