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公开(公告)号：US4223550A
公开(公告)日：1980-09-23
申请号：US928031
申请日：1978-07-25
申请人： Teizo Takahama , Toyoki Kazama , Tatumi Hieda
发明人： Teizo Takahama , Toyoki Kazama , Tatumi Hieda
CPC分类号： G01N27/122 , G01N33/0031
摘要： A carbon monoxide detecting apparatus is provided which is substantially unaffected by other coexisting gases in the gas atmosphere being sampled. The present invention includes a first carbon monoxide detecting element, a second carbon monoxide detecting element, and a comparing means. The first carbon monoxide detecting element is responsive to carbon monoxide gas and produces a stepwise change in a first film current over a first preselected range of carbon monoxide gas concentration. The second carbon monoxide detecting element is responsive to carbon monoxide gas and produces a stepwise change in a second film current over a second preselected range of carbon monoxide gas. The comparing means is responsive to the first and second film currents and provides an output difference signal .DELTA.E. The amplitude of the output difference signal .DELTA.E is in accordance with the absolute value difference between the first film current and the second film current. The two preselected ranges of carbon monoxide gas concentration can be achieved by appropriately altering the structure of the respective carbon monoxide detecting element and/or by making the substrate temperatures of the two carbon monoxide detecting elements different.
摘要翻译： 提供一氧化碳检测装置，其基本上不受被采样的气体气氛中的其他共存气体的影响。 本发明包括第一一氧化碳检测元件，第二一氧化碳检测元件和比较装置。 第一一氧化碳检测元件响应一氧化碳气体，并且在一氧化碳气体浓度的第一预选范围内产生第一膜电流的逐步变化。 第二一氧化碳检测元件响应于一氧化碳气体，并且在一氧化碳气体的第二预选范围内产生第二膜电流的逐步变化。 比较装置响应于第一和第二胶片电流并提供输出差分信号DELTA E.输出差分信号DELTA E的振幅与第一胶片电流和第二胶片电流之间的绝对值差值相一致。 一氧化碳气体浓度的两个预选范围可以通过适当地改变相应的一氧化碳检测元件的结构和/或通过使两个一氧化碳检测元件的基板温度不同而实现。
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公开(公告)号：US4224280A
公开(公告)日：1980-09-23
申请号：US924324
申请日：1978-07-13
申请人： Teizo Takahama , Toyoki Kazama
发明人： Teizo Takahama , Toyoki Kazama
CPC分类号： G01N27/12
摘要： A carbon monoxide detecting device which exhibits a stepwise change in film current over a preselected range in carbon monoxide concentration is disclosed.According to the present invention, in one embodiment, a first film predominantly of stannic oxide (SnO.sub.2) is formed on an insulating layer, and a second film predominantly of platinum (Pt) is formed on said first film. The second film is of an average film thickness of about 0.3 to 30 platinum atom layers. In another embodiment, gold (Au) is incorporated into said second film, and the second film is of an average film thickness of about 0.3 to 30 platinum atoms and the amount of gold ranges up to 50 atomic percent of the amount of platinum. In a third embodiment, a donor selected from the group consisting of antimony (Sb) and bismuth (Bi) is incorporated into the first film, and an intermediate film predominantly of stannic oxide (SnO.sub.2) having an acceptor selected from the group consisting of platinum (Pt), aluminum (Al), and boron (B) is formed intermediate said first and second films. The first, intermediate, and second films are formed, for example, by a high frequency reactive sputtering method.
摘要翻译： 公开了一氧化碳检测装置，其在一氧化碳浓度的预选范围内显示出薄膜电流的逐步变化。 根据本发明，在一个实施例中，在绝缘层上形成主要为氧化锡（SnO 2）的第一膜，并且在所述第一膜上形成主要由铂（Pt）构成的第二膜。 第二膜的平均膜厚为约0.3〜30铂原子层。 在另一个实施方案中，金（Au）被引入所述第二膜中，第二膜的平均膜厚度为约0.3至30铂原子，金的量范围高达铂的50原子百分比。 在第三实施方案中，将由锑（Sb）和铋（Bi）组成的组中的供体引入到第一膜中，并且主要由具有受体的氧化锡（SnO 2）的中间膜加入，所述受体选自铂 （Pt），铝（Al）和硼（B）形成在所述第一和第二膜之间。 第一，中间和第二膜例如通过高频反应溅射法形成。
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公开(公告)号：US4762605A
公开(公告)日：1988-08-09
申请号：US008655
申请日：1987-01-30
申请人： Takeo Tanaka , Keisuke Sugimoto , Yuji Sugiyama , Hideo Shiraishi , Teizo Takahama , Masahiko Masuda
发明人： Takeo Tanaka , Keisuke Sugimoto , Yuji Sugiyama , Hideo Shiraishi , Teizo Takahama , Masahiko Masuda
IPC分类号： C04B35/48 , C04B35/64 , G01N27/407 , G01N27/409 , G01N27/413 , G01N27/416 , H05B3/18 , G01N27/58
CPC分类号： G01N27/4071 , G01N27/4072
摘要： A limited current type oxygen sensor comprises a solid electrolyte element formed from material having high oxygen-ion conductivity such as yittria-stabilized zirconia. Electrodes are provided on the top surface and the bottom surface of the element and are formed by calcining a mixture of small ceramic particles that are relatively sinter-retardant as compared with oxygen-ion conducting ceramics, of 200 .ANG. in average particle size fine precious metal particles, and a binder. A cover is provided over the second electrode and the cover includes at least one diffusion orifice that permits ambient gas to diffuse toward the second electrode. The dry-gas-based and humid-gas-based oxygen content of the gas is determined by applying a first voltage less than the theoretical water decomposition voltage and a second voltage greater than the theoretical water decomposition voltage to the electrodes to generate corresponding currents associated with the oxygen-ions which flow through the electrolyte element between the first electrode and the second electrode. A heater may be buried in the electrolyte element to increase the flow rate of oxygen ions between the electrodes.
