SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    7.
    发明申请
    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS 有权
    基板加工方法和基板加工装置

    公开(公告)号:US20110065288A1

    公开(公告)日:2011-03-17

    申请号:US12857942

    申请日:2010-08-17

    IPC分类号: H01L21/318 F27D11/00

    摘要: Provided is a substrate processing method comprising: loading a substrate, on which polysilazane is applied, into a substrate process chamber; maintaining an inside of the substrate process chamber, into which the substrate is loaded, in water vapor atmosphere and depressurization atmosphere at a temperature of 400° C.; performing a first heat treatment process on the substrate in a state where the inside of the substrate process chamber is maintained in the water vapor atmosphere and the depressurization atmosphere at the temperature of 400° C.; next, increasing an inner temperature of the substrate process chamber from the temperature of 400° C. in the first heat treatment process to a temperature ranging from 900° C. to 1000° C.; and performing a second heat treatment process on the substrate in a state where the inside of the substrate process chamber is maintained in water vapor atmosphere and depressurization atmosphere at the temperature ranging from 900° C. to 1000° C.

    摘要翻译: 提供了一种基板处理方法,其包括:将其上施加有聚硅氮烷的基板加载到基板处理室中; 在400℃的温度下在水蒸汽气氛和减压气氛中保持衬底处理室的内部,衬底处理室内装载衬底处理室。 在基板处理室的内部保持在水蒸气气氛和400℃的减压气氛的状态下对基板进行第一热处理工序; 接下来,在第一热处理过程中将衬底处理室的内部温度从400℃升高到900℃至1000℃的温度; 在基板处理室的内部保持在水蒸汽气氛和在900℃〜1000℃的温度下的减压气氛的状态下对基板进行第二热处理工序。

    APPLICATION EXECUTING APPARATUS AND APPLICATION EXECUTION METHOD
    10.
    发明申请
    APPLICATION EXECUTING APPARATUS AND APPLICATION EXECUTION METHOD 有权
    应用程序执行装置和应用程序执行方法

    公开(公告)号:US20070198795A1

    公开(公告)日:2007-08-23

    申请号:US11670125

    申请日:2007-02-01

    申请人: Toru HARADA

    发明人: Toru HARADA

    IPC分类号: G06F12/00

    摘要: An application executing apparatus includes a connecting unit configured to receive connection of an external storage medium that stores therein an application and first medium identification information unique to the external storage medium. A storage unit stores therein permission information associated with the application and the first medium identification information. The permission information indicates whether execution of corresponding application is to be permitted. A determining unit determines whether to execute the application stored on the external storage medium based on the first medium identification information and the application stored on the external storage medium and the permission information stored in the storage unit. An application activating unit that activates the application when the determining unit determines to execute the application.

    摘要翻译: 应用程序执行装置包括:连接单元,被配置为接收存储应用的外部存储介质的连接和对外部存储介质唯一的第一介质识别信息。 存储单元存储与应用程序相关联的许可信息和第一介质标识信息。 许可信息指示是否允许执行相应的应用程序。 确定单元基于存储在外部存储介质上的第一介质识别信息和应用以及存储在存储单元中的许可信息来确定是否执行存储在外部存储介质上的应用。 当确定单元确定执行应用程序时,激活应用程序的应用程序激活单元。