公开(公告)号：US06949726B2

公开(公告)日：2005-09-27

申请号：US10923835

申请日：2004-08-24

申请人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

发明人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

IPC分类号： H01L21/00 ,  H01L21/02 ,  H01L21/324 ,  H01L21/683 ,  H01L21/687 ,  H02N13/00 ,  H05B3/16

CPC分类号： H01L21/68757 ,  H01L21/67103 ,  H01L21/6833

摘要： A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra≦0.05 μm and Rmax≦0.6 μm, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.

摘要翻译： 具有静电吸附功能的加热装置至少包括支撑基板，用于静电吸附的电极和形成在支撑基板上的加热层，以及形成为覆盖静电吸附用电极和加热层的绝缘层，其中， 绝缘层的表面粗糙度满足Ra <0.05μm，Rmax <=0.6μm，绝缘层表面的维氏硬度为10GPa以下。 因此，可以提供一种具有静电吸附功能的加热装置，其中在硅晶片等上不产生划痕，并且当加热/冷却晶片等时可以抑制颗粒的产生。

公开(公告)号：US20050045619A1

公开(公告)日：2005-03-03

申请号：US10923835

申请日：2004-08-24

申请人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

发明人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

IPC分类号： H01L21/00 ,  H01L21/02 ,  H01L21/324 ,  H01L21/683 ,  H01L21/687 ,  H02N13/00 ,  H05B3/68 ,  H05B3/16

CPC分类号： H01L21/68757 ,  H01L21/67103 ,  H01L21/6833

摘要： A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra≦0.05 μm and Rmax≦0.6 μm, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.

公开(公告)号：US07329842B2

公开(公告)日：2008-02-12

申请号：US11590812

申请日：2006-11-01

申请人： Takuma Kushihashi ,  Noboru Kimura ,  Masaki Seki

发明人： Takuma Kushihashi ,  Noboru Kimura ,  Masaki Seki

IPC分类号： H05B3/06

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： A ceramic heater including a plate member made of insulating ceramics in which one or more pair(s) of through-holes are formed, a rod member made of conductive ceramics with a power-supply terminal at one end. The rod member is inserted into the through hole in the plate member. A conductive layer made of conductive ceramics is formed on the plate member; and a coating layer made of insulating ceramics is formed on the conductive layer. One end face of the rod member has a same plane with a main surface of the plate member, the conductive layer has a heater pattern formed on the main surface of the plate member, and the rod members are electrically insulated not to be short-circuited to each other in the opposite main surface.

摘要翻译： 一种陶瓷加热器，包括由绝缘陶瓷制成的板构件，其中形成有一对或多个通孔，由一端具有电源端子的导电陶瓷制成的杆构件。 杆构件插入板构件中的通孔中。 由导电陶瓷制成的导电层形成在板件上; 并且在导电层上形成由绝缘陶瓷制成的涂层。 杆构件的一个端面具有与板构件的主表面相同的平面，导电层具有形成在板构件的主表面上的加热器图案，并且杆构件电绝缘不会短路 彼此相对的主表面。

公开(公告)号：US20070102419A1

公开(公告)日：2007-05-10

申请号：US11590812

申请日：2006-11-01

申请人： Takuma Kushihashi ,  Noboru Kimura ,  Masaki Seki

发明人： Takuma Kushihashi ,  Noboru Kimura ,  Masaki Seki

IPC分类号： H05B3/06

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： There is disclosed a ceramic heater 11 comprising: at least a plate member 12 made of insulating ceramics in which one or more pair(s) of through-holes 13 are formed; a rod member 14, being made of conductive ceramics, having a power-supply terminal 18 at one end thereof, and being inserted into the through-hole 13 at another end thereof; a conductive layer 19 made of conductive ceramics formed on the plate member 12; and a coating layer 21 made of insulating ceramics formed on the conductive layer; wherein one end face 16 of the rod member has a same plane with a main surface 15 of the plate member; the conductive layer 19 having a heater pattern 20 is formed on the main surface 15 of the plate member having the same plane; and the rod members 14 are electrically insulated not to be short-circuited to each other in the opposite main surface 17. There can be provided a ceramic heater by which an object to be heated being directly put thereon can be heated uniformly and of which heating efficiency is high and in which the heater main body is not large in size and is compact.