摘要翻译： 有限电流型氧传感器包括由具有高氧离子传导性的材料形成的固体电解质元件，例如氧化钇稳定的氧化锆。 电极设置在元件的顶表面和底表面上，通过煅烧与氧离子传导陶瓷相比具有相对阻燃性的小陶瓷颗粒的混合物形成，平均粒度细的贵金属为200埃 颗粒和粘合剂。 覆盖物设置在第二电极上方，并且盖包括允许环境气体朝向第二电极扩散的至少一个扩散孔。 通过向电极施加小于理论水分解电压的第一电压和大于理论水分解电压的第二电压来确定气体的干气基和湿气基氧含量，以产生相应的电流 其中氧离子在第一电极和第二电极之间流过电解质元件。 加热器可以被埋在电解质元件中以增加电极之间的氧离子的流速。
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公开(公告)号：US5056369A
公开(公告)日：1991-10-15
申请号：US507843
申请日：1990-04-12
申请人： Mitsuru Tamai , Tadanori Yuhara , Kimihiro Nakamura , Kazuaki Kitamura , Toshiyuki Takano , Teizo Takahama , Mikihiko Matsuda , Shinichi Souma
发明人： Mitsuru Tamai , Tadanori Yuhara , Kimihiro Nakamura , Kazuaki Kitamura , Toshiyuki Takano , Teizo Takahama , Mikihiko Matsuda , Shinichi Souma
CPC分类号： G01L9/0073
摘要： The present invention is directed to a capacitive differential pressure detector comprising a diaphragm disposed between two electrodes. In a first embodiment, each of the electrodes comprises two conductive plates with an insulator disposed therebetween. Step-like portions are formed in the conductive plate nearest the diaphragm. In a second embodiment, the plate nearest the diaphragm is insulative with a conductive film formed thereon. In a third embodiment, at least one groove is formed in the plate nearest the diaphragm. The groove is formed in a surface of the plate which faces the diaphragm. The groove also intersects a pressure guide hole. In a fourth embodiment, a substrate is disposed on a surface of the plate farthest from said diaphragm. In a fifth embodiment, an insulating layer has the same coefficient of thermal expansion as the conductive plates. In a sixth embodiment, the diaphragm is etched in order to form a circular flexible part, a centrally disposed displacing part, and a bonding part.
摘要翻译： 本发明涉及一种电容差压检测器，其包括设置在两个电极之间的隔膜。 在第一实施例中，每个电极包括两个导电板，绝缘体位于它们之间。 在最靠近隔膜的导电板中形成阶梯状部分。 在第二实施例中，最靠近隔膜的板是绝缘的，其上形成有导电膜。 在第三实施例中，在最靠近隔膜的板中形成至少一个凹槽。 凹槽形成在板的面向隔膜的表面中。 凹槽还与压力导向孔相交。 在第四实施例中，基板设置在距所述隔膜最远的板的表面上。 在第五实施例中，绝缘层具有与导电板相同的热膨胀系数。 在第六实施例中，为了形成圆形柔性部分，中心设置的位移部分和接合部分，蚀刻隔膜。
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公开(公告)号：US4903532A
公开(公告)日：1990-02-27
申请号：US226915
申请日：1988-08-01
CPC分类号： G01L9/0042 , G01L9/0073
摘要： An electrostatic capacity type pressure detector having a central diaphragm, which is deformed by pressure, and a fixed electrode on each side of the diaphragm. Each of the fixed electrodes includes a first electrically conductive plate confronting the diaphragm, an insulating plate joined to the first conductive plate, and a second electrically conductive plate joined to the first plate. An annular support joined to the diaphragm and to the insulating plate surrounds but is insulated from the first electrically conductive plate. A hole in the electrode introdues pressure into a space defined by the electrode and the diaphragm.
