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    Heating apparatus having electrostatic adsorption function
    1.
    发明授权
    Heating apparatus having electrostatic adsorption function 失效
    具有静电吸附功能的加热装置

    公开(公告)号：US06949726B2

    公开(公告)日：2005-09-27

    申请号：US10923835

    申请日：2004-08-24

    申请人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

    发明人： Takuma Kushihashi ,  Yukio Kurosawa ,  Masaki Seki

    IPC分类号： H01L21/00 ,  H01L21/02 ,  H01L21/324 ,  H01L21/683 ,  H01L21/687 ,  H02N13/00 ,  H05B3/16

    CPC分类号： H01L21/68757 ,  H01L21/67103 ,  H01L21/6833

    摘要： A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra≦0.05 μm and Rmax≦0.6 μm, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.

    摘要翻译： 具有静电吸附功能的加热装置至少包括支撑基板，用于静电吸附的电极和形成在支撑基板上的加热层，以及形成为覆盖静电吸附用电极和加热层的绝缘层，其中， 绝缘层的表面粗糙度满足Ra <0.05μm，Rmax <=0.6μm，绝缘层表面的维氏硬度为10GPa以下。 因此，可以提供一种具有静电吸附功能的加热装置，其中在硅晶片等上不产生划痕，并且当加热/冷却晶片等时可以抑制颗粒的产生。

    Switch mechanism
    4.
    发明授权
    Switch mechanism 失效
    开关机构

    公开(公告)号：US5502290A

    公开(公告)日：1996-03-26

    申请号：US483878

    申请日：1995-06-07

    申请人： Osamu Koyanagi ,  Kunio Hirasawa ,  Masanori Tsukushi ,  Yukio Kurosawa ,  Tadashi Sato ,  Youichi Ohshita

    发明人： Osamu Koyanagi ,  Kunio Hirasawa ,  Masanori Tsukushi ,  Yukio Kurosawa ,  Tadashi Sato ,  Youichi Ohshita

    IPC分类号： H01H33/34 ,  H01H33/56

    CPC分类号： H01H33/34 ,  H01H33/563

    摘要： A switching mechanism for use e.g. in a circuit breaker of an underground electric substation has a movable rod which causes opening and closing of an electrical contact and a hydraulic operating system. The hydraulic operating system uses a hydraulic fluid which has a high flammability temperature or is incombustible. Thus, even if such fluid leaks from the hydraulic operating system, the risk of fire or explosion is minimized. The hydraulic operating system may have a sealed tank for the fluid, preferably with a variable volume expansion chamber. In a further development, the hydraulic operating system and possibly parts of the movable rod, is enclosed in a casing which is sealed and is filled with a gas which does not support combustion therein. Thus, the risk of fire or explosion is further reduced. The casing may have a variable volume expansion chamber.

    摘要翻译： 一种切换机制。 在地下电力变电站的断路器中具有使电触头和液压操作系统打开和关闭的活动杆。 液压操作系统使用具有高可燃性温度或不燃的液压油。 因此，即使这种液体从液压操作系统泄漏，也会使火灾或爆炸的风险最小化。 液压操作系统可以具有用于流体的密封罐，优选地具有可变体积膨胀室。 在进一步的发展中，液压操作系统和可能的可移动杆的部分被封装在密封的壳体中并且填充有不支持燃烧的气体。 因此，进一步降低了火灾或爆炸的危险。 壳体可以具有可变体积膨胀室。

    Vacuum switch apparatus
    6.
    发明授权
    Vacuum switch apparatus 失效
    真空开关装置