摘要翻译： 公开了一种陶瓷加热器11，其包括：至少一个由绝缘陶瓷制成的板构件12，其中形成有一对或多个通孔13; 杆状构件14，由导电陶瓷制成，在其一端具有电源端子18，并在其另一端插入通孔13中; 由导电陶瓷制成的导电层19形成在板件12上; 以及形成在导电层上的由绝缘陶瓷制成的涂层21; 其中所述杆构件的一个端面16与所述板构件的主表面15具有相同的平面; 具有加热器图案20的导电层19形成在具有相同平面的板构件的主表面15上; 并且杆构件14在相对的主表面17中彼此电绝缘不彼此短路。可以提供一种陶瓷加热器，其中直接放置在其上的被加热物体可以被均匀地加热，并且加热 效率高，加热器主体尺寸不大，结构紧凑。

公开(公告)号：US06197391B1

公开(公告)日：2001-03-06

申请号：US08971258

申请日：1997-11-17

申请人： Noboru Kimura ,  Takuma Kushihashi ,  Kazuhiro Yamaguchi ,  Akira Satoh

发明人： Noboru Kimura ,  Takuma Kushihashi ,  Kazuhiro Yamaguchi ,  Akira Satoh

IPC分类号： B01L304

CPC分类号： C04B35/583 ,  C23C14/243 ,  C23C16/342 ,  C30B23/06 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/24479 ,  Y10T428/24595 ,  Y10T428/24628 ,  Y10T428/24942 ,  Y10T428/261 ,  Y10T428/266 ,  Y10T428/268 ,  Y10T428/31678

摘要： There is disclosed a pyrolytic boron nitride container for accommodating a material serving as a source of molecular beams for molecular beam epitaxy, wherein the transmissivity of the pyrolytic boron nitride container with respect to light having a wave number of 2600 cm−1 to 6500 cm−1 has a profile such that the transmissivity changes in the height direction of the container. The pyrolytic boron nitride container can be manufactured through a simple process and at low cost. The pyrolytic boron nitride container can prevent material melt from rising along the inner wall surface and prevent splashed material melt from adhering to the upper portion of the container. Further, the pyrolytic boron nitride container can stabilize molecular beam epitaxial growth and improve the quality of epitaxial film.

摘要翻译： 公开了一种用于容纳用作分子束外延的分子束源的材料的热解氮化硼容器，其中热解氮化硼容器相对于波数为2600cm -1至6500cm -1的光的透射率， 1具有使得容器的高度方向上的透射率变化的轮廓。 热解氮化硼容器可以通过简单的工艺和低成本制造。 热解氮化硼容器可以防止材料熔体沿内壁表面上升，并防止溅射的材料熔体粘附到容器的上部。 此外，热解氮化硼容器可以稳定分子束外延生长并提高外​​延膜的质量。

公开(公告)号：US5925429A

公开(公告)日：1999-07-20

申请号：US901167

申请日：1997-07-28

申请人： Noboru Kimura ,  Takuma Kushihashi ,  Akira Satoh

发明人： Noboru Kimura ,  Takuma Kushihashi ,  Akira Satoh

IPC分类号： B32B7/02 ,  B28B1/30 ,  C01B21/064 ,  C04B35/583 ,  C04B41/87 ,  C23C16/38 ,  C30B11/00 ,  C30B29/40 ,  B01L3/04

CPC分类号： C04B35/583 ,  C30B11/002 ,  Y10T428/131 ,  Y10T428/1314

摘要： There is disclosed a pyrolytic boron nitride container used for a Boat method in which material melt is retained In the container, and a crystal is grown while a temperature gradient is imparted to the material melt. The transmissivity of the pyrolytic boron nitride container with respect to light at a wave number ranging from 3700 cm.sup.-1 to 6500 cm.sup.-1 has a profile such that the transmissivity monotonously changes in the longitudinal direction of the container. The transmissivity profile is produced by imparting a pressure profile during manufacture of the container through deposition of pyrolytic boron nitride, by roughing the outer surface of the container such that the surface roughness has a profile, or by compounding pyrolytic boron nitride with a different material. It becomes possible to facilitate generation of a temperature gradient in material melt within the container and to facilitate control of a temperature profile in the container.

