公开(公告)号：US07329842B2

公开(公告)日：2008-02-12

申请号：US11590812

申请日：2006-11-01

申请人： Takuma Kushihashi ,  Noboru Kimura ,  Masaki Seki

发明人： Takuma Kushihashi ,  Noboru Kimura ,  Masaki Seki

IPC分类号： H05B3/06

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： A ceramic heater including a plate member made of insulating ceramics in which one or more pair(s) of through-holes are formed, a rod member made of conductive ceramics with a power-supply terminal at one end. The rod member is inserted into the through hole in the plate member. A conductive layer made of conductive ceramics is formed on the plate member; and a coating layer made of insulating ceramics is formed on the conductive layer. One end face of the rod member has a same plane with a main surface of the plate member, the conductive layer has a heater pattern formed on the main surface of the plate member, and the rod members are electrically insulated not to be short-circuited to each other in the opposite main surface.

摘要翻译： 一种陶瓷加热器，包括由绝缘陶瓷制成的板构件，其中形成有一对或多个通孔，由一端具有电源端子的导电陶瓷制成的杆构件。 杆构件插入板构件中的通孔中。 由导电陶瓷制成的导电层形成在板件上; 并且在导电层上形成由绝缘陶瓷制成的涂层。 杆构件的一个端面具有与板构件的主表面相同的平面，导电层具有形成在板构件的主表面上的加热器图案，并且杆构件电绝缘不会短路 彼此相对的主表面。

公开(公告)号：US20070102419A1

公开(公告)日：2007-05-10

申请号：US11590812

申请日：2006-11-01

申请人： Takuma Kushihashi ,  Noboru Kimura ,  Masaki Seki

发明人： Takuma Kushihashi ,  Noboru Kimura ,  Masaki Seki

IPC分类号： H05B3/06

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： There is disclosed a ceramic heater 11 comprising: at least a plate member 12 made of insulating ceramics in which one or more pair(s) of through-holes 13 are formed; a rod member 14, being made of conductive ceramics, having a power-supply terminal 18 at one end thereof, and being inserted into the through-hole 13 at another end thereof; a conductive layer 19 made of conductive ceramics formed on the plate member 12; and a coating layer 21 made of insulating ceramics formed on the conductive layer; wherein one end face 16 of the rod member has a same plane with a main surface 15 of the plate member; the conductive layer 19 having a heater pattern 20 is formed on the main surface 15 of the plate member having the same plane; and the rod members 14 are electrically insulated not to be short-circuited to each other in the opposite main surface 17. There can be provided a ceramic heater by which an object to be heated being directly put thereon can be heated uniformly and of which heating efficiency is high and in which the heater main body is not large in size and is compact.

摘要翻译： 公开了一种陶瓷加热器11，其包括：至少一个由绝缘陶瓷制成的板构件12，其中形成有一对或多个通孔13; 杆状构件14，由导电陶瓷制成，在其一端具有电源端子18，并在其另一端插入通孔13中; 由导电陶瓷制成的导电层19形成在板件12上; 以及形成在导电层上的由绝缘陶瓷制成的涂层21; 其中所述杆构件的一个端面16与所述板构件的主表面15具有相同的平面; 具有加热器图案20的导电层19形成在具有相同平面的板构件的主表面15上; 并且杆构件14在相对的主表面17中彼此电绝缘不彼此短路。可以提供一种陶瓷加热器，其中直接放置在其上的被加热物体可以被均匀地加热，并且加热 效率高，加热器主体尺寸不大，结构紧凑。

公开(公告)号：US06949726B2

公开(公告)日：2005-09-27

申请号：US10923835

申请日：2004-08-24

申请人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

发明人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

IPC分类号： H01L21/00 ,  H01L21/02 ,  H01L21/324 ,  H01L21/683 ,  H01L21/687 ,  H02N13/00 ,  H05B3/16

CPC分类号： H01L21/68757 ,  H01L21/67103 ,  H01L21/6833

摘要： A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra≦0.05 μm and Rmax≦0.6 μm, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.

