摘要:
A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra≦0.05 μm and Rmax≦0.6 μm, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.
摘要:
A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra≦0.05 μm and Rmax≦0.6 μm, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.
摘要:
A ceramic heater including a plate member made of insulating ceramics in which one or more pair(s) of through-holes are formed, a rod member made of conductive ceramics with a power-supply terminal at one end. The rod member is inserted into the through hole in the plate member. A conductive layer made of conductive ceramics is formed on the plate member; and a coating layer made of insulating ceramics is formed on the conductive layer. One end face of the rod member has a same plane with a main surface of the plate member, the conductive layer has a heater pattern formed on the main surface of the plate member, and the rod members are electrically insulated not to be short-circuited to each other in the opposite main surface.
摘要:
There is disclosed a ceramic heater 11 comprising: at least a plate member 12 made of insulating ceramics in which one or more pair(s) of through-holes 13 are formed; a rod member 14, being made of conductive ceramics, having a power-supply terminal 18 at one end thereof, and being inserted into the through-hole 13 at another end thereof; a conductive layer 19 made of conductive ceramics formed on the plate member 12; and a coating layer 21 made of insulating ceramics formed on the conductive layer; wherein one end face 16 of the rod member has a same plane with a main surface 15 of the plate member; the conductive layer 19 having a heater pattern 20 is formed on the main surface 15 of the plate member having the same plane; and the rod members 14 are electrically insulated not to be short-circuited to each other in the opposite main surface 17. There can be provided a ceramic heater by which an object to be heated being directly put thereon can be heated uniformly and of which heating efficiency is high and in which the heater main body is not large in size and is compact.
摘要:
A wheel guard apparatus capable of preventing a wheel from derailing and preventing a vehicle from seriously deviating from a track even if the wheel has derailed includes a fixed portion fixed to a railroad tie located between main line rails; a movable portion supported by a rotating shaft provided on the fixed portion and extending in a horizontal direction and configured to be rotatable around the rotating shaft toward a track center side; and a guard rail located at a position separated from the rotating shaft of the movable portion and held to extend in parallel with the main line rail. The guard rail includes an outer stopper portion configured to prevent the wheel from derailing toward an inner side of the main line rail and an inner stopper portion configured to prevent a derailed vehicle from deviating to an outer side of a track.
摘要:
A derailment prevention guard includes a guard member (3) installed within a gauge and a support member (6) fixed to a sleeper (4) or a concrete slab track. The guard member (3) engages a hold member (8) moveable around an axis (7) supported by the support member (6) as turning center between a main rail (1) and the inside of the gauge on the sleeper. The support member (6) engages the hold member (8) by bolt (12) through turning the hold member (8) toward the main rail (1) around the central axis (7) as turning center on the sleeper (4), and the guard member (3) can be shunted inward by turning the hold member (8) toward the inside of the gauge around the central axis (7) as turning center on the sleeper (4) after loosening the bolt (12).
摘要:
A derailment prevention guard includes a guard member (3) installed within a gauge and a support member (6) fixed to a sleeper (4) or a concrete slab track. The guard member (3) engages a hold member (8) which can turn moveable around an axis (7) supported by the support member (6) as turning center between a main rail (1) and the inside of the gauge on the sleeper. The support member (6) engages the hold member (8) by bolt (12) through turning the hold member (8) toward the main rail (1) around the central axis (7) as turning center on the sleeper (4), and the guard member (3) can be shunted inward by turning the hold member (8) toward the inside of the gauge around the central axis (7) as turning center on the sleeper (4) after loosening the bolt (12).
摘要:
Disclosed is a method of specifying with a program language the location of a fillet to be created at the intersection of a compound curved surface. After the processings for inputting information on a curved surface and information for cutting the same (S1, S2) and calculating the curved surfaces (S3) have been completed, a system receives information on the alternative of inserting a concave fillet or inserting a convex fillet (S4). When the inputted information is for the concave fillet, based on the inputted information (S5), the system executes a predetermined calculation so as to create the concave fillet curved surface at the boundary between two curved surfaces, each on the side to which their respective normal vectors are directed (S6). On the other hand, when the input is the convex fillet, the system executes a predetermined calculation to create the convex fillet curved surface at the boundary between the two surfaces, each on the side opposite to the side to which their respective normal vectors are directed (S7).
摘要:
An NC data execution method which permits an efficient checking of the validity/invalidity of NC data through a simple operation. In an NC data execution process, a processor of an automatic programming apparatus reads out NC data, block by block, from a memory (S2), and determines whether or not the read NC data block satisfies an NC data execution interrupt condition, e.g., whether or not the data block contains a specific code (S3). When the interrupt condition is fulfilled, the data block is displayed at an input display field on the screen (S4), and then the NC data execution, including a graphic display operation based on the content of the data block satisfying the interrupt condition, e.g., a display of a tool path and the reading and display of the next block, is automatically interrupted, whereby the operator is allowed to thoroughly check the data block satisfying the interrupt condition. After the data checking, the NC data execution is restarted upon input of an interrupt disable command through the operator's key operation (S5-S7).
摘要:
A three-dimensional sequence of discretely given points Pi (i=1, 2, . . . ) is projected onto two mutually adjacent planes (XY plane, YZ plane) in a rectangular coordinate system. Next, two-dimensional point sequence connecting curves (TQ, TR) which smoothly connect the projected point sequences (Qi, Ri) on the respective planes are obtained, and a space curve is created using these two-dimensional point sequence connecting curves. Specifically, the common axis (Y axis) of the two mutually adjacent planes is partitioned at minute intervals, coordinates (xj,yj), (yj,zj) of points (Qj,Rj) on each of the two-dimensional point sequence connecting curves (TQ, TR) having a common axis coordinate yj of a j-th partitioning point are successively obtained, and the space curve is created by the coordinates (xj,yj,zj) (j=1, 2, . . . , n) of a sequence of three-dimensional points (Tj).