摘要翻译： 公开了一种用于Boat方法的热解氮化硼容器，其中保留材料熔体在容器中，并且在向材料熔体赋予温度梯度的同时生长晶体。 热解氮化硼容器相对于波数为3700cm -1至6500cm -1的光的透射率具有轮廓，使得透光率在容器的纵向上单调变化。 通过在容器的外部表面粗糙化，使得表面粗糙度具有轮廓，或者通过将热解氮化硼与不同材料混合，通过沉积热解氮化硼在制造容器期间施加压力分布来产生透射率曲线。 容易产生容器内的材料熔体的温度梯度并有利于控制容器中的温度分布。

公开(公告)号：US20070131674A1

公开(公告)日：2007-06-14

申请号：US11633039

申请日：2006-12-04

申请人： Takuma Kushihashi ,  Noboru Kimura ,  Mitsuhiro Kanai ,  Yoshihiko Shimizu ,  Akihiko Hara

发明人： Takuma Kushihashi ,  Noboru Kimura ,  Mitsuhiro Kanai ,  Yoshihiko Shimizu ,  Akihiko Hara

IPC分类号： H05B3/16

CPC分类号： H05B3/141 ,  H01C17/00

摘要： There is disclosed a ceramic heater 11 comprising: a plate member 12 made of insulating ceramics in which one or more pair(s) of through-holes 13 are formed; a conductive layer 19 made of conductive ceramics; and a coating layer 21 made of insulating ceramics; wherein a joint member 14 made of conductive ceramics is inserted into the through-hole; an end face 16 of the joint member has a same plane with a main surface 15 of the plate member; the joint member is coated with the conductive layer 19 and thereby fixed to the plate member and also connected with the conductive layer having a heater pattern 20; and an opposite side of the joint member projects from the plate member and the projecting portion 18 constitutes a terminal on which the coating layer is not formed. There can be provided a ceramic heater by which an object to be heated being put directly thereon can be heated uniformly and of which heating efficiency is high and in which the heater main body is not large in size and is compact and scattering of impurities or particles is small and which has a long operating life and is inexpensive.

摘要翻译： 公开了一种陶瓷加热器11，其包括：由绝缘陶瓷制成的板构件12，其中形成有一对或多个通孔13; 由导电陶瓷制成的导电层19; 和由绝缘陶瓷制成的涂层21; 其中由导电陶瓷制成的接合构件14插入通孔中; 接头构件的端面16与板构件的主表面15具有相同的平面; 接合构件涂覆有导电层19，从而固定到板构件并且还与具有加热器图案20的导电层连接; 并且接合构件的与板构件突出的相对侧，突出部18构成未形成涂层的端子。 可以提供一种陶瓷加热器，其中直接放置在其上的待加热物体可以被均匀地加热并且其加热效率高，并且加热器主体的尺寸不大，并且杂质或颗粒的致密散射 体积小，寿命长，价格便宜。

公开(公告)号：US20070045271A1

公开(公告)日：2007-03-01

申请号：US11498714

申请日：2006-08-04

申请人： Noboru Kimura ,  Takuma Kushihashi

发明人： Noboru Kimura ,  Takuma Kushihashi

IPC分类号： H05B3/00 ,  H05B1/00 ,  H05B11/00

CPC分类号： H01L21/67103 ,  H05B3/143

摘要： There is disclosed a heating element 10 comprising: a single-piece heat-resistant base member 1 with a plate portion la in which a heater pattern 3a is formed, a rod portion 1b extending from one surface of the plate portion la and in which a current-carrying part 3b is formed, and an end portion 1c at an end of the rod portion 1b on the opposite side of the plate portion la and in which a power-supply terminal 3c is formed; a dielectric layer 2 with insulating property on the surface of the heat-resistant base member 1; a conductive layer 3 with conductive property on the dielectric layer 2, in which the conductive layer 3 is formed as the heater pattern 3a in the plate portion 1a, as the current-carrying part 3b in the rod portion 1b, and as the power-supply terminal 3c in the end portion 1c; and a protection layer 4 with insulating property which covers the surface of the heater pattern 3a and the current-carrying part 3b, in which the dielectric layer 2, the conductive layer 3 and the protection layer 4 are formed to unite with the heat-resistant base member 1. There can be provided a heating element resistant to corrosion of a power-supply terminal, with a long-life protection layer, with high durability, compact in size, and capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：具有板部1a的单件耐热底座部件1，其中形成加热器图案3a;杆部分1b从板部分1a的一个表面延伸， 形成有载流部分3b，以及位于板部分1a的相对侧的杆部分1b的端部处的端部1c，其中形成有电源端子3c; 在耐热基体1的表面上具有绝缘性的电介质层2; 电介质层2上的导电层3，其中导电层3形成为板部1a中的加热器图案3a，作为杆部1b中的载流部分3b，以及 作为端部1c中的电源端子3c; 以及覆盖加热器图案3a和载流部分3b的表面的绝缘性能的保护层4，其中形成电介质层2，导电层3和保护层4以与热量结合 可以提供耐电源端子的耐腐蚀的加热元件，具有长寿命保护层，耐久性高，尺寸紧凑，并且能够以低成本生产。