摘要翻译： 具有静电吸附功能的加热装置至少包括支撑基板，用于静电吸附的电极和形成在支撑基板上的加热层，以及形成为覆盖静电吸附用电极和加热层的绝缘层，其中， 绝缘层的表面粗糙度满足Ra <0.05μm，Rmax <=0.6μm，绝缘层表面的维氏硬度为10GPa以下。 因此，可以提供一种具有静电吸附功能的加热装置，其中在硅晶片等上不产生划痕，并且当加热/冷却晶片等时可以抑制颗粒的产生。

公开(公告)号：US20050045619A1

公开(公告)日：2005-03-03

申请号：US10923835

申请日：2004-08-24

申请人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

发明人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

IPC分类号： H01L21/00 ,  H01L21/02 ,  H01L21/324 ,  H01L21/683 ,  H01L21/687 ,  H02N13/00 ,  H05B3/68 ,  H05B3/16

CPC分类号： H01L21/68757 ,  H01L21/67103 ,  H01L21/6833

摘要： A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra≦0.05 μm and Rmax≦0.6 μm, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.

公开(公告)号：US06924012B2

公开(公告)日：2005-08-02

申请号：US09780355

申请日：2001-02-12

申请人： Noboru Kimura ,  Kenji Satoh ,  Masaki Seki

发明人： Noboru Kimura ,  Kenji Satoh ,  Masaki Seki

IPC分类号： C30B23/08 ,  C23C16/01 ,  C23C16/34 ,  C23C16/38 ,  C30B23/06 ,  H01L21/203 ,  B32B1/02

CPC分类号： C23C16/342 ,  C23C16/01 ,  C30B23/066 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/1321 ,  Y10T428/1345

摘要： A pyrolytic boron nirtride double container for a source of molecular beams used in molecular beam epitaxy, wherein the transmissivity of an inner container of the pyrolytic boron nitride double container with respect to light having a wave number of 2600 cm−1 to 6500 cm−1 is 90% or less of that of an outer container. The pyrolytic boron nitride double container, which enables molecular beams to generate stably with good temperature controllability and high heat efficiency and which can be used in a stable manner, is provided through a simple process and at low cost, so that molecular beam epitaxial growth can be stabilized, quality of the epitaxial film can be improved, and even though the rise and drop in the temperature of the material melt is repeated, or even at an emergency suspension of the operation, the trouble due to breakage of the container can be prevented.

摘要翻译： 用于分子束外延中使用的分子束源的热解硼氮化物双容器，其中热解氮化硼双容器的内部容器相对于波数为2600cm -1的光的透射率为 SUP>至6500厘米-1以下的外容器的90％以下。 通过简单的工艺和低成本的方式提供使分子束稳定地产生具有良好的温度可控性和高热效率并且可以稳定使用的热解氮化硼双容器，从而使分子束外延生长可以 稳定化，可以提高外延膜的质量，并且即使重复材料熔融物的温度升高或降低，或者甚至在操作的紧急暂停时，可以防止由于容器破裂引起的故障 。

公开(公告)号：US08418932B2

公开(公告)日：2013-04-16

申请号：US12745243

申请日：2008-11-28

申请人： Masaki Seki ,  Kazuhiro Miwa ,  Tomomi Funada ,  Hironari Muramatsu ,  Takaaki Irie ,  Yoshio Morikawa ,  Katsunari Konishi ,  Tetsuya Hanazaki

发明人： Masaki Seki ,  Kazuhiro Miwa ,  Tomomi Funada ,  Hironari Muramatsu ,  Takaaki Irie ,  Yoshio Morikawa ,  Katsunari Konishi ,  Tetsuya Hanazaki

IPC分类号： E01B5/18

CPC分类号： E01B5/18

摘要： A wheel guard apparatus capable of preventing a wheel from derailing and preventing a vehicle from seriously deviating from a track even if the wheel has derailed includes a fixed portion fixed to a railroad tie located between main line rails; a movable portion supported by a rotating shaft provided on the fixed portion and extending in a horizontal direction and configured to be rotatable around the rotating shaft toward a track center side; and a guard rail located at a position separated from the rotating shaft of the movable portion and held to extend in parallel with the main line rail. The guard rail includes an outer stopper portion configured to prevent the wheel from derailing toward an inner side of the main line rail and an inner stopper portion configured to prevent a derailed vehicle from deviating to an outer side of a track.