    公开(公告)号：US5038082A

    公开(公告)日：1991-08-06

    申请号：US489666

    申请日：1990-03-07

    申请人： Hiroshi Arita ,  Kouzi Suzuki ,  Hiroyuki Sugawara ,  Yukio Kurosawa

    发明人： Hiroshi Arita ,  Kouzi Suzuki ,  Hiroyuki Sugawara ,  Yukio Kurosawa

    IPC分类号： B01D59/34 ,  H01H33/66 ,  H01J17/56 ,  H01J21/18 ,  H01S3/097 ,  H01T2/00

    CPC分类号： H01J17/56 ,  H01J21/18

    摘要： A vacuum switch apparatus has an electrically insulating vacuum enclosure which is evacuated to a vacuum degree of 2.times.10.sup.-2 Torr or less. One set of anode and cathode electrodes is arranged in the vacuum enclosure, having capacity which permits the flow of a discharge current of at least 1 KA therebetween and being operable to switch the discharge current at least 10.sup.6 shots. A high voltage power supply applies a high voltage of at least 20 KV across the anode and cathode electrodes. An electron beam irradiation unit irradiates an electron beam on the anode electrode through the cathode electrode. A control electrode is arranged between the beam irradiation unit and the cathode electrode, for controlling passage and interception of the electron beam. A control voltage power supply applies a control voltage to the control electrode. An electromagnetic coil is arranged at least exteriorly of the vacuum enclosure, for generating electromagnetic force which prevents the electron beam, emitted from the electron beam irradiation unit and reaching the anode electrode through the control and cathode electrodes, from being scattered.

    Contact abnormality detecting system
    7.
    发明授权
    Contact abnormality detecting system 失效
    接触异常检测系统

    公开(公告)号：US4975800A

    公开(公告)日：1990-12-04

    申请号：US321382

    申请日：1989-03-10

    申请人： Youichi Oshita ,  Akira Hashimoto ,  Yukio Kurosawa ,  Yoshiaki Inui ,  Tokio Yamagiwa

    发明人： Youichi Oshita ,  Akira Hashimoto ,  Yukio Kurosawa ,  Yoshiaki Inui ,  Tokio Yamagiwa

    IPC分类号： G01R31/327 ,  H01H11/00 ,  H02H3/50

    CPC分类号： H01H11/0062 ,  G01R31/3274 ,  H02H3/50

    摘要： A contact abnormality detection system for use in a gas-insulated switchgear or other power transmission or distribution apparatus. A gas-insulated switchgear includes a hermetic housing, an insulating gas sealed in the housing, and conductors in the housing having contacts for providing a path for a large current and being electrically insulated from the housing. An abnormality in the contacts causes the contacts to generate vibrations when a large current flows through them. A vibration detector detects vibrations generated by the switchgear including the vibrations generated by the contacts. The frequency spectrum of the vibrations detected by the vibration detector is analyzed to detect if the vibrations contain frequency components in the range of 200 to 500 Hz which meet predetermined criteria. If the vibrations do contain such frequency components, a contact abnormality decision unit decides that the contacts exhibit a contact abnormality, thereby permitting the abnormality to be identified before the contacts fail.

    Vacuum interrupter
    8.
    发明授权
    Vacuum interrupter 失效
    真空灭弧室

    公开(公告)号：US4427857A

    公开(公告)日：1984-01-24

    申请号：US319985

    申请日：1981-11-10

    申请人： Nobuo Abe ,  Hiroyuki Sugawara ,  Yukio Kurosawa ,  Akira Wada ,  Kiyoji Iwashita

    发明人： Nobuo Abe ,  Hiroyuki Sugawara ,  Yukio Kurosawa ,  Akira Wada ,  Kiyoji Iwashita

    IPC分类号： H01H33/66 ,  H01H33/664

    CPC分类号： H01H33/6644 ,  H01H33/6643

    摘要： A vacuum interrupter of parallel magnetic field electrode type comprising a pair of separatable arc electrodes disposed within a vacuum vessel, with each being provided on its back side with a conductive rod extending outwardly of the vacuum vessel. Coil electrodes are electrically connected between the associated arc electrode and rod for applying parallel magnetic fields to arc, and slits are formed in the arc electrodes for suppressing eddy currents of the arc electrodes resulting from the parallel fields. A reinforcement member of an electric conductivity higher than a main surface portion of the arc electrode is provided on the back side of the arc electrode opposite to said main surface portion so that the resulting arc current flows uniformly through the reinforcement member so that a higher interruption efficiency can be obtained for the vacuum interrupter.