摘要翻译： 具有通过压力变形的中央隔膜的静电电容式压力检测器和在隔膜的每一侧上的固定电极。 每个固定电极包括面对隔膜的第一导电板，连接到第一导电板的绝缘板和连接到第一板的第二导电板。 接合到隔膜和绝缘板的环形支撑件包围但与第一导电板绝缘。 电极中的孔将压力引入由电极和隔膜限定的空间中。
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公开(公告)号：US4695963A
公开(公告)日：1987-09-22
申请号：US721804
申请日：1985-04-10
CPC分类号： B25J13/081 , G01L1/18 , G01L5/162 , G01L5/228
摘要： A pressure sense recognition control system having at least one pressure sensor module for detecting the two-dimensional distribution of the component forces in the three directions in the rectangular coordinate system of a force applied to the pressure receiving surface of the pressure sensor modules. The pressure sensor module has at least one pressure sensor cell having a pressure sensing member made of single crystal silicon, and a plurality of diffusion type strain gauges provided on the surfaces of the pressure sensing member which are substantially perpendicular to the pressure receiving surface and for detecting the three component forces applied to the pressure surfaces in response to the changes of an output of a bridge composed of the strain gauges. These members are mounted on an object, the drive of which is to be controlled. The detection signals derived from the pressure sensor module are processed and converted into pressure sense detection data corresponding to the pressure surfaces for each of the component forces. The data is further processed to produce pressure sense recognition data. Data for controlling the drive of the object is obtained from the pressure sense recognition data.
摘要翻译： 一种压力感测识别控制系统，其具有至少一个压力传感器模块，用于检测施加到压力传感器模块的压力接收表面的力的直角坐标系中的三个方向上的分力的二维分布。 所述压力传感器模块具有至少一个压力传感器单元，所述压力传感器单元具有由单晶硅制成的压力感测构件，以及多个扩散型应变计，其设置在所述压力感测构件的表面上，所述多个扩散型应变计基本上垂直于压力接收表面， 响应于由应变计构成的桥的输出的变化，检测施加到压力表面的三个分力。 这些构件安装在要被控制的驱动器上的物体上。 从压力传感器模块导出的检测信号被处理并转换成对应于每个分力的压力表面的压力检测数据。 进一步处理数据以产生压力感测识别数据。 从压力感测识别数据获得用于控制物体的驱动的数据。
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7.发明授权Sensor for detecting a high molecular weight substance using ionization effects 失效用于使用电离效应检测高分子量物质的传感器
公开(公告)号：US5281915A
公开(公告)日：1994-01-25
申请号：US870266
申请日：1992-04-17
CPC分类号： G01N27/622
摘要： A small, light and portable sensor for detecting and quantifying a harmful high molecular weight substance present in a sample gas in trace amounts is herein disclosed. In the sensor, light and heavy ions are formed by ionizing molecules of the sample gas components in an ionization region. The heavy ions are formed through an ion-molecule reaction. The passage of ions through an ion-passage control region is controlled by directly or indirectly controlling the electric field established between a central electrode and a counter electrode The ions which pass through the control region are collected on a collector electrode. The high molecular weight substance is detected and quantified on the basis of the output from the collector electrode.
摘要翻译： 本文公开了一种用于检测和定量微量存在于样品气体中的有害高分子量物质的小型，轻便和便携式传感器。 在传感器中，通过在电离区域中电离样品气体成分的分子而形成轻重离子。 重离子通过离子 - 分子反应形成。 离子通过离子通道控制区域的通过直接或间接地控制中心电极和对电极之间建立的电场来控制。通过控制区域的离子被收集在集电极上。 基于集电极的输出检测和量化高分子量物质。
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公开(公告)号：US5042308A
公开(公告)日：1991-08-27
申请号：US369847
申请日：1989-06-22
CPC分类号： G01L9/0073 , G01L9/125
摘要： A pressure detector for measuring the pressure of a pressurized fluid by means of electrostatic capacitance comprising a diaphragm displaceable in response to the pressure, and a pair of fixed electrodes, one of each of the fixed electrodes being located on each side of the diaphragm and being electrostatically capacitively coupled to the diaphragm, each of the fixed electrodes being shaped to essentially eliminate electrostatic capacitances that are not differentially linear with respect to the pressure.
摘要翻译： 一种压力检测器，用于通过静电电容来测量加压流体的压力，所述静电电容包括响应于所述压力而可移动的隔膜;以及一对固定电极，每个所述固定电极中的每一个位于所述隔膜的每一侧上，并且是 静电电容耦合到隔膜，每个固定电极被成形为基本上消除了相对于压力没有差异线性的静电电容。
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公开(公告)号：US4839019A
公开(公告)日：1989-06-13
申请号：US121806
申请日：1987-11-17
IPC分类号： F02D41/14 , G01N27/407 , G01N27/409 , G01N27/413 , G01N27/416
CPC分类号： G01N27/4071 , G01N27/4072
摘要： A limited current type oxygen sensor comprises an oxygen ion conductive solid electrolyte, a detection element including a positive electrode and a negative electrode, and a heater element including a heater. The negative electrode is installed on one of the walls constituting a space communicating with a small hole for restricting the amount of oxygen to diffuse therethrough. The porous positive electrode and the heater are embedded in the oxygen ion conductive solid electrolyte layers.
摘要翻译： 有限电流型氧传感器包括氧离子导电固体电解质，包括正电极和负电极的检测元件和包括加热器的加热器元件。 负极安装在构成与小孔连通的空间的一个壁上，用于限制氧气扩散通过其中。 多孔正极和加热器嵌入在氧离子导电固体电解质层中。
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