摘要翻译： 即使车轮脱轨，也能够防止车轮脱轨并防止车辆严重偏离轨道的车轮防护装置包括固定在位于主线轨道之间的铁路连接线的固定部分; 可动部，其由设置在所述固定部上的旋转轴支撑，并且在水平方向上延伸并且能够围绕所述旋转轴向轨道中心侧旋转; 以及位于与可动部的旋转轴分离的位置并与主线轨道平行地延伸的保护轨道。 保护轨包括：外止动部，其构造成防止车轮朝向主线轨道的内侧脱轨;以及内止挡部，其构造成防止脱轨车辆偏离轨道的外侧。

公开(公告)号：US07891577B2

公开(公告)日：2011-02-22

申请号：US11914542

申请日：2006-05-11

申请人： Masaki Seki ,  Takashi Kachi ,  Tomomi Funada ,  Takaaki Irie ,  Katsunari Konishi ,  Tetsuya Hanazaki

发明人： Masaki Seki ,  Takashi Kachi ,  Tomomi Funada ,  Takaaki Irie ,  Katsunari Konishi ,  Tetsuya Hanazaki

IPC分类号： E01B5/18

CPC分类号： E01B5/18

摘要： A derailment prevention guard includes a guard member (3) installed within a gauge and a support member (6) fixed to a sleeper (4) or a concrete slab track. The guard member (3) engages a hold member (8) moveable around an axis (7) supported by the support member (6) as turning center between a main rail (1) and the inside of the gauge on the sleeper. The support member (6) engages the hold member (8) by bolt (12) through turning the hold member (8) toward the main rail (1) around the central axis (7) as turning center on the sleeper (4), and the guard member (3) can be shunted inward by turning the hold member (8) toward the inside of the gauge around the central axis (7) as turning center on the sleeper (4) after loosening the bolt (12).

摘要翻译： 脱轨防护装置包括安装在量规内的保护构件（3）和固定到轨枕（4）或混凝土板轨道的支撑构件（6）。 保护构件（3）接合作为在主轨道（1）和轨枕之间的量规的内侧之间的转动中心可绕由支撑构件（6）支撑的轴线（7）移动的保持构件（8）。 支撑构件（6）通过螺栓（12）通过围绕轨枕（4）的转动中心使保持构件（8）围绕中心轴线（7）朝向主轨道（1）接合， 并且通过在松开螺栓（12）之后转动中心在轨枕（4）上的转动中心，使保持构件（8）绕着中心轴线（7）朝向计量器的内部转动，从而将保护构件（3）向内分流。

公开(公告)号：US20090200389A1

公开(公告)日：2009-08-13

申请号：US11914542

申请日：2006-05-11

申请人： Masaki Seki ,  Takashi Kachi ,  Tomomi Funada ,  Takaaki Irie ,  Katsunari Konishi ,  Tetsuya Hanazaki

发明人： Masaki Seki ,  Takashi Kachi ,  Tomomi Funada ,  Takaaki Irie ,  Katsunari Konishi ,  Tetsuya Hanazaki

IPC分类号： E01B5/18 ,  E01B9/00

CPC分类号： E01B5/18

摘要： A derailment prevention guard includes a guard member (3) installed within a gauge and a support member (6) fixed to a sleeper (4) or a concrete slab track. The guard member (3) engages a hold member (8) which can turn moveable around an axis (7) supported by the support member (6) as turning center between a main rail (1) and the inside of the gauge on the sleeper. The support member (6) engages the hold member (8) by bolt (12) through turning the hold member (8) toward the main rail (1) around the central axis (7) as turning center on the sleeper (4), and the guard member (3) can be shunted inward by turning the hold member (8) toward the inside of the gauge around the central axis (7) as turning center on the sleeper (4) after loosening the bolt (12).