    摘要翻译： 一种并联磁场电极型真空断路器，包括设置在真空容器内的一对可分离的电弧电极，每个在其后侧设置有一个向该真空容器向外延伸的导电棒。 线圈电极电连接在相关联的电弧电极和棒之间，用于将平行磁场施加到电弧上，并且在电弧电极中形成狭缝以抑制由平行场引起的电弧电极的涡流。 在电弧电极的与所述主表面部分相对的背面上设置有比电弧电极的主表面部分高的电导率的加强部件，使得所产生的电弧电流均匀地流过加强部件，使得较高的中断 可以获得真空断路器的效率。

    Vacuum interrupter with pressure monitoring means
    9.
    发明授权
    Vacuum interrupter with pressure monitoring means 失效
    带压力监控装置的真空灭弧室

    公开(公告)号：US4163130A

    公开(公告)日：1979-07-31

    申请号：US708098

    申请日：1976-07-23

    申请人： Yoshiyuki Kubota ,  Yukio Kurosawa ,  Hiroyuki Sugawara

    发明人： Yoshiyuki Kubota ,  Yukio Kurosawa ,  Hiroyuki Sugawara

    IPC分类号： H01H33/668 ,  H01H33/66

    CPC分类号： H01H33/668

    摘要： A vacuum interrupter with pressure monitoring means wherein a pair of separable electrodes are arranged within a highly evacuated envelope and are connected to a high voltage circuit provided with a vacuum pressure detector element which has a pair of detector electrodes insulated from each other and serving to detect the pressure of the vacuum within the evacuated envelope. The vacuum pressure detector element has a voltage applied thereto in such a manner that one of the detector electrodes is conductively connected to the one end of the evacuated envelope to which the high voltage circuit is connected and the other detector electrode is connected to ground potential through a series connection member consisting of different sorts of voltage allotment elements which are selected from a resistance, an inductance, and a capacitor and whose voltage allotment ratio varies in dependence on frequency. A vacuum pressure detector means detects the operation of the vacuum pressure detector element.

    摘要翻译： 一种具有压力监测装置的真空断路器，其中一对可分离电极被布置在高度抽真空的外壳内并且连接到具有真空压力检测器元件的高压电路，所述真空压力检测器元件具有彼此绝缘的一对检测器电极，并用于检测 抽真空的真空内的真空压力。 真空压力检测器元件具有施加到其上的电压，使得检测器电极之一导电连接到连接有高压电路的真空外壳的一端，另一个检测器电极通过 由电阻，电感和电容器选择的不同种类的电压分配元件组成的串联连接元件，其电压分配比根据频率而变化。 真空压力检测器装置检测真空压力检测器元件的操作。

    Power use circuit breaker and electrical circuit arrangement for electric power generation plant
    10.
    发明授权
    Power use circuit breaker and electrical circuit arrangement for electric power generation plant 失效
    发电厂用电断路器及电路布置

    公开(公告)号：US06751078B1

    公开(公告)日：2004-06-15

    申请号：US09637497

    申请日：2000-08-11

    申请人： Noriaki Munakata ,  Yukio Kurosawa ,  Haruo Honda ,  Shigetoshi Oouchi ,  Masaki Shinohara

    发明人： Noriaki Munakata ,  Yukio Kurosawa ,  Haruo Honda ,  Shigetoshi Oouchi ,  Masaki Shinohara

    IPC分类号： H02H900

    CPC分类号： H01H33/002 ,  H01H33/143 ,  H01H33/167 ,  H01H33/6661

    摘要： A power use circuit breaker includes an arc generating switching unit which adds an electrical resistance in a circuit during current interruption to attenuate a current to be interrupted, a vacuum bulb which is electrically connected in series with the arc generating switching unit and interrupts the attenuated current and a current conducting switching unit connected in parallel with the series circuit of the vacuum bulb and the arc generating switching unit. For current conduction the current conducting switching unit is closed after the vacuum bulb and the arc generating switching unit are closed, and for current interruption after opening the current conducting switching unit, the vacuum bulb and the arc generating switching unit are opened.

    摘要翻译： 电力使用断路器包括电弧产生开关单元，其在电流中断期间在电路中增加电阻以衰减要中断的电流;真空灯泡，其与电弧产生开关单元串联电连接并中断衰减的电流 以及与真空管和串联电路并联连接的电流开关单元。 对于导通电流，导通开关单元在真空灯泡和电弧产生切换单元关闭之后关闭，并且在打开导电切换单元之后的电流中断，真空灯泡和电弧产生切换单元打开。