公开(公告)号：US5762865A

公开(公告)日：1998-06-09

申请号：US794536

申请日：1997-02-03

申请人： Noboru Kimura ,  Takuma Kushihashi ,  Kazuhiro Yamaguchi

发明人： Noboru Kimura ,  Takuma Kushihashi ,  Kazuhiro Yamaguchi

IPC分类号： B01L3/04 ,  C01B21/064 ,  C30B15/10 ,  C30B27/02 ,  C30B35/00 ,  C21B7/04

CPC分类号： B01L3/04 ,  C30B15/10 ,  C30B35/002

摘要： A pyrolytic boron nitride crucible is disclosed which is suitable for producing a single crystal of a semiconductor compound of Group III and V by the LEC method. The crucible comprises a side part and a bottom part. The bottom part has an absorption coefficient of light of wavelengths between 3,700 cm.sup.-1 and 6,500 cm.sup.-1 of at most 1.7 and/or the absorption coefficient of light of wavelengths between 3,700 cm.sup.-1 to 6,500 cm.sup.-1 of the bottom part is less than that of the side part by at least 0.5. In the crucible, the heat conduction from the bottom part to material melt in the crucible is strengthened, so that the convection flow of the material melt is suppressed and the temperature distribution in the crucible can be easily controlled.

摘要翻译： 公开了一种热解氮化硼坩埚，其适用于通过LEC方法制备III族和V族半导体化合物的单晶。 坩埚包括侧部和底部。 底部的波长在3,700cm -1至6,500cm -1之间的吸收系数至多为1.7，和/或底部波长在3,700cm -1至6,500cm -1之间的光的吸收系数为 小于侧面部分至少0.5。 在坩埚中，坩埚中从底部到材料熔体的热传导得到加强，从而抑制了材料熔体的对流，并且可以容易地控制坩埚中的温度分布。

公开(公告)号：US07683295B2

公开(公告)日：2010-03-23

申请号：US11498714

申请日：2006-08-04

申请人： Noboru Kimura ,  Takuma Kushihashi

发明人： Noboru Kimura ,  Takuma Kushihashi

IPC分类号： H05B3/06 ,  H05B3/08 ,  H05B3/16 ,  H05B3/68

CPC分类号： H01L21/67103 ,  H05B3/143

摘要： There is disclosed a heating element 10 comprising: a single-piece heat-resistant base member 1 with a plate portion 1a in which a heater pattern 3a is formed, a rod portion 1b extending from one surface of the plate portion 1a and in which a current-carrying part 3b is formed, and an end portion 1c at an end of the rod portion 1b on the opposite side of the plate portion la and in which a power-supply terminal 3c is formed; a dielectric layer 2 with insulating property on the surface of the heat-resistant base member 1; a conductive layer 3 with conductive property on the dielectric layer 2, in which the conductive layer 3 is formed as the heater pattern 3a in the plate portion 1a, as the current-carrying part 3b in the rod portion 1b, and as the power-supply terminal 3c in the end portion 1c; and a protection layer 4 with insulating property which covers the surface of the heater pattern 3a and the current-carrying part 3b, in which the dielectric layer 2, the conductive layer 3 and the protection layer 4 are formed to unite with the heat-resistant base member 1. There can be provided a heating element resistant to corrosion of a power-supply terminal, with a long-life protection layer, with high durability, compact in size, and capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：单片耐热基座部件1，其具有形成有加热器图案3a的板部分1a，从板部分1a的一个表面延伸的杆部分1b， 形成通电部3b，在该端部1c的与板部1a相反侧的端部形成有供电端子3c的端部1c， 在耐热基体1的表面上具有绝缘性的电介质层2; 电介质层2上具有导电层3的导电层3，其中导电层3形成为板部分1a中的加热器图案3a，作为杆部分1b中的载流部分3b， 端部1c中的供电端子3c; 以及覆盖加热器图案3a和载流部3b的表面的绝缘性的保护层4，其中形成电介质层2，导电层3和保护层4以与耐热性 基座构件1.可以提供耐电力端子的耐腐蚀的加热元件，具有长寿命保护层，耐久性高，尺寸紧凑，并且能够以低成本生产。