摘要翻译： 脱轨防护装置包括安装在量规内的保护构件（3）和固定到轨枕（4）或混凝土板轨道的支撑构件（6）。 保护构件（3）接合保持构件（8），该保持构件（8）可以围绕由支撑构件（6）支撑的轴线（7）转动，作为主轨道（1）和轨枕之间的量规的内侧之间的转动中心 。 支撑构件（6）通过螺栓（12）通过围绕轨枕（4）的转动中心使保持构件（8）围绕中心轴线（7）朝向主轨道（1）接合， 并且通过在松开螺栓（12）之后转动中心在轨枕（4）上的转动中心，使保持构件（8）绕着中心轴线（7）朝向计量器的内部转动，从而将保护构件（3）向内分流。

公开(公告)号：US5410489A

公开(公告)日：1995-04-25

申请号：US979867

申请日：1993-02-26

申请人： Masaki Seki ,  Osamu Hanaoka

发明人： Masaki Seki ,  Osamu Hanaoka

IPC分类号： G05B19/4093 ,  G05B19/4097 ,  G05B19/4099 ,  G06F15/46

CPC分类号： G05B19/4099 ,  G05B19/40938 ,  G05B2219/24139 ,  G05B2219/25232 ,  G05B2219/34098 ,  G05B2219/35114 ,  G05B2219/35141 ,  Y02P90/265

摘要： Disclosed is a method of specifying with a program language the location of a fillet to be created at the intersection of a compound curved surface. After the processings for inputting information on a curved surface and information for cutting the same (S1, S2) and calculating the curved surfaces (S3) have been completed, a system receives information on the alternative of inserting a concave fillet or inserting a convex fillet (S4). When the inputted information is for the concave fillet, based on the inputted information (S5), the system executes a predetermined calculation so as to create the concave fillet curved surface at the boundary between two curved surfaces, each on the side to which their respective normal vectors are directed (S6). On the other hand, when the input is the convex fillet, the system executes a predetermined calculation to create the convex fillet curved surface at the boundary between the two surfaces, each on the side opposite to the side to which their respective normal vectors are directed (S7).

摘要翻译： PCT No.PCT / JP92 / 00854 Sec。 371日期：1993年2月26日 102（e）日期1993年2月26日PCT提交1992年7月6日PCT公布。 第WO93 / 01535号公报 日期1993年1月21日。公开是一种使用程序语言指定要在复合曲面的交叉处创建的圆角的位置的方法。 在完成了用于在曲面上输入信息的处理和用于切割曲面的信息（S1，S2）和计算曲面（S3）之后，系统接收关于插入凹角或插入凸角的替代方案的信息 （S4）。 当所输入的信息是针对凹面圆角时，基于输入的信息（S5），系统执行预定的计算，以便在两个曲面之间的边界处形成凹曲面曲面， 法线向量被定向（S6）。 另一方面，当输入为凸角时，系统执行预定的计算，以在两个表面之间的边界处产生凸角圆弧曲面，每个在与它们各自的法向量指向的一侧相对的一侧 （S7）。

公开(公告)号：US5155425A

公开(公告)日：1992-10-13

申请号：US640426

申请日：1991-01-14

申请人： Masaki Seki ,  Takashi Takegahara ,  Masatoshi Nakajima

发明人： Masaki Seki ,  Takashi Takegahara ,  Masatoshi Nakajima

IPC分类号： G05B19/4069 ,  G05B19/406 ,  G05B19/4068

CPC分类号： G05B19/406 ,  G05B19/4068 ,  G05B2219/34365 ,  G05B2219/35287 ,  G05B2219/35293

摘要： An NC data execution method which permits an efficient checking of the validity/invalidity of NC data through a simple operation. In an NC data execution process, a processor of an automatic programming apparatus reads out NC data, block by block, from a memory (S2), and determines whether or not the read NC data block satisfies an NC data execution interrupt condition, e.g., whether or not the data block contains a specific code (S3). When the interrupt condition is fulfilled, the data block is displayed at an input display field on the screen (S4), and then the NC data execution, including a graphic display operation based on the content of the data block satisfying the interrupt condition, e.g., a display of a tool path and the reading and display of the next block, is automatically interrupted, whereby the operator is allowed to thoroughly check the data block satisfying the interrupt condition. After the data checking, the NC data execution is restarted upon input of an interrupt disable command through the operator's key operation (S5-S7).